{"id":"https://openalex.org/W2074654792","doi":"https://doi.org/10.1109/inec.2010.5425074","title":"Research on mechanical-electrical coupling characteristics of GaAs HEMT build-in cantilevers-mass","display_name":"Research on mechanical-electrical coupling characteristics of GaAs HEMT build-in cantilevers-mass","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W2074654792","doi":"https://doi.org/10.1109/inec.2010.5425074","mag":"2074654792"},"language":"en","primary_location":{"id":"doi:10.1109/inec.2010.5425074","doi":"https://doi.org/10.1109/inec.2010.5425074","is_oa":false,"landing_page_url":"https://doi.org/10.1109/inec.2010.5425074","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 3rd International Nanoelectronics Conference (INEC)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Tingting Hou","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tingting Hou","raw_affiliation_strings":["National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100408559","display_name":"Chenyang Xue","orcid":"https://orcid.org/0000-0003-0770-3975","observed_orcids":["https://orcid.org/0000-0003-0770-3975"]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chenyang Xue","raw_affiliation_strings":["National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Guowen Liu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guowen Liu","raw_affiliation_strings":["National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014232024","display_name":"Zhenxin Tan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenxin Tan","raw_affiliation_strings":["National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103528436","display_name":"Binzhen Zhang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Binzhen Zhang","raw_affiliation_strings":["National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110115222","display_name":"Jun Liu","orcid":"https://orcid.org/0009-0000-7809-0796","observed_orcids":["https://orcid.org/0009-0000-7809-0796"]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Liu","raw_affiliation_strings":["National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100739058","display_name":"Wendong Zhang","orcid":"https://orcid.org/0000-0003-1762-9246","observed_orcids":["https://orcid.org/0000-0003-1762-9246","https://orcid.org/0009-0005-3322-6959"]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wendong Zhang","raw_affiliation_strings":["National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.20616602,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1008","last_page":"1009"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9878000020980835,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9878000020980835,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.008299999870359898,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.0013000000035390258,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gaas-hemt","display_name":"GaAs HEMT","score":0.9940000176429749},{"id":"https://openalex.org/keywords/electromechanical-coupling","display_name":"electromechanical coupling","score":0.9150000214576721},{"id":"https://openalex.org/keywords/force-sensing","display_name":"force sensing","score":0.6299999952316284},{"id":"https://openalex.org/keywords/microcantilever","display_name":"microcantilever","score":0.4690000116825104},{"id":"https://openalex.org/keywords/force-sensitivity","display_name":"force sensitivity","score":0.503000020980835},{"id":"https://openalex.org/keywords/mems-sensors","display_name":"MEMS sensors","score":0.6299999952316284}],"concepts":[{"id":"https://openalex.org/C162057924","wikidata":"https://www.wikidata.org/wiki/Q1617706","display_name":"High-electron-mobility transistor","level":4,"score":0.9209702014923096},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.8231942057609558},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6996243000030518},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6819102764129639},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6666406989097595},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.5969651341438293},{"id":"https://openalex.org/C510052550","wikidata":"https://www.wikidata.org/wiki/Q422819","display_name":"Gallium arsenide","level":2,"score":0.5432878136634827},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5351532101631165},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5226107239723206},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.34257131814956665},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.3133949637413025},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.24624398350715637},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.15036246180534363},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14259693026542664}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/inec.2010.5425074","doi":"https://doi.org/10.1109/inec.2010.5425074","is_oa":false,"landing_page_url":"https://doi.org/10.1109/inec.2010.5425074","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 3rd International Nanoelectronics Conference (INEC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"id":"https://metadata.un.org/sdg/9","score":0.4300000071525574,"display_name":"Industry, innovation and infrastructure"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1989808611","https://openalex.org/W2004675498","https://openalex.org/W2038207436","https://openalex.org/W2051226367","https://openalex.org/W2079004242"],"related_works":["https://openalex.org/W2107125189","https://openalex.org/W2303727101","https://openalex.org/W2760996480","https://openalex.org/W1974010882","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2104720263","https://openalex.org/W1966104931","https://openalex.org/W2286084298","https://openalex.org/W2889334434"],"abstract_inverted_index":{"The":[0,51],"micro-structure":[1],"of":[2,18,37,44,53,65],"GaAs":[3,11,38,66],"HEMT":[4,39],"build-in":[5],"cantilevers-mass":[6],"was":[7,57],"designed":[8],"and":[9],"fabricated.":[10],"HEMTs":[12],"were":[13],"embeded":[14],"at":[15],"the":[16,22,35,47,54,62],"root":[17],"cantilevers":[19],"for":[20,73],"increasing":[21],"sensitivity":[23,36],"to":[24,61],"external":[25,55],"force.":[26],"In":[27],"our":[28],"experiments,":[29],"it":[30],"has":[31],"been":[32],"proved":[33],"that":[34,43],"is":[40],"higher":[41],"than":[42],"silicon":[45],"by":[46],"Mechanical-Electrical":[48],"coupling":[49],"characteristics.":[50],"magnitude":[52],"force":[56],"then":[58],"calculated":[59],"according":[60],"out-put":[63],"voltage":[64],"HEMT.":[67],"This":[68],"research":[69],"would":[70],"be":[71],"good":[72],"developing":[74],"a":[75],"new":[76],"sensor":[77],"technology.":[78]},"counts_by_year":[],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2025-10-10T00:00:00"}