{"id":"https://openalex.org/W2077370331","doi":"https://doi.org/10.1143/jjap.28.1797","title":"Formation of As-Grown YBaCuO Thin Films by RF Magnetron Sputtering from Three Targets","display_name":"Formation of As-Grown YBaCuO Thin Films by RF Magnetron Sputtering from Three Targets","publication_year":1989,"publication_date":"1989-10-01","ids":{"openalex":"https://openalex.org/W2077370331","doi":"https://doi.org/10.1143/jjap.28.1797","mag":"2077370331"},"language":"en","primary_location":{"id":"doi:10.1143/jjap.28.1797","doi":"https://doi.org/10.1143/jjap.28.1797","is_oa":false,"landing_page_url":"https://doi.org/10.1143/jjap.28.1797","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Ken'ichi Kuroda","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ken'ichi Kuroda","raw_affiliation_strings":["Central Research Laboratory, Mitsubishi Electric Corp"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research Laboratory, Mitsubishi Electric Corp","institution_ids":["https://openalex.org/I4210133125"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109985068","display_name":"Kazuyoshi Kojima","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuyoshi Kojima","raw_affiliation_strings":["Central Research Laboratory, Mitsubishi Electric Corp"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research Laboratory, Mitsubishi Electric Corp","institution_ids":["https://openalex.org/I4210133125"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109517819","display_name":"Masami Tanioku","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masami Tanioku","raw_affiliation_strings":["Central Research Laboratory, Mitsubishi Electric Corp"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research Laboratory, Mitsubishi Electric Corp","institution_ids":["https://openalex.org/I4210133125"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112191001","display_name":"Kazuo Yokoyama","orcid":"https://orcid.org/0009-0006-7961-3855","observed_orcids":["https://orcid.org/0009-0006-7961-3855"]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuo Yokoyama","raw_affiliation_strings":["Materials and Electronic Device Laboratory, Mitsubishi Electric Corp"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Materials and Electronic Device Laboratory, Mitsubishi Electric Corp","institution_ids":["https://openalex.org/I4210133125"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109935900","display_name":"Koichi Hamanaka","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koichi Hamanaka","raw_affiliation_strings":["Materials and Electronic Device Laboratory, Mitsubishi Electric Corp"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Materials and Electronic Device Laboratory, Mitsubishi Electric Corp","institution_ids":["https://openalex.org/I4210133125"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210133125"],"apc_list":{"value":2210,"currency":"USD","value_usd":2210},"apc_paid":null,"fwci":1.805,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.8650583,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"28","issue":"10R","first_page":"1797","last_page":"1797"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.9750999808311462,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.9750999808311462,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.01209999993443489,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11808","display_name":"Superconducting Materials and Applications","score":0.00839999970048666,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ybacuo-thin-films","display_name":"YBaCuO thin films","score":0.9750000238418579},{"id":"https://openalex.org/keywords/rf-magnetron-sputtering","display_name":"RF magnetron sputtering","score":0.8569999933242798},{"id":"https://openalex.org/keywords/as-grown-films","display_name":"as-grown films","score":0.7179999947547913},{"id":"https://openalex.org/keywords/chemical-composition-control","display_name":"chemical composition control","score":0.7020000219345093},{"id":"https://openalex.org/keywords/mgo-100-substrate","display_name":"MgO(001) substrate","score":0.8759999871253967},{"id":"https://openalex.org/keywords/superconducting-films","display_name":"superconducting films","score":0.6949999928474426},{"id":"https://openalex.org/keywords/critical-temperature","display_name":"critical temperature","score":0.7860000133514404},{"id":"https://openalex.org/keywords/c-axis-orientation","display_name":"c-axis orientation","score":0.8009999990463257},{"id":"https://openalex.org/keywords/c-axis-lattice-constant","display_name":"c-axis lattice constant","score":0.8650000095367432}],"concepts":[{"id":"https://openalex.org/C149849071","wikidata":"https://www.wikidata.org/wiki/Q1263816","display_name":"Chemical composition","level":2,"score":0.7686389088630676},{"id":"https://openalex.org/C144082473","wikidata":"https://www.wikidata.org/wiki/Q213185","display_name":"Stoichiometry","level":2,"score":0.7495660185813904},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.7002958655357361},{"id":"https://openalex.org/C132612359","wikidata":"https://www.wikidata.org/wiki/Q625641","display_name":"Lattice constant","level":3,"score":0.6700217127799988},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6634981632232666},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6588769555091858},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.6415761113166809},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.6048225164413452},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5898197293281555},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.5424173474311829},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.5223613977432251},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5075241327285767},{"id":"https://openalex.org/C54101563","wikidata":"https://www.wikidata.org/wiki/Q124131","display_name":"Superconductivity","level":2,"score":0.4946918189525604},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.3737811744213104},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1898547112941742},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.1596563160419464},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.11409458518028259},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.09757548570632935},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1143/jjap.28.1797","doi":"https://doi.org/10.1143/jjap.28.1797","is_oa":false,"landing_page_url":"https://doi.org/10.1143/jjap.28.1797","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1663555443","https://openalex.org/W1972456949","https://openalex.org/W2001877924","https://openalex.org/W2009004229","https://openalex.org/W2014493356","https://openalex.org/W2015274310","https://openalex.org/W2053147445","https://openalex.org/W2063069909","https://openalex.org/W2064506160","https://openalex.org/W2088024233","https://openalex.org/W2090551003"],"related_works":["https://openalex.org/W2081601328","https://openalex.org/W1988276600","https://openalex.org/W2083121367","https://openalex.org/W2090298249","https://openalex.org/W2039511862","https://openalex.org/W2076566085","https://openalex.org/W2316022695","https://openalex.org/W2067211235","https://openalex.org/W1966106078","https://openalex.org/W2078025906"],"abstract_inverted_index":{"As-grown":[0],"YBaCuO":[1],"thin":[2],"films":[3,65,86],"with":[4,66],"500":[5],"\u00c5":[6],"thickness":[7],"have":[8],"been":[9],"formed":[10],"at":[11,56],"620\u00b0C":[12],"on":[13],"MgO(100)":[14],"substrates":[15],"by":[16,39,47],"RF":[17],"magnetron":[18],"sputtering":[19],"from":[20,103,113],"three":[21],"targets:":[22],"Y1.5Ba2Cu3O":[23],"x":[24,27,30],",":[25],"Y1Ba3Cu3O":[26],"and":[28,107,130],"Y1Ba2Cu4.5O":[29],".":[31],"The":[32,64,117],"chemical":[33,50,95],"composition":[34,71,96],"can":[35],"be":[36],"precisely":[37],"controlled":[38],"this":[40],"method.":[41],"A":[42],"smooth":[43],"surface":[44],"was":[45,54,122,135],"obtained":[46],"adjusting":[48],"the":[49,60,78,94,98,108,120,127,131],"composition.":[51],"Zero":[52],"resistivity":[53],"observed":[55],"81":[57],"K":[58],"for":[59],"best":[61],"superconducting":[62],"film.":[63,80],"a":[67,140],"slightly":[68],"Cu":[69],"excessive":[70],"showed":[72],"somewhat":[73],"higher":[74],"T":[75],"c(zero)":[76],"than":[77],"stoichiometric":[79],"X-ray":[81],"diffraction":[82],"spectra":[83],"of":[84,93,100,110,119,139],"sputtered":[85],"did":[87],"not":[88],"change":[89],"distinguishably":[90],"upon":[91],"varying":[92],"when":[97],"value":[99,109],"Ba/Y":[101],"ranged":[102,112],"1.5":[104],"to":[105,115,126,137],"2.3":[106],"Cu/Y":[111],"1.8":[114],"3.3.":[116],"c-axis":[118,132],"film":[121],"highly":[123],"oriented":[124],"normal":[125],"substrate":[128],"surface,":[129],"lattice":[133],"constant":[134],"equal":[136],"that":[138],"bulk":[141],"sample.":[142]},"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-06-24T00:00:00"}