{"id":"https://openalex.org/W2067006558","doi":"https://doi.org/10.1364/ao.37.005830","title":"Optical scatterometry of subwavelength diffraction gratings: neural-network approach","display_name":"Optical scatterometry of subwavelength diffraction gratings: neural-network approach","publication_year":1998,"publication_date":"1998-09-01","ids":{"openalex":"https://openalex.org/W2067006558","doi":"https://doi.org/10.1364/ao.37.005830","mag":"2067006558","pmid":"https://pubmed.ncbi.nlm.nih.gov/18286076"},"language":"en","primary_location":{"id":"doi:10.1364/ao.37.005830","doi":"https://doi.org/10.1364/ao.37.005830","is_oa":false,"landing_page_url":"https://doi.org/10.1364/ao.37.005830","pdf_url":null,"source":{"id":"https://openalex.org/S4210211917","display_name":"Applied Optics","issn_l":"0003-6935","issn":["0003-6935","1539-4522","1540-8981","1559-128X","2155-3165"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["anvur-scientific","dongbi-c","jufo-1","medline","norway-1","poland-100","russia-white-list-2"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Optics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027934088","display_name":"Ilkka J. Kallioniemi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Ilkka Kallioniemi","raw_affiliation_strings":["The authors are with Helsinki University of Technology, P.O. Box 2200, FIN-02015 HUT, Espoo, Finland:I. Kallioniemi and J. Saarinen are with the Department of Engineering Physics and Mathematics andE. Oja is with the Department of Computer Science and Engineering"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The authors are with Helsinki University of Technology, P.O. Box 2200, FIN-02015 HUT, Espoo, Finland:I. Kallioniemi and J. Saarinen are with the Department of Engineering Physics and Mathematics andE. Oja is with the Department of Computer Science and Engineering","institution_ids":["https://openalex.org/I9927081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085898524","display_name":"Jyrki Saarinen","orcid":"https://orcid.org/0000-0002-5863-4378","observed_orcids":["https://orcid.org/0000-0002-5863-4378"]},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Jyrki Saarinen","raw_affiliation_strings":["The authors are with Helsinki University of Technology, P.O. Box 2200, FIN-02015 HUT, Espoo, Finland:I. Kallioniemi and J. Saarinen are with the Department of Engineering Physics and Mathematics andE. Oja is with the Department of Computer Science and Engineering"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The authors are with Helsinki University of Technology, P.O. Box 2200, FIN-02015 HUT, Espoo, Finland:I. Kallioniemi and J. Saarinen are with the Department of Engineering Physics and Mathematics andE. Oja is with the Department of Computer Science and Engineering","institution_ids":["https://openalex.org/I9927081"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085424325","display_name":"Erkki Oja A","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Erkki Oja","raw_affiliation_strings":["The authors are with Helsinki University of Technology, P.O. Box 2200, FIN-02015 HUT, Espoo, Finland:I. Kallioniemi and J. Saarinen are with the Department of Engineering Physics and Mathematics andE. Oja is with the Department of Computer Science and Engineering"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The authors are with Helsinki University of Technology, P.O. Box 2200, FIN-02015 HUT, Espoo, Finland:I. Kallioniemi and J. Saarinen are with the Department of Engineering Physics and Mathematics andE. Oja is with the Department of Computer Science and Engineering","institution_ids":["https://openalex.org/I9927081"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I9927081"],"apc_list":null,"apc_paid":null,"fwci":3.187,"has_fulltext":false,"cited_by_count":44,"citation_normalized_percentile":{"value":0.89717362,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"37","issue":"25","first_page":"5830","last_page":"5830"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.38109999895095825,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.38109999895095825,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.24979999661445618,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.11559999734163284,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optical-scatterometry","display_name":"optical scatterometry","score":0.9950000047683716},{"id":"https://openalex.org/keywords/diffraction-gratings","display_name":"diffraction gratings","score":0.8870000243186951},{"id":"https://openalex.org/keywords/subwavelength-gratings","display_name":"subwavelength gratings","score":0.9509999752044678},{"id":"https://openalex.org/keywords/neural-network","display_name":"artificial neural networks","score":0.9440000057220459},{"id":"https://openalex.org/keywords/groove-depth","display_name":"groove depth","score":0.5580000281333923},{"id":"https://openalex.org/keywords/diffraction-patterns","display_name":"diffraction patterns","score":0.7450000047683716}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.8572211861610413},{"id":"https://openalex.org/C142181693","wikidata":"https://www.wikidata.org/wiki/Q6493080","display_name":"Laser linewidth","level":3,"score":0.8152303099632263},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.7449200749397278},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.7029012441635132},{"id":"https://openalex.org/C2779472054","wikidata":"https://www.wikidata.org/wiki/Q2377973","display_name":"Groove (engineering)","level":2,"score":0.6810687780380249},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.665429413318634},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5256598591804504},{"id":"https://openalex.org/C18355248","wikidata":"https://www.wikidata.org/wiki/Q850922","display_name":"Diffraction efficiency","level":3,"score":0.5226297378540039},{"id":"https://openalex.org/C78153596","wikidata":"https://www.wikidata.org/wiki/Q7257147","display_name":"Ptychography","level":3,"score":0.4340934455394745},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21609601378440857},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.16089075803756714},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1364/ao.37.005830","doi":"https://doi.org/10.1364/ao.37.005830","is_oa":false,"landing_page_url":"https://doi.org/10.1364/ao.37.005830","pdf_url":null,"source":{"id":"https://openalex.org/S4210211917","display_name":"Applied Optics","issn_l":"0003-6935","issn":["0003-6935","1539-4522","1540-8981","1559-128X","2155-3165"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["anvur-scientific","dongbi-c","jufo-1","medline","norway-1","poland-100","russia-white-list-2"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Optics","raw_type":"journal-article"},{"id":"pmid:18286076","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/18286076","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied optics","raw_type":"Journal Article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W131647911","https://openalex.org/W1964293587","https://openalex.org/W1998059568","https://openalex.org/W2009249337","https://openalex.org/W2011748121","https://openalex.org/W2013778509","https://openalex.org/W2022121549","https://openalex.org/W2028730943","https://openalex.org/W2045897885","https://openalex.org/W2062132437","https://openalex.org/W2072773743","https://openalex.org/W2076945555","https://openalex.org/W2081020148","https://openalex.org/W2089864183","https://openalex.org/W2105217761","https://openalex.org/W2118914178","https://openalex.org/W2137983211","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W2052819713","https://openalex.org/W2132296840","https://openalex.org/W2038844276","https://openalex.org/W1992861114","https://openalex.org/W3198271651","https://openalex.org/W2056196579","https://openalex.org/W2106044318","https://openalex.org/W2135368438","https://openalex.org/W2936221763","https://openalex.org/W2550380439"],"abstract_inverted_index":{"Optical":[0],"scatterometry":[1],"is":[2,17],"a":[3,13,27,31,54,60],"method":[4,33],"for":[5,34,66,75,81],"the":[6,10,24,41,48,51,67,70,76,82],"on-line":[7],"measurement":[8],"of":[9,12,26,40,50,53,63,69],"geometry":[11,52],"diffraction":[14],"grating,":[15],"which":[16],"deduced":[18],"from":[19],"diffraction-pattern":[20],"data.":[21],"We":[22],"demonstrate":[23],"use":[25],"neural":[28],"network":[29],"as":[30],"promising":[32],"performing":[35],"an":[36,44],"accurate":[37],"quantitative":[38],"characterization":[39],"geometry.":[42],"As":[43],"example,":[45],"we":[46],"show":[47],"deduction":[49],"grating":[55],"with":[56,59],"subwavelength":[57],"grooves":[58],"rms":[61],"accuracy":[62],"1.9":[64],"degrees":[65],"slope":[68],"groove":[71,83],"walls,":[72],"0.7":[73],"nm":[74,80],"linewidth,":[77],"and":[78],"1.0":[79],"depth.":[84]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":2},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":4},{"year":2012,"cited_by_count":3}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2016-06-24T00:00:00"}