{"id":"https://openalex.org/W2065611419","doi":"https://doi.org/10.1088/0957-4484/17/5/039","title":"Uniform and selective CVD growth of carbon nanotubes and nanofibres on arbitrarily microstructured silicon surfaces","display_name":"Uniform and selective CVD growth of carbon nanotubes and nanofibres on arbitrarily microstructured silicon surfaces","publication_year":2006,"publication_date":"2006-02-10","ids":{"openalex":"https://openalex.org/W2065611419","doi":"https://doi.org/10.1088/0957-4484/17/5/039","mag":"2065611419"},"language":"en","primary_location":{"id":"doi:10.1088/0957-4484/17/5/039","doi":"https://doi.org/10.1088/0957-4484/17/5/039","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0957-4484/17/5/039","pdf_url":null,"source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5072460740","display_name":"Anastasios John Hart","orcid":"https://orcid.org/0000-0002-7372-3512","observed_orcids":["https://orcid.org/0000-0002-7372-3512"]},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A J Hart","raw_affiliation_strings":["Department of Mechanical Engineering, Massachusetts Institute of Technology, 77#N#Massachusetts Avenue Room 3-470, Cambridge, MA 02139,#N#USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Massachusetts Institute of Technology, 77#N#Massachusetts Avenue Room 3-470, Cambridge, MA 02139,#N#USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063914619","display_name":"Bojan O. Boskovic","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"B O Boskovic","raw_affiliation_strings":["Department of Materials Science and Metallurgy, University of Cambridge, Pembroke#N#Street, Cambridge CB2 3QZ,#N#UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Metallurgy, University of Cambridge, Pembroke#N#Street, Cambridge CB2 3QZ,#N#UK","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004616130","display_name":"Alfred T. H. Chuang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"A T H Chuang","raw_affiliation_strings":["Department of Engineering, University of Cambridge, Trumpington Street, Cambridge#N#CB2 1PZ,#N#UK#N#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering, University of Cambridge, Trumpington Street, Cambridge#N#CB2 1PZ,#N#UK#N#","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038674107","display_name":"Vladimir B. Golovko","orcid":"https://orcid.org/0000-0002-2679-8917","observed_orcids":["https://orcid.org/0000-0002-2679-8917"]},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"V B Golovko","raw_affiliation_strings":["Department of Chemistry, University of Cambridge, Lensfield Road, Cambridge CB21EW, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Chemistry, University of Cambridge, Lensfield Road, Cambridge CB21EW, UK","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056592766","display_name":"John Robertson","orcid":"https://orcid.org/0000-0001-6558-528X","observed_orcids":["https://orcid.org/0000-0001-6558-528X","https://orcid.org/0000-0002-6675-8469","https://orcid.org/0000-0001-9069-8980"]},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"J Robertson","raw_affiliation_strings":["Department of Engineering, University of Cambridge, Trumpington Street, Cambridge#N#CB2 1PZ,#N#UK#N#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering, University of Cambridge, Trumpington Street, Cambridge#N#CB2 1PZ,#N#UK#N#","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111480795","display_name":"Brian F. G. Johnson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"B F G Johnson","raw_affiliation_strings":["Department of Chemistry, University of Cambridge, Lensfield Road, Cambridge CB21EW, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Chemistry, University of Cambridge, Lensfield Road, Cambridge CB21EW, UK","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5030295291","display_name":"Alexander Henry Slocum","orcid":"https://orcid.org/0000-0002-5048-4109","observed_orcids":["https://orcid.org/0000-0002-5048-4109"]},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A H Slocum","raw_affiliation_strings":["Department of Mechanical Engineering, Massachusetts Institute of Technology, 77#N#Massachusetts Avenue Room 3-470, Cambridge, MA 02139,#N#USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Massachusetts Institute of Technology, 77#N#Massachusetts Avenue Room 3-470, Cambridge, MA 02139,#N#USA","institution_ids":["https://openalex.org/I63966007"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":0.8733,"has_fulltext":false,"cited_by_count":19,"citation_normalized_percentile":{"value":0.72856535,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"17","issue":"5","first_page":"1397","last_page":"1403"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9907000064849854,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9907000064849854,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.0031999999191612005,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.002199999988079071,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/carbon-nanotubes","display_name":"carbon nanotubes","score":0.9980000257492065},{"id":"https://openalex.org/keywords/carbon-nanofibers","display_name":"carbon nanofibers","score":0.9879999756813049},{"id":"https://openalex.org/keywords/single-walled-carbon-nanotubes","display_name":"single-walled carbon nanotubes","score":0.8619999885559082},{"id":"https://openalex.org/keywords/selective-growth","display_name":"selective growth","score":0.5830000042915344},{"id":"https://openalex.org/keywords/deep-reactive-ion-etching","display_name":"deep reactive ion etching","score":0.8140000104904175},{"id":"https://openalex.org/keywords/sidewall-growth","display_name":"sidewall growth","score":0.5820000171661377},{"id":"https://openalex.org/keywords/catalyst-layer-thickness","display_name":"catalyst layer thickness","score":0.6259999871253967},{"id":"https://openalex.org/keywords/surface-topography","display_name":"surface topography","score":0.6039999723434448},{"id":"https://openalex.org/keywords/hierarchical-surface-texture","display_name":"hierarchical surface texture","score":0.777999997138977},{"id":"https://openalex.org/keywords/wetting-behaviour","display_name":"wetting behaviour","score":0.6620000004768372}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.9380452632904053},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.707169771194458},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6341442465782166},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.6245598793029785},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.4981191158294678},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.37429362535476685},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.36990368366241455},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.29670241475105286},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1088/0957-4484/17/5/039","doi":"https://doi.org/10.1088/0957-4484/17/5/039","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0957-4484/17/5/039","pdf_url":null,"source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},{"id":"pmh:oai:generic.eprints.org:334271","doi":null,"is_oa":false,"landing_page_url":"http://publications.eng.cam.ac.uk/334271/","pdf_url":null,"source":{"id":"https://openalex.org/S4406922847","display_name":"Cambridge University Engineering Department Publications Database","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320308782","display_name":"Hertz Foundation","ror":"https://ror.org/01ycgxf29"},{"id":"https://openalex.org/F4320332423","display_name":"Deshpande Center for Technological Innovation, Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":43,"referenced_works":["https://openalex.org/W1616932920","https://openalex.org/W1623687250","https://openalex.org/W1965388423","https://openalex.org/W1969377989","https://openalex.org/W1969982925","https://openalex.org/W1972680052","https://openalex.org/W1974658861","https://openalex.org/W1997070558","https://openalex.org/W2007600753","https://openalex.org/W2011298872","https://openalex.org/W2011657699","https://openalex.org/W2014862326","https://openalex.org/W2023452984","https://openalex.org/W2023863016","https://openalex.org/W2030496781","https://openalex.org/W2034169578","https://openalex.org/W2037533643","https://openalex.org/W2037772052","https://openalex.org/W2040914901","https://openalex.org/W2042254650","https://openalex.org/W2042431181","https://openalex.org/W2053060934","https://openalex.org/W2053836973","https://openalex.org/W2056141134","https://openalex.org/W2063822786","https://openalex.org/W2067000556","https://openalex.org/W2068238280","https://openalex.org/W2075903537","https://openalex.org/W2076767250","https://openalex.org/W2081853300","https://openalex.org/W2081989905","https://openalex.org/W2084240333","https://openalex.org/W2088673770","https://openalex.org/W2120313081","https://openalex.org/W2137983525","https://openalex.org/W2148760790","https://openalex.org/W2149656698","https://openalex.org/W2151819483","https://openalex.org/W2157321441","https://openalex.org/W2167258477","https://openalex.org/W3153742994","https://openalex.org/W4230871066","https://openalex.org/W4292935239"],"related_works":["https://openalex.org/W2055246762","https://openalex.org/W49851874","https://openalex.org/W2023452984","https://openalex.org/W2082750816","https://openalex.org/W3150710962","https://openalex.org/W2067122372","https://openalex.org/W2086506836","https://openalex.org/W2274463632","https://openalex.org/W2025348989","https://openalex.org/W2158036287"],"abstract_inverted_index":{"Carbon":[0],"nanotubes":[1],"(CNTs)":[2],"and":[3,14,64,148,160,167,173],"nanofibres":[4],"(CNFs)":[5],"are":[6,109],"grown":[7],"on":[8,36,48,88,120,137],"bulk-micromachined":[9],"silicon":[10,42],"surfaces":[11,139],"by":[12,23,54,96,112],"thermal":[13,62,73],"plasma-enhanced":[15],"chemical":[16],"vapour":[17],"deposition":[18,22],"(PECVD),":[19],"with":[20,145],"catalyst":[21,93],"electron":[24],"beam":[25],"evaporation":[26],"or":[27],"from":[28,106],"a":[29,132],"colloidal":[30,114],"solution":[31],"of":[32,40,50,61,69,77,91,102,135],"cobalt":[33],"nanoparticles.":[34],"Growth":[35],"the":[37,59,83,89,92,113],"peaked":[38],"topography":[39],"plasma-etched":[41],"'micrograss'":[43],"supports,":[44],"as":[45,47,168],"well":[46],"sidewalls":[49],"vertical":[51],"structures":[52,84],"fabricated":[53],"deep-reactive":[55],"ion":[56],"etching":[57],"demonstrates":[58],"performance":[60],"CVD":[63],"PECVD":[65],"in":[66,171],"limiting":[67],"cases":[68],"surface":[70,121,124,150],"topography.":[71],"In":[72,99],"CVD,":[74],"uniform":[75],"films":[76],"tangled":[78],"single-walled":[79],"CNTs":[80],"(SWNTs)":[81],"coat":[82],"despite":[85],"oblique-angle":[86],"effects":[87],"thickness":[90],"layers":[94],"deposited":[95],"e-beam":[97],"evaporation.":[98],"PECVD,":[100],"forests":[101],"aligned":[103],"CNFs":[104],"protrude":[105],"areas":[107],"which":[108],"favourably":[110],"wet":[111],"catalyst,":[115],"demonstrating":[116],"selective":[117],"growth":[118],"based":[119],"texture.":[122],"These":[123],"preparation":[125],"principles":[126],"can":[127],"be":[128,155],"used":[129,156],"to":[130,157],"grow":[131],"wide":[133],"variety":[134],"nanostructures":[136],"microstructured":[138],"having":[140],"arbitrary":[141],"topography,":[142],"giving":[143],"substrates":[144,153],"hierarchical":[146],"microscale":[147],"nanoscale":[149],"textures.":[151],"Such":[152],"could":[154],"study":[158],"cell":[159],"neuronal":[161],"growth,":[162],"influence":[163],"liquid\u2013solid":[164],"wetting":[165],"behaviour,":[166],"functional":[169],"elements":[170],"microelectronic":[172],"micromechanical":[174],"devices.":[175]},"counts_by_year":[{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-17T09:40:24.721904","created_date":"2016-06-24T00:00:00"}