{"id":"https://openalex.org/W2066058024","doi":"https://doi.org/10.1117/12.237754","title":"High-speed micromachining with UV-copper vapor lasers","display_name":"High-speed micromachining with UV-copper vapor lasers","publication_year":1996,"publication_date":"1996-04-08","ids":{"openalex":"https://openalex.org/W2066058024","doi":"https://doi.org/10.1117/12.237754","mag":"2066058024"},"language":"en","primary_location":{"id":"doi:10.1117/12.237754","doi":"https://doi.org/10.1117/12.237754","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.237754","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056243582","display_name":"Elizabeth K. Illy","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I99043593","display_name":"Macquarie University","ror":"https://ror.org/01sf06y89","country_code":"AU","type":"education","lineage":["https://openalex.org/I99043593"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Elizabeth K. Illy","raw_affiliation_strings":["Macquarie Univ. (Australia)","Macquarie Univ., Australia#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macquarie Univ. (Australia)","institution_ids":["https://openalex.org/I99043593"]},{"raw_affiliation_string":"Macquarie Univ., Australia#TAB#","institution_ids":["https://openalex.org/I99043593"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076665498","display_name":"Alison C. J. Glover","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I99043593","display_name":"Macquarie University","ror":"https://ror.org/01sf06y89","country_code":"AU","type":"education","lineage":["https://openalex.org/I99043593"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Alison C. J. Glover","raw_affiliation_strings":["Macquarie Univ. (Australia)","Macquarie Univ., Australia#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macquarie Univ. (Australia)","institution_ids":["https://openalex.org/I99043593"]},{"raw_affiliation_string":"Macquarie Univ., Australia#TAB#","institution_ids":["https://openalex.org/I99043593"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022182574","display_name":"Michael J. Withford","orcid":"https://orcid.org/0000-0002-6414-8739","observed_orcids":["https://orcid.org/0000-0002-6414-8739"]},"institutions":[{"id":"https://openalex.org/I99043593","display_name":"Macquarie University","ror":"https://ror.org/01sf06y89","country_code":"AU","type":"education","lineage":["https://openalex.org/I99043593"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Michael J. Withford","raw_affiliation_strings":["Macquarie Univ. (Australia)","Macquarie Univ., Australia#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macquarie Univ. (Australia)","institution_ids":["https://openalex.org/I99043593"]},{"raw_affiliation_string":"Macquarie Univ., Australia#TAB#","institution_ids":["https://openalex.org/I99043593"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081260919","display_name":"James A. Piper","orcid":"https://orcid.org/0000-0001-9503-6855","observed_orcids":["https://orcid.org/0000-0001-9503-6855"]},"institutions":[{"id":"https://openalex.org/I99043593","display_name":"Macquarie University","ror":"https://ror.org/01sf06y89","country_code":"AU","type":"education","lineage":["https://openalex.org/I99043593"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"James A. Piper","raw_affiliation_strings":["Macquarie Univ. (Australia)","Macquarie Univ., Australia#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macquarie Univ. (Australia)","institution_ids":["https://openalex.org/I99043593"]},{"raw_affiliation_string":"Macquarie Univ., Australia#TAB#","institution_ids":["https://openalex.org/I99043593"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I99043593"],"apc_list":null,"apc_paid":null,"fwci":1.8174,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.81045145,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2703","issue":null,"first_page":"432","last_page":"432"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11451","display_name":"Advanced Machining and Optimization Techniques","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13232","display_name":"Laser-Ablation Synthesis of Nanoparticles","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/uv-laser-micromachining","display_name":"UV laser micromachining","score":0.7870000004768372},{"id":"https://openalex.org/keywords/copper-vapor-laser","display_name":"copper vapor laser","score":0.9940000176429749},{"id":"https://openalex.org/keywords/ablation-rate","display_name":"ablation rate","score":0.6930000185966492},{"id":"https://openalex.org/keywords/polyimide","display_name":"polyimide","score":0.8759999871253967},{"id":"https://openalex.org/keywords/kapton","display_name":"Kapton","score":0.8629999756813049},{"id":"https://openalex.org/keywords/petg","display_name":"PETG","score":0.996999979019165},{"id":"https://openalex.org/keywords/frequency-doubled-laser","display_name":"frequency-doubled laser","score":0.6399999856948853},{"id":"https://openalex.org/keywords/pulsed-laser-ablation","display_name":"pulsed laser ablation","score":0.8270000219345093},{"id":"https://openalex.org/keywords/ablation-plume","display_name":"ablation plume","score":0.6650000214576721},{"id":"https://openalex.org/keywords/pulse-attenuation","display_name":"pulse attenuation","score":0.6729999780654907},{"id":"https://openalex.org/keywords/sample-temperature-effects","display_name":"sample temperature effects","score":0.7289999723434448}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8136122226715088},{"id":"https://openalex.org/C2778902805","wikidata":"https://www.wikidata.org/wiki/Q322177","display_name":"Ablation","level":2,"score":0.757817268371582},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.7150399684906006},{"id":"https://openalex.org/C45889518","wikidata":"https://www.wikidata.org/wiki/Q3192874","display_name":"Kapton","level":4,"score":0.7147287726402283},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.6965537071228027},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.6738216280937195},{"id":"https://openalex.org/C2776000872","wikidata":"https://www.wikidata.org/wiki/Q1735358","display_name":"Copper vapor laser","level":3,"score":0.6302609443664551},{"id":"https://openalex.org/C2778386843","wikidata":"https://www.wikidata.org/wiki/Q6493035","display_name":"Laser beam machining","level":4,"score":0.5575081706047058},{"id":"https://openalex.org/C2780965675","wikidata":"https://www.wikidata.org/wiki/Q145958","display_name":"Polyimide","level":3,"score":0.5159357190132141},{"id":"https://openalex.org/C544778455","wikidata":"https://www.wikidata.org/wiki/Q753","display_name":"Copper","level":2,"score":0.4987797737121582},{"id":"https://openalex.org/C523214423","wikidata":"https://www.wikidata.org/wiki/Q192047","display_name":"Machining","level":2,"score":0.4984452724456787},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4901169240474701},{"id":"https://openalex.org/C184652730","wikidata":"https://www.wikidata.org/wiki/Q2357982","display_name":"Attenuation","level":2,"score":0.4412744343280792},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.43402600288391113},{"id":"https://openalex.org/C22078206","wikidata":"https://www.wikidata.org/wiki/Q1418023","display_name":"Fluence","level":3,"score":0.41151174902915955},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1803295910358429},{"id":"https://openalex.org/C2984025587","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser beams","level":3,"score":0.13720279932022095},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.12227824330329895},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.08612868189811707},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.237754","doi":"https://doi.org/10.1117/12.237754","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.237754","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2896866927","https://openalex.org/W2896023808","https://openalex.org/W2128537969","https://openalex.org/W1945095003","https://openalex.org/W2114078436","https://openalex.org/W289548273","https://openalex.org/W1971175060","https://openalex.org/W2894814882","https://openalex.org/W3182786889","https://openalex.org/W4320804093"],"abstract_inverted_index":{"Ablation":[0],"rate":[1],"characteristics":[2],"(etch":[3],"rates)":[4],"are":[5,113],"presented":[6],"for":[7,56,83],"micro-machining":[8],"of":[9,39,58,81,92,99,104,107],"polyimide":[10],"(kapton)":[11],"and":[12,25],"PETG":[13],"using":[14],"a":[15,26,79],"frequency":[16,27],"doubled":[17],"Copper":[18],"Vapor":[19],"Laser":[20],"(uv-CVL)":[21],"at":[22,32,47],"255":[23],"nm":[24],"quadrupled":[28],"Nd:YLF":[29],"(4*Nd:YLF)":[30],"laser":[31,94],"261":[33],"nm.":[34],"A":[35],"comparison":[36],"is":[37,88],"made":[38],"the":[40,51,70,97,105],"etch":[41],"rates":[42,54,112],"obtained":[43,55],"by":[44,96],"continuous":[45],"ablation":[46,74,111],"4.25":[48],"kHz":[49],"with":[50,53,60],"uv-CVL":[52],"bursts":[57],"pulses":[59,82,95],"2":[61],"second":[62],"intervals":[63],"between":[64],"bursts.":[65],"These":[66],"results":[67,103],"suggest":[68],"that":[69],"observed":[71],"decrease":[72],"in":[73],"depth":[75],"per":[76],"pulse":[77],"after":[78],"number":[80],"fluences":[84],"above":[85],"0.6":[86],"J/cm2":[87],"due":[89],"to":[90],"attenuation":[91],"succeeding":[93],"plume":[98],"previously-ejected":[100],"material.":[101],"Preliminary":[102],"effect":[106],"sample":[108],"temperature":[109],"on":[110],"also":[114],"presented.":[115]},"counts_by_year":[],"updated_date":"2026-08-21T09:56:20.448147","created_date":"2016-06-24T00:00:00"}