{"id":"https://openalex.org/W2074624366","doi":"https://doi.org/10.1364/ao.14.002194","title":"Variable refractive index and birefringent waveguides by sputtering tantalum in O_2\u2013N_2 mixtures","display_name":"Variable refractive index and birefringent waveguides by sputtering tantalum in O_2\u2013N_2 mixtures","publication_year":1975,"publication_date":"1975-09-01","ids":{"openalex":"https://openalex.org/W2074624366","doi":"https://doi.org/10.1364/ao.14.002194","mag":"2074624366","pmid":"https://pubmed.ncbi.nlm.nih.gov/20154983"},"language":"en","primary_location":{"id":"doi:10.1364/ao.14.002194","doi":"https://doi.org/10.1364/ao.14.002194","is_oa":false,"landing_page_url":"https://doi.org/10.1364/ao.14.002194","pdf_url":null,"source":{"id":"https://openalex.org/S4210211917","display_name":"Applied Optics","issn_l":"0003-6935","issn":["0003-6935","1539-4522","1540-8981","1559-128X","2155-3165"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["anvur-scientific","dongbi-c","jufo-1","medline","norway-1","poland-100","russia-white-list-2"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Optics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113581102","display_name":"S. J. Ingrey","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S. J. Ingrey","raw_affiliation_strings":["The authors are with Bell-Northern Research, P.O. Box 3511, Station C, Ottawa K1Y 4HF"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The authors are with Bell-Northern Research, P.O. Box 3511, Station C, Ottawa K1Y 4HF","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016188405","display_name":"William D. Westwood","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"W. D. Westwood","raw_affiliation_strings":["The authors are with Bell-Northern Research, P.O. Box 3511, Station C, Ottawa K1Y 4HF"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The authors are with Bell-Northern Research, P.O. Box 3511, Station C, Ottawa K1Y 4HF","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017416584","display_name":"Yuhua Cheng","orcid":"https://orcid.org/0000-0002-5580-2006","observed_orcids":["https://orcid.org/0000-0002-5580-2006"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Y. C. Cheng","raw_affiliation_strings":["The authors are with Bell-Northern Research, P.O. Box 3511, Station C, Ottawa K1Y 4HF"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The authors are with Bell-Northern Research, P.O. Box 3511, Station C, Ottawa K1Y 4HF","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113634244","display_name":"John S. Wei","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Wei","raw_affiliation_strings":["The authors are with Bell-Northern Research, P.O. Box 3511, Station C, Ottawa K1Y 4HF"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The authors are with Bell-Northern Research, P.O. Box 3511, Station C, Ottawa K1Y 4HF","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":8.0725,"has_fulltext":false,"cited_by_count":35,"citation_normalized_percentile":{"value":0.97460863,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"14","issue":"9","first_page":"2194","last_page":"2194"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.6894999742507935,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.6894999742507935,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.20669999718666077,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.032499998807907104,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optical-waveguides","display_name":"optical waveguides","score":0.7799999713897705},{"id":"https://openalex.org/keywords/variable-refractive-index","display_name":"variable refractive index","score":0.8420000076293945},{"id":"https://openalex.org/keywords/birefringence","display_name":"birefringence","score":0.9570000171661377},{"id":"https://openalex.org/keywords/nitrogen-fractions","display_name":"nitrogen fractions","score":0.5929999947547913},{"id":"https://openalex.org/keywords/refractive-index","display_name":"refractive index","score":0.6460000276565552},{"id":"https://openalex.org/keywords/te-and-tm-modes","display_name":"TE and TM modes","score":0.9150000214576721},{"id":"https://openalex.org/keywords/directional-coupler","display_name":"directional coupler","score":0.9279999732971191},{"id":"https://openalex.org/keywords/thin-film-density","display_name":"thin film density","score":0.5059999823570251},{"id":"https://openalex.org/keywords/molecular-polarizability","display_name":"molecular polarizability","score":0.7760000228881836},{"id":"https://openalex.org/keywords/low-loss-waveguides","display_name":"low-loss waveguides","score":0.6620000004768372}],"concepts":[{"id":"https://openalex.org/C125743686","wikidata":"https://www.wikidata.org/wiki/Q108779","display_name":"Birefringence","level":2,"score":0.8750759959220886},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.8728241920471191},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.82082599401474},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.6772197484970093},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6542409062385559},{"id":"https://openalex.org/C514619126","wikidata":"https://www.wikidata.org/wiki/Q1123","display_name":"Tantalum","level":2,"score":0.6277319192886353},{"id":"https://openalex.org/C139287275","wikidata":"https://www.wikidata.org/wiki/Q869891","display_name":"Polarizability","level":3,"score":0.5209563970565796},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.48982951045036316},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.4413830637931824},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.37609219551086426},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3186321556568146},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.2757195234298706},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10918363928794861},{"id":"https://openalex.org/C32909587","wikidata":"https://www.wikidata.org/wiki/Q11369","display_name":"Molecule","level":2,"score":0.074482262134552},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1364/ao.14.002194","doi":"https://doi.org/10.1364/ao.14.002194","is_oa":false,"landing_page_url":"https://doi.org/10.1364/ao.14.002194","pdf_url":null,"source":{"id":"https://openalex.org/S4210211917","display_name":"Applied Optics","issn_l":"0003-6935","issn":["0003-6935","1539-4522","1540-8981","1559-128X","2155-3165"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["anvur-scientific","dongbi-c","jufo-1","medline","norway-1","poland-100","russia-white-list-2"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Optics","raw_type":"journal-article"},{"id":"pmid:20154983","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/20154983","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied optics","raw_type":"Journal Article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1964899668","https://openalex.org/W1977067421","https://openalex.org/W1988476456","https://openalex.org/W1989189524","https://openalex.org/W1990840720","https://openalex.org/W2001944472","https://openalex.org/W2002034904","https://openalex.org/W2028436237","https://openalex.org/W2034433059","https://openalex.org/W2035337410","https://openalex.org/W2048458366","https://openalex.org/W2055897342","https://openalex.org/W2067497000","https://openalex.org/W2067540954","https://openalex.org/W2073795375","https://openalex.org/W2080320246","https://openalex.org/W2082922492","https://openalex.org/W2086532154","https://openalex.org/W2096803844","https://openalex.org/W2099194310","https://openalex.org/W2116398645"],"related_works":["https://openalex.org/W2020335738","https://openalex.org/W2046671832","https://openalex.org/W2000220013","https://openalex.org/W4321450510","https://openalex.org/W2544445039","https://openalex.org/W2124304809","https://openalex.org/W1972470294","https://openalex.org/W2082252737","https://openalex.org/W3150700505","https://openalex.org/W2913939789"],"abstract_inverted_index":{"Optical":[0],"waveguides":[1],"with":[2,105,125,144],"losses":[3],"<1":[4],"dB/cm":[5],"at":[6,57,90],"632.8":[7,58],"nm":[8,59],"have":[9,87,139],"been":[10,88,140,151],"prepared":[11],"by":[12,153],"sputtering":[13,25],"tantalum":[14],"in":[15,23],"O(2)-N(2)":[16],"mixtures.":[17],"As":[18],"the":[19,24,28,32,47,55,71,79,101,121,165],"fraction":[20,81],"of":[21,31,82,99,118,155],"N(2)":[22],"atmosphere":[26],"increases,":[27],"refractive":[29],"index":[30],"guides":[33],"exhibit":[34],"a":[35,42,106,111,116],"sharp":[36],"maximum":[37],"and":[38,46,63,75,110,135,159],"then":[39],"decreases":[40],"to":[41,93],"much":[43],"lower":[44],"value,":[45],"films":[48,143],"become":[49],"birefringent.":[50],"Using":[51],"an":[52],"oxygen":[53],"discharge,":[54],"indices":[56,86],"for":[60,78],"both":[61],"TE":[62,158],"TM":[64,160],"modes":[65,161],"are":[66,73,103,123],"2.083":[67],"+/-":[68],"0.003,":[69],"but":[70,115],"values":[72],"1.850":[74],"1.877,":[76],"respectively,":[77],"highest":[80],"nitrogen":[83],"used.":[84],"The":[85,147],"measured":[89],"wavelengths":[91],"down":[92],"457.9":[94],"nm.":[95],"For":[96],"low":[97],"fractions":[98],"N(2),":[100],"results":[102],"consistent":[104],"decreasing":[107],"film":[108],"density":[109],"constant":[112],"molecular":[113],"polarizability,":[114],"number":[117],"effects,":[119],"including":[120],"birefringence,":[122],"inconsistent":[124],"this":[126],"picture.":[127],"Waveguide":[128],"structures,":[129],"such":[130],"as":[131],"interconnects,":[132],"branching":[133],"waveguides,":[134],"layered":[136],"directional":[137],"couplers,":[138],"demonstrated":[141],"using":[142],"different":[145],"indices.":[146],"birefringence":[148],"has":[149],"also":[150],"verified":[152],"observation":[154],"interference":[156],"between":[157],"simultaneously":[162],"coupled":[163],"into":[164],"guide.":[166]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}