{"id":"https://openalex.org/W2070110550","doi":"https://doi.org/10.1088/0957-0233/24/7/075002","title":"Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer","display_name":"Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer","publication_year":2013,"publication_date":"2013-05-23","ids":{"openalex":"https://openalex.org/W2070110550","doi":"https://doi.org/10.1088/0957-0233/24/7/075002","mag":"2070110550"},"language":"en","primary_location":{"id":"doi:10.1088/0957-0233/24/7/075002","doi":"https://doi.org/10.1088/0957-0233/24/7/075002","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0957-0233/24/7/075002","pdf_url":null,"source":{"id":"https://openalex.org/S109302362","display_name":"Measurement Science and Technology","issn_l":"0957-0233","issn":["0957-0233","1361-6501"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-2","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Measurement Science and Technology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058828272","display_name":"Young-Sik Ghim","orcid":"https://orcid.org/0000-0002-4052-4939","observed_orcids":["https://orcid.org/0000-0002-4052-4939"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Young-Sik Ghim","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050118465","display_name":"Hyug-Gyo Rhee","orcid":"https://orcid.org/0000-0003-3614-5909","observed_orcids":["https://orcid.org/0000-0003-3614-5909"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hyug-Gyo Rhee","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060739600","display_name":"Ho\u2010Soon Yang","orcid":"https://orcid.org/0000-0001-5699-8605","observed_orcids":["https://orcid.org/0000-0001-5699-8605"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ho-Soon Yang","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5050849321","display_name":"Yun-Woo Lee","orcid":"https://orcid.org/0000-0001-8761-4344","observed_orcids":["https://orcid.org/0000-0001-8761-4344"]},"institutions":[{"id":"https://openalex.org/I2799611809","display_name":"Korea Research Institute of Standards and Science","ror":"https://ror.org/01az7b475","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2799611809","https://openalex.org/I2801339556","https://openalex.org/I4210144908","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Yun-Woo Lee","raw_affiliation_strings":["Center for Space Optics, Korea Research Institute of Standards and Science (KRISS), Science Down, Daejeon 305-340 (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for Space Optics, Korea Research Institute of Standards and Science (KRISS), Science Down, Daejeon 305-340 (Korea, Republic of)","institution_ids":["https://openalex.org/I2799611809"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":1.5962,"has_fulltext":false,"cited_by_count":38,"citation_normalized_percentile":{"value":0.84257656,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"24","issue":"7","first_page":"075002","last_page":"075002"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.004600000102072954,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11897","display_name":"Digital Holography and Microscopy","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thin-film-thickness-measurement","display_name":"thin film thickness measurement","score":0.921999990940094},{"id":"https://openalex.org/keywords/thickness-profile","display_name":"thickness profile","score":0.7429999709129333},{"id":"https://openalex.org/keywords/low-coherence-interferometry","display_name":"low-coherence interferometry","score":0.9959999918937683},{"id":"https://openalex.org/keywords/white-light-interferometry","display_name":"white light interferometry","score":0.9869999885559082},{"id":"https://openalex.org/keywords/surface-height-profile","display_name":"surface height profile","score":0.5759999752044678},{"id":"https://openalex.org/keywords/silicon-dioxide-thin-films","display_name":"SiO2 thin films","score":0.628000020980835},{"id":"https://openalex.org/keywords/measurement-error-simulation","display_name":"measurement error simulation","score":0.5659999847412109}],"concepts":[{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.8009933233261108},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6700839400291443},{"id":"https://openalex.org/C2781181686","wikidata":"https://www.wikidata.org/wiki/Q4226068","display_name":"Coherence (philosophical gambling strategy)","level":2,"score":0.6644592881202698},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5918570756912231},{"id":"https://openalex.org/C2778818243","wikidata":"https://www.wikidata.org/wiki/Q899552","display_name":"Optical coherence tomography","level":2,"score":0.45311036705970764},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.12483331561088562},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1088/0957-0233/24/7/075002","doi":"https://doi.org/10.1088/0957-0233/24/7/075002","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0957-0233/24/7/075002","pdf_url":null,"source":{"id":"https://openalex.org/S109302362","display_name":"Measurement Science and Technology","issn_l":"0957-0233","issn":["0957-0233","1361-6501"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-2","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Measurement Science and Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":29,"referenced_works":["https://openalex.org/W631020502","https://openalex.org/W1978078318","https://openalex.org/W1980162907","https://openalex.org/W2000326631","https://openalex.org/W2006219965","https://openalex.org/W2009733773","https://openalex.org/W2012615554","https://openalex.org/W2021412292","https://openalex.org/W2025993969","https://openalex.org/W2032035776","https://openalex.org/W2034010375","https://openalex.org/W2045931488","https://openalex.org/W2062585864","https://openalex.org/W2074792810","https://openalex.org/W2082645082","https://openalex.org/W2084349857","https://openalex.org/W2086604676","https://openalex.org/W2087113268","https://openalex.org/W2088990551","https://openalex.org/W2092469929","https://openalex.org/W2100001783","https://openalex.org/W2108024223","https://openalex.org/W2112192464","https://openalex.org/W2148388784","https://openalex.org/W2149582360","https://openalex.org/W2150345503","https://openalex.org/W2155121290","https://openalex.org/W2170598476","https://openalex.org/W2316145694"],"related_works":["https://openalex.org/W2037435980","https://openalex.org/W2014486658","https://openalex.org/W1971403145","https://openalex.org/W3091328633","https://openalex.org/W2536758548","https://openalex.org/W7172400225","https://openalex.org/W2092469929","https://openalex.org/W1969109821","https://openalex.org/W1964692509","https://openalex.org/W2159908092"],"abstract_inverted_index":{"White-light":[0],"interferometry":[1],"has":[2],"been":[3,34],"spotlighted":[4],"for":[5,83,116],"years":[6],"in":[7],"the":[8,38,49,55,59,66,72,76,96,104,119,139,144],"field":[9],"of":[10,43,58,71,118],"microelectronics":[11],"as":[12],"a":[13,44,112,128,149],"3D":[14],"profiling":[15],"tool":[16],"but":[17],"its":[18],"application":[19],"was":[20],"limited":[21],"to":[22,36,93,143],"only":[23],"opaque":[24,85],"surfaces.":[25],"Recently":[26],"many":[27],"approaches":[28],"using":[29],"white-light":[30],"extended":[31],"sources":[32],"have":[33],"performed":[35],"measure":[37],"top":[39,67,123],"and":[40,68,75,99,122,147],"bottom":[41,69],"surfaces":[42,70],"thin-film":[45],"structure":[46],"simultaneously.":[47],"When":[48],"film":[50,73,97,120,145,151],"thickness":[51,98,121,146],"is":[52,89,135],"less":[53],"than":[54,82],"coherence":[56],"length":[57],"light":[60],"source,":[61],"two":[62],"waves":[63],"reflected":[64],"from":[65,103],"overlap":[74],"interference":[77],"signal":[78],"become":[79],"more":[80],"complicated":[81],"an":[84,90],"surface.":[86],"Thus,":[87],"it":[88],"essential":[91],"issue":[92],"cleanly":[94],"separate":[95],"surface":[100,124],"height":[101,125],"information":[102],"complex":[105],"interferograms.":[106],"In":[107],"this":[108],"paper,":[109],"we":[110],"describe":[111],"Mirau-type":[113],"low-coherence":[114],"interferometer":[115],"measurements":[117],"profile":[126],"with":[127],"simple":[129],"measurement":[130,140],"procedure.":[131],"Our":[132],"proposed":[133],"method":[134],"verified":[136],"by":[137],"simulating":[138],"errors":[141],"according":[142],"measuring":[148],"SiO2\u00a0patterned":[150],"structure.":[152]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2016-06-24T00:00:00"}