{"id":"https://openalex.org/W2068415288","doi":"https://doi.org/10.1364/ome.3.001839","title":"Fluorine incorporation into porous silica by gas phase doping with C_2F_6 in N_2","display_name":"Fluorine incorporation into porous silica by gas phase doping with C_2F_6 in N_2","publication_year":2013,"publication_date":"2013-10-09","ids":{"openalex":"https://openalex.org/W2068415288","doi":"https://doi.org/10.1364/ome.3.001839","mag":"2068415288"},"language":"en","primary_location":{"id":"doi:10.1364/ome.3.001839","doi":"https://doi.org/10.1364/ome.3.001839","is_oa":true,"landing_page_url":"https://doi.org/10.1364/ome.3.001839","pdf_url":null,"source":{"id":"https://openalex.org/S2496121912","display_name":"Optical Materials Express","issn_l":"2159-3930","issn":["2159-3930"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","oarl","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Materials Express","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.1364/ome.3.001839","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087774941","display_name":"F. Froehlich","orcid":"https://orcid.org/0000-0002-1585-5904","observed_orcids":["https://orcid.org/0000-0002-1585-5904"]},"institutions":[{"id":"https://openalex.org/I2801349226","display_name":"Leibniz Institute of Photonic Technology","ror":"https://ror.org/02se0t636","country_code":"DE","type":"facility","lineage":["https://openalex.org/I2801349226","https://openalex.org/I315704651"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Frank Froehlich","raw_affiliation_strings":["Institute of Photonic Technology e.V., A.-Einstein-Str. 9, D-07745 Jena, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Photonic Technology e.V., A.-Einstein-Str. 9, D-07745 Jena, Germany","institution_ids":["https://openalex.org/I2801349226"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017221018","display_name":"Claudia Aichele","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2801349226","display_name":"Leibniz Institute of Photonic Technology","ror":"https://ror.org/02se0t636","country_code":"DE","type":"facility","lineage":["https://openalex.org/I2801349226","https://openalex.org/I315704651"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Claudia Aichele","raw_affiliation_strings":["Institute of Photonic Technology e.V., A.-Einstein-Str. 9, D-07745 Jena, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Photonic Technology e.V., A.-Einstein-Str. 9, D-07745 Jena, Germany","institution_ids":["https://openalex.org/I2801349226"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108827748","display_name":"Stephan Grimm","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2801349226","display_name":"Leibniz Institute of Photonic Technology","ror":"https://ror.org/02se0t636","country_code":"DE","type":"facility","lineage":["https://openalex.org/I2801349226","https://openalex.org/I315704651"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Stephan Grimm","raw_affiliation_strings":["Institute of Photonic Technology e.V., A.-Einstein-Str. 9, D-07745 Jena, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Photonic Technology e.V., A.-Einstein-Str. 9, D-07745 Jena, Germany","institution_ids":["https://openalex.org/I2801349226"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5107827622","display_name":"Kay Schuster","orcid":"https://orcid.org/0009-0003-5343-5489","observed_orcids":["https://orcid.org/0009-0003-5343-5489"]},"institutions":[{"id":"https://openalex.org/I2801349226","display_name":"Leibniz Institute of Photonic Technology","ror":"https://ror.org/02se0t636","country_code":"DE","type":"facility","lineage":["https://openalex.org/I2801349226","https://openalex.org/I315704651"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Kay Schuster","raw_affiliation_strings":["Institute of Photonic Technology e.V., A.-Einstein-Str. 9, D-07745 Jena, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Photonic Technology e.V., A.-Einstein-Str. 9, D-07745 Jena, Germany","institution_ids":["https://openalex.org/I2801349226"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I2801349226"],"apc_list":{"value":1843,"currency":"USD","value_usd":1843},"apc_paid":{"value":1843,"currency":"USD","value_usd":1843},"fwci":0.2955,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.49864743,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"3","issue":"11","first_page":"1839","last_page":"1839"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10544","display_name":"Glass properties and applications","score":0.35569998621940613,"subfield":{"id":"https://openalex.org/subfields/2503","display_name":"Ceramics and Composites"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10544","display_name":"Glass properties and applications","score":0.35569998621940613,"subfield":{"id":"https://openalex.org/subfields/2503","display_name":"Ceramics and Composites"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.1469999998807907,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12646","display_name":"Inorganic Fluorides and Related Compounds","score":0.11110000312328339,"subfield":{"id":"https://openalex.org/subfields/1604","display_name":"Inorganic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fluorine-incorporation","display_name":"fluorine incorporation","score":0.8629999756813049},{"id":"https://openalex.org/keywords/porous-silica","display_name":"porous silica","score":0.9929999709129333},{"id":"https://openalex.org/keywords/hexafluoroethane","display_name":"hexafluoroethane","score":0.9229999780654907},{"id":"https://openalex.org/keywords/c2f6","display_name":"C2F6","score":0.6890000104904175},{"id":"https://openalex.org/keywords/gas-phase-doping","display_name":"gas-phase doping","score":0.8949999809265137},{"id":"https://openalex.org/keywords/fluorination","display_name":"fluorination","score":0.625},{"id":"https://openalex.org/keywords/silicon-tetrafluoride","display_name":"silicon tetrafluoride","score":0.6980000138282776},{"id":"https://openalex.org/keywords/carbon-deposition","display_name":"carbon deposition","score":0.7710000276565552},{"id":"https://openalex.org/keywords/etching","display_name":"etching","score":0.6119999885559082},{"id":"https://openalex.org/keywords/thermal-decomposition","display_name":"thermal decomposition","score":0.6359999775886536},{"id":"https://openalex.org/keywords/reaction-kinetics","display_name":"reaction kinetics","score":0.6019999980926514}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7968071103096008},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.7280972003936768},{"id":"https://openalex.org/C506198293","wikidata":"https://www.wikidata.org/wiki/Q650","display_name":"Fluorine","level":2,"score":0.602692723274231},{"id":"https://openalex.org/C6648577","wikidata":"https://www.wikidata.org/wiki/Q622669","display_name":"Porosity","level":2,"score":0.5784783959388733},{"id":"https://openalex.org/C3020013744","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Gas phase","level":2,"score":0.5153660178184509},{"id":"https://openalex.org/C105569014","wikidata":"https://www.wikidata.org/wiki/Q3271208","display_name":"Porous medium","level":3,"score":0.45219266414642334},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.4389131963253021},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.33104223012924194},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3229714632034302},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.22468048334121704},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.13369330763816833},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10791221261024475},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.10639744997024536},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1364/ome.3.001839","doi":"https://doi.org/10.1364/ome.3.001839","is_oa":true,"landing_page_url":"https://doi.org/10.1364/ome.3.001839","pdf_url":null,"source":{"id":"https://openalex.org/S2496121912","display_name":"Optical Materials Express","issn_l":"2159-3930","issn":["2159-3930"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","oarl","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Materials Express","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1364/ome.3.001839","doi":"https://doi.org/10.1364/ome.3.001839","is_oa":true,"landing_page_url":"https://doi.org/10.1364/ome.3.001839","pdf_url":null,"source":{"id":"https://openalex.org/S2496121912","display_name":"Optical Materials Express","issn_l":"2159-3930","issn":["2159-3930"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","oarl","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Materials Express","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321469","display_name":"Bundesministerium f\u00fcr Wirtschaft und Technologie","ror":"https://ror.org/02vgg2808"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1968935079","https://openalex.org/W1980874586","https://openalex.org/W1991007021","https://openalex.org/W1997785656","https://openalex.org/W2023345018","https://openalex.org/W2051703925","https://openalex.org/W2070295885","https://openalex.org/W2072028894","https://openalex.org/W2131826592","https://openalex.org/W2141071828","https://openalex.org/W2246488765","https://openalex.org/W2896429868"],"related_works":["https://openalex.org/W7128792719","https://openalex.org/W1997785656","https://openalex.org/W2331749448","https://openalex.org/W1991007021","https://openalex.org/W11506008","https://openalex.org/W1641162249","https://openalex.org/W2602533626","https://openalex.org/W2082704778","https://openalex.org/W2092540333","https://openalex.org/W2031112653"],"abstract_inverted_index":{"The":[0,84],"incorporation":[1],"of":[2,33,75,81,92,105,120,126,136],"fluorine":[3,107],"into":[4],"porous":[5],"silica":[6],"by":[7,78,100],"gas":[8,35],"phase":[9],"doping":[10],"with":[11],"hexafluoroethane":[12],"C2F6":[13,76],"in":[14],"N2":[15],"was":[16],"studied":[17],"using":[18],"thermodynamic":[19,129],"calculations":[20],"and":[21,43,45,51,55,68,71,97],"complementary":[22],"fluorination":[23,69],"experiments":[24],"up":[25],"to":[26,89,115],"1300":[27],"\u00b0C.":[28],"With":[29],"online":[30],"FTIR":[31],"analysis":[32],"the":[34,37,46,61,72,116],"phase,":[36,64,70],"main":[38],"products":[39],"SiF4,":[40],"CO2,":[41],"CO,":[42],"CF4,":[44],"traces":[47],"H2O,":[48],"HF,":[49],"Si2F6O,":[50],"COF2":[52],"were":[53,87],"detected":[54],"three":[56,118],"consecutive":[57],"kinetic":[58],"phases":[59],"deduced:":[60],"unique":[62],"sorption":[63],"a":[65,79,90,133],"combined":[66],"etching":[67,101],"thermal":[73],"decomposition":[74],"accompanied":[77],"deposition":[80,96],"solid":[82],"carbon.":[83],"chemical":[85,93],"species":[86],"connected":[88],"framework":[91],"reactions.":[94],"Carbon":[95],"mass":[98],"loss":[99],"are":[102],"principle":[103],"problems":[104],"this":[106],"precursor,":[108],"that":[109],"cannot":[110],"be":[111,123],"completely":[112],"avoided.":[113],"According":[114],"origin,":[117],"types":[119],"carbon":[121],"can":[122],"distinguished.":[124],"Because":[125],"its":[127],"high":[128],"stability,":[130],"SiF4":[131],"is":[132],"key":[134],"product":[135],"etching.":[137]},"counts_by_year":[{"year":2020,"cited_by_count":2},{"year":2018,"cited_by_count":2},{"year":2015,"cited_by_count":1}],"updated_date":"2026-09-26T08:19:03.415552","created_date":"2016-06-24T00:00:00"}