{"id":"https://openalex.org/W2090174231","doi":"https://doi.org/10.1109/jmems.2010.2050862","title":"Lamb Waves and Resonant Modes in Rectangular-Bar Silicon Resonators","display_name":"Lamb Waves and Resonant Modes in Rectangular-Bar Silicon Resonators","publication_year":2010,"publication_date":"2010-06-25","ids":{"openalex":"https://openalex.org/W2090174231","doi":"https://doi.org/10.1109/jmems.2010.2050862","mag":"2090174231"},"language":"en","primary_location":{"id":"doi:10.1109/jmems.2010.2050862","doi":"https://doi.org/10.1109/jmems.2010.2050862","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jmems.2010.2050862","pdf_url":null,"source":{"id":"https://openalex.org/S4210187724","display_name":"Journal of Microelectromechanical Systems","issn_l":"1057-7157","issn":["1057-7157","1941-0158"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Microelectromechanical Systems","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064728183","display_name":"Giorgio Casinovi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Giorgio Casinovi","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Sch. of Electr. & Comput. Eng.,, Georgia Inst. of Technol., Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Sch. of Electr. & Comput. Eng.,, Georgia Inst. of Technol., Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103575822","display_name":"Xin Gao","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Xin Gao","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Sch. of Electr. & Comput. Eng.,, Georgia Inst. of Technol., Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Sch. of Electr. & Comput. Eng.,, Georgia Inst. of Technol., Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081523432","display_name":"Farrokh Ayazi","orcid":"https://orcid.org/0000-0002-4539-7393","observed_orcids":["https://orcid.org/0000-0002-4539-7393"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Farrokh Ayazi","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Sch. of Electr. & Comput. Eng.,, Georgia Inst. of Technol., Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Sch. of Electr. & Comput. Eng.,, Georgia Inst. of Technol., Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":0.9442,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.75025694,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"19","issue":"4","first_page":"827","last_page":"839"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.002199999988079071,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/lamb-waves","display_name":"Lamb waves","score":0.9490000009536743},{"id":"https://openalex.org/keywords/resonant-modes","display_name":"resonant modes","score":0.8180000185966492},{"id":"https://openalex.org/keywords/electromechanical-transduction","display_name":"electromechanical transduction","score":0.9129999876022339},{"id":"https://openalex.org/keywords/insertion-loss","display_name":"insertion loss","score":0.8320000171661377},{"id":"https://openalex.org/keywords/electron-beam-lithography","display_name":"electron beam lithography","score":0.671999990940094},{"id":"https://openalex.org/keywords/mems-resonators","display_name":"MEMS resonators","score":0.8109999895095825}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.885686457157135},{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.6696425676345825},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5948229432106018},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.581902265548706},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.5461172461509705},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5021252632141113},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.4956127405166626},{"id":"https://openalex.org/C188721877","wikidata":"https://www.wikidata.org/wiki/Q103510","display_name":"Bar (unit)","level":2,"score":0.48711419105529785},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4453248083591461},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4250425398349762},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3682120144367218},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.244656503200531},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19595927000045776},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1615164577960968},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jmems.2010.2050862","doi":"https://doi.org/10.1109/jmems.2010.2050862","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jmems.2010.2050862","pdf_url":null,"source":{"id":"https://openalex.org/S4210187724","display_name":"Journal of Microelectromechanical Systems","issn_l":"1057-7157","issn":["1057-7157","1941-0158"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Microelectromechanical Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W169359771","https://openalex.org/W1523270007","https://openalex.org/W1535278303","https://openalex.org/W1568906631","https://openalex.org/W1579900883","https://openalex.org/W2015799617","https://openalex.org/W2030013474","https://openalex.org/W2034874214","https://openalex.org/W2035868474","https://openalex.org/W2038667420","https://openalex.org/W2097567794","https://openalex.org/W2111340930","https://openalex.org/W2112117206","https://openalex.org/W2124511537","https://openalex.org/W2126934971","https://openalex.org/W2133298475","https://openalex.org/W2143626039","https://openalex.org/W2147287527","https://openalex.org/W2172200731","https://openalex.org/W2504785953"],"related_works":["https://openalex.org/W2124511537","https://openalex.org/W2111340930","https://openalex.org/W2126934971","https://openalex.org/W2147287527","https://openalex.org/W3119474526","https://openalex.org/W2144466383","https://openalex.org/W1984829424","https://openalex.org/W2979590448","https://openalex.org/W2177522287","https://openalex.org/W7099027301"],"abstract_inverted_index":{"This":[0,42],"paper":[1],"presents":[2],"two":[3],"newly":[4],"developed":[5],"models":[6,155],"of":[7,29,38,56,64,73,88,103,113,145,161],"capacitive":[8,101],"silicon":[9,146],"bulk":[10],"acoustic":[11,90],"resonators":[12,147],"(SiBARs)":[13],"characterized":[14],"by":[15],"a":[16,35,49,84,143,164],"rectangular-bar":[17],"geometry.":[18],"The":[19,75],"first":[20],"model":[21,77],"is":[22,45,78,81,107,171],"derived":[23],"from":[24,122],"an":[25,39],"approximate":[26],"analytical":[27,124],"solution":[28],"the":[30,54,57,60,65,71,94,100,104,111,114,123,127,130,134,139,158],"linear":[31],"elastodynamic":[32],"equations":[33],"for":[34],"parallelepiped":[36],"made":[37],"orthotropic":[40],"material.":[41],"solution,":[43],"which":[44,118],"recognized":[46],"to":[47],"represent":[48],"Lamb":[50],"wave":[51,91],"propagating":[52],"across":[53],"width":[55],"resonator,":[58],"yields":[59],"frequencies":[61,160],"and":[62,80,96,133],"shapes":[63],"resonance":[66,159],"modes":[67],"that":[68,153],"typically":[69],"govern":[70],"operation":[72],"SiBARs.":[74],"second":[76],"numerical":[79],"based":[82],"on":[83,142],"finite-element":[85],"multiphysics":[86],"simulation":[87],"both":[89,154],"propagation":[92],"in":[93,99,110,168],"resonator":[95],"electromechanical":[97],"transduction":[98,131],"gaps":[102],"device.":[105],"It":[106],"especially":[108],"useful":[109],"computation":[112],"SiBAR":[115],"performance":[116],"parameters,":[117],"cannot":[119],"be":[120],"obtained":[121],"model,":[125],"e.g.,":[126],"relationship":[128],"between":[129],"area":[132],"insertion":[135],"loss.":[136],"Comparisons":[137],"with":[138,163],"measurements":[140],"taken":[141],"set":[144],"fabricated":[148],"using":[149],"electron-beam":[150],"lithography":[151],"show":[152],"can":[156],"predict":[157],"SiBARs":[162],"relative":[165],"error,":[166],"which,":[167],"most":[169],"cases,":[170],"significantly":[172],"smaller":[173],"than":[174],"1%.":[175]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-10-12T09:40:04.860316","created_date":"2016-06-24T00:00:00"}