{"id":"https://openalex.org/W2078733685","doi":"https://doi.org/10.3807/josk.2005.9.1.026","title":"Measurement of Sub-micrometer Features Based on The Topographic Contrast Using Reflection Confocal Microscopy","display_name":"Measurement of Sub-micrometer Features Based on The Topographic Contrast Using Reflection Confocal Microscopy","publication_year":2005,"publication_date":"2005-03-01","ids":{"openalex":"https://openalex.org/W2078733685","doi":"https://doi.org/10.3807/josk.2005.9.1.026","mag":"2078733685"},"language":"en","primary_location":{"id":"doi:10.3807/josk.2005.9.1.026","doi":"https://doi.org/10.3807/josk.2005.9.1.026","is_oa":false,"landing_page_url":"https://doi.org/10.3807/josk.2005.9.1.026","pdf_url":null,"source":{"id":"https://openalex.org/S83053821","display_name":"Journal of the Optical Society of Korea","issn_l":"1226-4776","issn":["1226-4776","2093-6885"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","poland-40"],"host_organization":"https://openalex.org/P4310319461","host_organization_name":"Optical Society of Korea","host_organization_lineage":["https://openalex.org/P4310319461"],"host_organization_lineage_names":["Optical Society of Korea"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of the Optical Society of Korea","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100758501","display_name":"Seung-Woo Lee","orcid":"https://orcid.org/0000-0001-7329-065X","observed_orcids":["https://orcid.org/0000-0001-7329-065X"]},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"SeungWoo Lee","raw_affiliation_strings":["Department of Mechanical Engineering KAIST"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering KAIST","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079713107","display_name":"Dongkyun Kang","orcid":"https://orcid.org/0000-0001-5063-5387","observed_orcids":["https://orcid.org/0000-0001-5063-5387"]},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"DongKyun Kang","raw_affiliation_strings":["Department of Mechanical Engineering KAIST"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering KAIST","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012850047","display_name":"Hongki Yoo","orcid":"https://orcid.org/0000-0001-9819-3135","observed_orcids":["https://orcid.org/0000-0001-9819-3135"]},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"HongKi Yoo","raw_affiliation_strings":["Department of Mechanical Engineering KAIST"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering KAIST","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023859049","display_name":"TaeJoong Kim","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"TaeJoong Kim","raw_affiliation_strings":["Department of Mechanical Engineering KAIST"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering KAIST","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110685887","display_name":"Dae\u2010Gab Gweon","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Dae-Gab Gweon","raw_affiliation_strings":["Department of Mechanical Engineering KAIST"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering KAIST","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100674443","display_name":"Sukwon Lee","orcid":"https://orcid.org/0000-0002-3005-3707","observed_orcids":["https://orcid.org/0000-0002-3005-3707"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Suk-Won Lee","raw_affiliation_strings":["Micro Nano System Technology R/D LAB, Samsung Electronics Co. Ltd,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro Nano System Technology R/D LAB, Samsung Electronics Co. Ltd,","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100443631","display_name":"Kwang\u2010Soo Kim","orcid":"https://orcid.org/0000-0002-6081-9857","observed_orcids":["https://orcid.org/0000-0002-6081-9857","https://orcid.org/0009-0000-2851-1329"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Kwang-Soo Kim","raw_affiliation_strings":["Micro Nano System Technology R/D LAB, Samsung Electronics Co. Ltd,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro Nano System Technology R/D LAB, Samsung Electronics Co. Ltd,","institution_ids":["https://openalex.org/I4405259277"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.21816663,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"9","issue":"1","first_page":"26","last_page":"31"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.5810999870300293,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.5810999870300293,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.09179999679327011,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10540","display_name":"Advanced Fluorescence Microscopy Techniques","score":0.06369999796152115,"subfield":{"id":"https://openalex.org/subfields/1304","display_name":"Biophysics"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/topographic-contrast","display_name":"topographic contrast","score":0.9300000071525574},{"id":"https://openalex.org/keywords/acousto-optic-deflector","display_name":"acousto-optic deflector","score":0.9369999766349792},{"id":"https://openalex.org/keywords/galvanometer-mirror","display_name":"galvanometer mirror","score":0.8899999856948853},{"id":"https://openalex.org/keywords/video-rate-imaging","display_name":"video-rate imaging","score":0.6119999885559082},{"id":"https://openalex.org/keywords/axial-resolution","display_name":"axial resolution","score":0.9520000219345093},{"id":"https://openalex.org/keywords/lateral-resolution","display_name":"lateral resolution","score":0.9879999756813049},{"id":"https://openalex.org/keywords/differential-confocal-microscopy","display_name":"differential confocal microscopy","score":0.8199999928474426},{"id":"https://openalex.org/keywords/wavefront-error","display_name":"wavefront error","score":0.7540000081062317}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.8167548775672913},{"id":"https://openalex.org/C29420128","wikidata":"https://www.wikidata.org/wiki/Q179472","display_name":"Galvanometer","level":3,"score":0.7332504391670227},{"id":"https://openalex.org/C147080431","wikidata":"https://www.wikidata.org/wiki/Q1074953","display_name":"Microscopy","level":2,"score":0.6201121807098389},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.5838675498962402},{"id":"https://openalex.org/C136009344","wikidata":"https://www.wikidata.org/wiki/Q336201","display_name":"Confocal","level":2,"score":0.5563913583755493},{"id":"https://openalex.org/C2779178360","wikidata":"https://www.wikidata.org/wiki/Q902045","display_name":"Confocal microscopy","level":2,"score":0.531721830368042},{"id":"https://openalex.org/C205372480","wikidata":"https://www.wikidata.org/wiki/Q210521","display_name":"Image resolution","level":2,"score":0.5047656297683716},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5028588175773621},{"id":"https://openalex.org/C171635847","wikidata":"https://www.wikidata.org/wiki/Q406983","display_name":"Micrometer","level":2,"score":0.48631104826927185},{"id":"https://openalex.org/C165699331","wikidata":"https://www.wikidata.org/wiki/Q461533","display_name":"Wavefront","level":2,"score":0.4800918400287628},{"id":"https://openalex.org/C77017923","wikidata":"https://www.wikidata.org/wiki/Q912313","display_name":"Optical microscope","level":3,"score":0.4262658655643463},{"id":"https://openalex.org/C67649825","wikidata":"https://www.wikidata.org/wiki/Q196538","display_name":"Microscope","level":2,"score":0.4117332398891449},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.23621690273284912},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.22172915935516357},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.20333513617515564},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.12485584616661072},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.08026143908500671}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.3807/josk.2005.9.1.026","doi":"https://doi.org/10.3807/josk.2005.9.1.026","is_oa":false,"landing_page_url":"https://doi.org/10.3807/josk.2005.9.1.026","pdf_url":null,"source":{"id":"https://openalex.org/S83053821","display_name":"Journal of the Optical Society of Korea","issn_l":"1226-4776","issn":["1226-4776","2093-6885"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","poland-40"],"host_organization":"https://openalex.org/P4310319461","host_organization_name":"Optical Society of Korea","host_organization_lineage":["https://openalex.org/P4310319461"],"host_organization_lineage_names":["Optical Society of Korea"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of the Optical Society of Korea","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"score":0.41999998688697815,"display_name":"Sustainable cities and communities","id":"https://metadata.un.org/sdg/11"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2056940895","https://openalex.org/W2081388247"],"related_works":["https://openalex.org/W2081388247","https://openalex.org/W2792037658","https://openalex.org/W1580179647","https://openalex.org/W2012307612","https://openalex.org/W2063951682","https://openalex.org/W1967920679","https://openalex.org/W2029233208","https://openalex.org/W1614220442","https://openalex.org/W1965417614","https://openalex.org/W2386388995"],"abstract_inverted_index":{"We":[0,113],"describe":[1],"the":[2,5,20,30,37,52,63,67,75,108,134],"design":[3],"and":[4,24,45,62,88,147],"implementation":[6],"of":[7,36,54,66,77,84,110,133],"video-rate":[8,121],"reflection":[9],"confocal":[10,143],"scanning":[11],"microscopy":[12,144],"(CSM)":[13],"using":[14],"an":[15],"acousto-optical":[16],"deflector":[17],"(AOD)":[18],"for":[19,29,42],"fast":[21],"horizontal":[22],"scan":[23],"a":[25,82,97,120],"galvanometer":[26],"mirror":[27],"(GM)":[28],"slow":[31],"vertical":[32],"scan.":[33],"Design":[34],"parameters":[35],"optical":[38],"system":[39,68],"are":[40,56,69],"determined":[41],"optimal":[43],"resolution":[44,100,127,132],"contrast.":[46],"The":[47,130],"OSLO":[48],"simulations":[49],"show":[50],"that":[51],"performances":[53,76],"CSM":[55,105],"not":[57],"changed":[58],"with":[59,102,119],"deflection":[60],"angle":[61],"wavefront":[64],"errors":[65],"less":[70],"than":[71],"0.012\u03bb.":[72],"To":[73],"evaluate":[74],"designed":[78],"CSM,":[79],"we":[80],"do":[81],"series":[83],"tests,":[85],"measuring":[86],"lateral":[87,131],"axial":[89,99,126],"resolution,":[90],"real":[91],"time":[92],"image":[93],"acquisition.":[94],"Due":[95],"to":[96],"higher":[98],"compared":[101],"conventional":[103],"microscopy,":[104],"can":[106],"detect":[107,114],"surface":[109],"sub-micrometer":[111],"features.":[112],"138\u339a":[115],"line":[116],"shape":[117],"pattern":[118],"(30":[122],"frm/sec).":[123],"And":[124],"10\u339a":[125],"is":[128],"archived.":[129],"topographic":[135],"images":[136],"will":[137],"be":[138],"further":[139],"enhanced":[140],"by":[141],"differential":[142],"(DCM)":[145],"method":[146],"computational":[148],"algorithms.":[149]},"counts_by_year":[],"updated_date":"2026-10-22T18:32:59.640997","created_date":"2016-06-24T00:00:00"}