{"id":"https://openalex.org/W2076358675","doi":"https://doi.org/10.1117/12.773567","title":"Effects of laser bandwidth on tool to tool CD matching","display_name":"Effects of laser bandwidth on tool to tool CD matching","publication_year":2008,"publication_date":"2008-03-12","ids":{"openalex":"https://openalex.org/W2076358675","doi":"https://doi.org/10.1117/12.773567","mag":"2076358675"},"language":"en","primary_location":{"id":"doi:10.1117/12.773567","doi":"https://doi.org/10.1117/12.773567","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.773567","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049048632","display_name":"Bo Yun Hsueh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210161555","display_name":"United Microelectronics (Taiwan)","ror":"https://ror.org/0580qje17","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210161555"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Bo-Yun Hsueh","raw_affiliation_strings":["United Microelectronics Corp., Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"United Microelectronics Corp., Taiwan","institution_ids":["https://openalex.org/I4210161555"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102337690","display_name":"Hung-Yi Wu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210161555","display_name":"United Microelectronics (Taiwan)","ror":"https://ror.org/0580qje17","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210161555"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Hung-Yi Wu","raw_affiliation_strings":["United Microelectronics Corp., Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"United Microelectronics Corp., Taiwan","institution_ids":["https://openalex.org/I4210161555"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086544215","display_name":"Louis Jang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210161555","display_name":"United Microelectronics (Taiwan)","ror":"https://ror.org/0580qje17","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210161555"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Louis Jang","raw_affiliation_strings":["United Microelectronics Corp., Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"United Microelectronics Corp., Taiwan","institution_ids":["https://openalex.org/I4210161555"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073616778","display_name":"Met Yeh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210161555","display_name":"United Microelectronics (Taiwan)","ror":"https://ror.org/0580qje17","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210161555"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Met Yeh","raw_affiliation_strings":["United Microelectronics Corp., Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"United Microelectronics Corp., Taiwan","institution_ids":["https://openalex.org/I4210161555"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040400914","display_name":"Chen-Chin Yang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210161555","display_name":"United Microelectronics (Taiwan)","ror":"https://ror.org/0580qje17","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210161555"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chen-Chin Yang","raw_affiliation_strings":["United Microelectronics Corp., Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"United Microelectronics Corp., Taiwan","institution_ids":["https://openalex.org/I4210161555"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075588250","display_name":"George K. C. Huang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210161555","display_name":"United Microelectronics (Taiwan)","ror":"https://ror.org/0580qje17","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210161555"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"George KC Huang","raw_affiliation_strings":["United Microelectronics Corp., Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"United Microelectronics Corp., Taiwan","institution_ids":["https://openalex.org/I4210161555"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109967919","display_name":"Chun-Chi Yu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210161555","display_name":"United Microelectronics (Taiwan)","ror":"https://ror.org/0580qje17","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210161555"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chun-Chi Yu","raw_affiliation_strings":["United Microelectronics Corp., Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"United Microelectronics Corp., Taiwan","institution_ids":["https://openalex.org/I4210161555"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108988765","display_name":"Allen Chang","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Allen Chang","raw_affiliation_strings":["Cymer, Inc. (Taiwan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cymer, Inc. (Taiwan)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.13504541,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"6924","issue":null,"first_page":"69244K","last_page":"69244K"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14158","display_name":"Optical Systems and Laser Technology","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/laser-bandwidth","display_name":"laser bandwidth","score":0.8199999928474426},{"id":"https://openalex.org/keywords/spectral-bandwidth","display_name":"spectral bandwidth","score":0.36500000953674316},{"id":"https://openalex.org/keywords/65-nm-technology-node","display_name":"65 nm technology","score":0.6729999780654907},{"id":"https://openalex.org/keywords/contact-holes","display_name":"contact holes","score":0.6399999856948853},{"id":"https://openalex.org/keywords/lens-aberrations","display_name":"lens aberrations","score":0.5920000076293945},{"id":"https://openalex.org/keywords/partial-coherence","display_name":"partial coherence","score":0.8029999732971191},{"id":"https://openalex.org/keywords/flares","display_name":"flares","score":0.6690000295639038}],"concepts":[{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.82856285572052},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5614073872566223},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.5391005277633667},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5365701913833618},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4064365327358246},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.25628721714019775},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.11618053913116455}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.773567","doi":"https://doi.org/10.1117/12.773567","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.773567","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320335157","display_name":"Cymer","ror":"https://ror.org/00gtpjy03"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1965497846","https://openalex.org/W2003368419","https://openalex.org/W2011984626","https://openalex.org/W2032996766","https://openalex.org/W2035675527","https://openalex.org/W2085025505"],"related_works":["https://openalex.org/W2073410340","https://openalex.org/W2034684467","https://openalex.org/W2024908815","https://openalex.org/W2052667960","https://openalex.org/W2084893492","https://openalex.org/W2064569055","https://openalex.org/W2032693331","https://openalex.org/W2035675527","https://openalex.org/W2060783187","https://openalex.org/W3013308984"],"abstract_inverted_index":{"According":[0],"to":[1,23,41,93,134,169,177],"the":[2,17,95,103,109,171,194],"ITRS":[3],"roadmap,":[4],"low":[5],"k1":[6],"imaging":[7,27],"requires":[8],"extremely":[9],"tight":[10],"control":[11],"of":[12,68,101,108,150,173],"Critical":[13],"Dimension":[14],"(CD).":[15],"Maintaining":[16],"same":[18],"performance":[19,145],"from":[20],"one":[21],"exposure":[22],"another":[24],"for":[25,34,49,76,187],"new":[26],"requirements":[28],"has":[29],"become":[30],"increasingly":[31],"important,":[32],"particularly":[33],"matching":[35,44,75,189],"dry":[36],"and":[37,58,105,153,165,175],"wet":[38],"systems.":[39],"Tool":[40],"tool":[42,73,192],"CD":[43,74,188],"depends":[45],"on":[46,72,82,156,190],"many":[47],"factors,":[48],"example,":[50],"lens":[51],"aberrations,":[52],"partial":[53],"coherence,":[54],"laser":[55,69,110,144],"spectral":[56],"bandwidth":[57,70,113,139,168,178,183],"short":[59],"range":[60,119],"flare.":[61],"We":[62,180],"have":[63],"performed":[64],"a":[65,117],"detailed":[66],"study":[67],"effects":[71],"typical":[77],"65nm":[78,157],"node":[79,158],"structures":[80,159],"exposed":[81],"immersion":[83],"ArF":[84],"scanners.":[85],"A":[86],"high":[87],"accuracy":[88],"on-board":[89],"spectrometer":[90],"was":[91,114],"used":[92],"characterize":[94],"lithography":[96],"Laser":[97],"bandwidth,":[98],"allowing":[99],"measurements":[100],"both":[102,151],"FWHM":[104],"E95":[106],"parameters":[107,146],"spectrum.":[111],"Spectral":[112],"adjusted":[115,186],"over":[116],"larger":[118],"than":[120],"normally":[121],"experienced":[122],"during":[123],"wafer":[124],"exposures":[125],"using":[126,193],"Cymer's":[127],"Tunable":[128],"Advanced":[129],"Bandwidth":[130],"Stabilization":[131],"device":[132],"(T-ABS)":[133],"provide":[135],"controlled":[136],"changes":[137],"in":[138],"while":[140],"maintaining":[141],"all":[142,161],"other":[143],"within":[147],"specification.":[148],"Measurements":[149],"Lines":[152],"Contact":[154],"Holes":[155],"through":[160],"pitches":[162],"were":[163],"made":[164],"correlated":[166],"with":[167],"determine":[170],"sensitivity":[172],"IDB":[174],"C/H":[176],"variation.":[179],"demonstrated":[181],"that":[182],"can":[184],"be":[185],"different":[191],"T-ABS":[195],"function.":[196]},"counts_by_year":[{"year":2015,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}