{"id":"https://openalex.org/W2081519366","doi":"https://doi.org/10.1016/s0022-3093(03)00204-7","title":"Advanced measurement techniques of space-charge induced by an electron beam irradiation in thin dielectric layers","display_name":"Advanced measurement techniques of space-charge induced by an electron beam irradiation in thin dielectric layers","publication_year":2003,"publication_date":"2003-06-21","ids":{"openalex":"https://openalex.org/W2081519366","doi":"https://doi.org/10.1016/s0022-3093(03)00204-7","mag":"2081519366"},"language":"en","primary_location":{"id":"doi:10.1016/s0022-3093(03)00204-7","doi":"https://doi.org/10.1016/s0022-3093(03)00204-7","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0022-3093(03)00204-7","pdf_url":null,"source":{"id":"https://openalex.org/S59020844","display_name":"Journal of Non-Crystalline Solids","issn_l":"0022-3093","issn":["0022-3093","1873-4812"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Non-Crystalline Solids","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5047579018","display_name":"J. Li\u00e9bault","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J Liebault","raw_affiliation_strings":["Laboratoire Mat\u00e9riaux et Micro\u00e9lectronique de Provence, UMR CNRS 6137, Fac. des Sciences et Techniques de Saint-Jerome, 13397 Marseille cedex 20, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire Mat\u00e9riaux et Micro\u00e9lectronique de Provence, UMR CNRS 6137, Fac. des Sciences et Techniques de Saint-Jerome, 13397 Marseille cedex 20, France","institution_ids":["https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064222682","display_name":"Kamel Zarbout","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I142899784","display_name":"University of Sfax","ror":"https://ror.org/04d4sd432","country_code":"TN","type":"education","lineage":["https://openalex.org/I142899784"]}],"countries":["FR","TN"],"is_corresponding":false,"raw_author_name":"K Zarbout","raw_affiliation_strings":["Laboratoire Mat\u00e9riaux et Micro\u00e9lectronique de Provence, UMR CNRS 6137, Fac. des Sciences et Techniques de Saint-Jerome, 13397 Marseille cedex 20, France","Laboratoire des Mat\u00e9riaux C\u00e9ramiques, Composites et Polym\u00e9res, Universit\u00e9 de Sfax, Tunisia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire Mat\u00e9riaux et Micro\u00e9lectronique de Provence, UMR CNRS 6137, Fac. des Sciences et Techniques de Saint-Jerome, 13397 Marseille cedex 20, France","institution_ids":["https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Laboratoire des Mat\u00e9riaux C\u00e9ramiques, Composites et Polym\u00e9res, Universit\u00e9 de Sfax, Tunisia","institution_ids":["https://openalex.org/I142899784"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113785927","display_name":"G. Moya","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G Moya","raw_affiliation_strings":["Laboratoire Mat\u00e9riaux et Micro\u00e9lectronique de Provence, UMR CNRS 6137, Fac. des Sciences et Techniques de Saint-Jerome, 13397 Marseille cedex 20, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire Mat\u00e9riaux et Micro\u00e9lectronique de Provence, UMR CNRS 6137, Fac. des Sciences et Techniques de Saint-Jerome, 13397 Marseille cedex 20, France","institution_ids":["https://openalex.org/I1294671590"]}]},{"author_position":"last","author":{"id":null,"display_name":"A Kallel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I142899784","display_name":"University of Sfax","ror":"https://ror.org/04d4sd432","country_code":"TN","type":"education","lineage":["https://openalex.org/I142899784"]}],"countries":["TN"],"is_corresponding":false,"raw_author_name":"A Kallel","raw_affiliation_strings":["Laboratoire des Mat\u00e9riaux C\u00e9ramiques, Composites et Polym\u00e9res, Universit\u00e9 de Sfax, Tunisia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire des Mat\u00e9riaux C\u00e9ramiques, Composites et Polym\u00e9res, Universit\u00e9 de Sfax, Tunisia","institution_ids":["https://openalex.org/I142899784"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3380,"currency":"USD","value_usd":3380},"apc_paid":null,"fwci":0.5019,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.57815873,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"322","issue":"1-3","first_page":"213","last_page":"218"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.8564000129699707,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.8564000129699707,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10511","display_name":"High voltage insulation and dielectric phenomena","score":0.09759999811649323,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.01979999989271164,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/space-charge","display_name":"space charge","score":0.8730000257492065},{"id":"https://openalex.org/keywords/electron-beam-charging","display_name":"electron beam charging","score":0.7239999771118164},{"id":"https://openalex.org/keywords/thin-dielectric-layers","display_name":"thin dielectric layers","score":0.8859999775886536},{"id":"https://openalex.org/keywords/mirror-mode","display_name":"mirror mode","score":0.4000000059604645},{"id":"https://openalex.org/keywords/charge-trapping","display_name":"charge trapping","score":0.7490000128746033},{"id":"https://openalex.org/keywords/charge-detrapping","display_name":"charge detrapping","score":0.6179999709129333},{"id":"https://openalex.org/keywords/secondary-electron-yield","display_name":"secondary electron yield","score":0.8080000281333923},{"id":"https://openalex.org/keywords/charge-injection","display_name":"charge injection","score":0.4909999966621399},{"id":"https://openalex.org/keywords/trap-depth","display_name":"trap depth","score":0.550000011920929},{"id":"https://openalex.org/keywords/dielectric-breakdown","display_name":"dielectric breakdown","score":0.6880000233650208},{"id":"https://openalex.org/keywords/dielectric-aging","display_name":"dielectric aging","score":0.6200000047683716},{"id":"https://openalex.org/keywords/scanning-electron-microscopy","display_name":"scanning electron microscopy","score":0.7850000262260437}],"concepts":[{"id":"https://openalex.org/C103132145","wikidata":"https://www.wikidata.org/wiki/Q1669228","display_name":"Space charge","level":3,"score":0.7504295110702515},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.6909443140029907},{"id":"https://openalex.org/C95312477","wikidata":"https://www.wikidata.org/wiki/Q207340","display_name":"Cathode ray","level":3,"score":0.668462336063385},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.633324146270752},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6326211094856262},{"id":"https://openalex.org/C105163801","wikidata":"https://www.wikidata.org/wiki/Q12103748","display_name":"Electron beam processing","level":3,"score":0.5747106075286865},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.46965304017066956},{"id":"https://openalex.org/C188082385","wikidata":"https://www.wikidata.org/wiki/Q73792","display_name":"Charge (physics)","level":2,"score":0.43526941537857056},{"id":"https://openalex.org/C2778572836","wikidata":"https://www.wikidata.org/wiki/Q380933","display_name":"Space (punctuation)","level":2,"score":0.43086960911750793},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.39325395226478577},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.3845297396183014},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3280142545700073},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26125621795654297},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.12622720003128052},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.12578070163726807},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/s0022-3093(03)00204-7","doi":"https://doi.org/10.1016/s0022-3093(03)00204-7","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0022-3093(03)00204-7","pdf_url":null,"source":{"id":"https://openalex.org/S59020844","display_name":"Journal of Non-Crystalline Solids","issn_l":"0022-3093","issn":["0022-3093","1873-4812"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Non-Crystalline Solids","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W595272034","https://openalex.org/W601224520","https://openalex.org/W1967268268","https://openalex.org/W1984820990","https://openalex.org/W1997039859","https://openalex.org/W2007438775","https://openalex.org/W2010919317","https://openalex.org/W2018318304","https://openalex.org/W2037911416","https://openalex.org/W2071034138","https://openalex.org/W2152880015"],"related_works":["https://openalex.org/W2007438775","https://openalex.org/W2046494493","https://openalex.org/W2067475500","https://openalex.org/W2549839172","https://openalex.org/W1976134917","https://openalex.org/W2088756616","https://openalex.org/W2054412823","https://openalex.org/W2586510080","https://openalex.org/W2039087336","https://openalex.org/W2139916346"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}