{"id":"https://openalex.org/W2064023913","doi":"https://doi.org/10.1016/0040-6090(80)90418-6","title":"Structure of aluminium oxide films deposited by d.c. reactive sputtering","display_name":"Structure of aluminium oxide films deposited by d.c. reactive sputtering","publication_year":1980,"publication_date":"1980-07-01","ids":{"openalex":"https://openalex.org/W2064023913","doi":"https://doi.org/10.1016/0040-6090(80)90418-6","mag":"2064023913"},"language":"en","primary_location":{"id":"doi:10.1016/0040-6090(80)90418-6","doi":"https://doi.org/10.1016/0040-6090(80)90418-6","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0040-6090(80)90418-6","pdf_url":null,"source":{"id":"https://openalex.org/S84339699","display_name":"Thin Solid Films","issn_l":"0040-6090","issn":["0040-6090","1879-2731"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Thin Solid Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5009168384","display_name":"B. Goranchev","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24768866","display_name":"Bulgarian Academy of Sciences","ror":"https://ror.org/01x8hew03","country_code":"BG","type":"government","lineage":["https://openalex.org/I24768866"]},{"id":"https://openalex.org/I4210117802","display_name":"Institute of Electronics","ror":"https://ror.org/0299eyn73","country_code":"BG","type":"nonprofit","lineage":["https://openalex.org/I24768866","https://openalex.org/I4210117802"]}],"countries":["BG"],"is_corresponding":false,"raw_author_name":"B. Goranchev","raw_affiliation_strings":["Institute of Electronics, Bulgarian Academy of Sciences, Sofia 1184, Bulgaria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Bulgarian Academy of Sciences, Sofia 1184, Bulgaria","institution_ids":["https://openalex.org/I24768866","https://openalex.org/I4210117802"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079206753","display_name":"V.I. Orlinov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24768866","display_name":"Bulgarian Academy of Sciences","ror":"https://ror.org/01x8hew03","country_code":"BG","type":"government","lineage":["https://openalex.org/I24768866"]},{"id":"https://openalex.org/I4210117802","display_name":"Institute of Electronics","ror":"https://ror.org/0299eyn73","country_code":"BG","type":"nonprofit","lineage":["https://openalex.org/I24768866","https://openalex.org/I4210117802"]}],"countries":["BG"],"is_corresponding":false,"raw_author_name":"V. Orlinov","raw_affiliation_strings":["Institute of Electronics, Bulgarian Academy of Sciences, Sofia 1184, Bulgaria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Bulgarian Academy of Sciences, Sofia 1184, Bulgaria","institution_ids":["https://openalex.org/I24768866","https://openalex.org/I4210117802"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059239160","display_name":"F. Przyborowski","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"F. Przyborowski","raw_affiliation_strings":["Sektion Physik/Elektronische Bauelemente, Technische Hochschule Karl-Marx-Stadt, Postschlie\u03b2fach 964, G.D.R"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sektion Physik/Elektronische Bauelemente, Technische Hochschule Karl-Marx-Stadt, Postschlie\u03b2fach 964, G.D.R","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108807543","display_name":"Chr. Wei\u00dfmantel","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Chr. Weissmantel","raw_affiliation_strings":["Sektion Physik/Elektronische Bauelemente, Technische Hochschule Karl-Marx-Stadt, Postschlie\u03b2fach 964, G.D.R"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sektion Physik/Elektronische Bauelemente, Technische Hochschule Karl-Marx-Stadt, Postschlie\u03b2fach 964, G.D.R","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3120,"currency":"USD","value_usd":3120},"apc_paid":null,"fwci":0.7663,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.73796424,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"70","issue":"1","first_page":"111","last_page":"116"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.6514000296592712,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.6514000296592712,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.14790000021457672,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.05130000039935112,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/aluminum-oxide-thin-films","display_name":"Al2O3 thin films","score":0.8690000176429749},{"id":"https://openalex.org/keywords/amorphous-to-polycrystalline-transition","display_name":"amorphous to polycrystalline transition","score":0.8379999995231628},{"id":"https://openalex.org/keywords/substrate-temperature","display_name":"substrate temperature","score":0.843999981880188},{"id":"https://openalex.org/keywords/film-structure","display_name":"film structure","score":0.6880000233650208},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.9179999828338623},{"id":"https://openalex.org/keywords/polycrystalline-alumina","display_name":"polycrystalline alumina","score":0.7089999914169312}],"concepts":[{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.7276731729507446},{"id":"https://openalex.org/C513153333","wikidata":"https://www.wikidata.org/wiki/Q663","display_name":"Aluminium","level":2,"score":0.6789544224739075},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.6789240837097168},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6323240995407104},{"id":"https://openalex.org/C2777047311","wikidata":"https://www.wikidata.org/wiki/Q177342","display_name":"Aluminium oxide","level":2,"score":0.6182579398155212},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6128304600715637},{"id":"https://openalex.org/C137637335","wikidata":"https://www.wikidata.org/wiki/Q899604","display_name":"Crystallite","level":2,"score":0.5857837200164795},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.560025691986084},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.5412243604660034},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5278468132019043},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4865685701370239},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.47634366154670715},{"id":"https://openalex.org/C39353612","wikidata":"https://www.wikidata.org/wiki/Q5283759","display_name":"Atmospheric temperature range","level":2,"score":0.43996211886405945},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.36783868074417114},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.357366681098938},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2748023271560669},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.21807914972305298},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.16134977340698242},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/0040-6090(80)90418-6","doi":"https://doi.org/10.1016/0040-6090(80)90418-6","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0040-6090(80)90418-6","pdf_url":null,"source":{"id":"https://openalex.org/S84339699","display_name":"Thin Solid Films","issn_l":"0040-6090","issn":["0040-6090","1879-2731"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Thin Solid Films","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1983683856","https://openalex.org/W2005132895","https://openalex.org/W2044667461","https://openalex.org/W2053570374","https://openalex.org/W2080222689","https://openalex.org/W2093935886"],"related_works":["https://openalex.org/W2301523288","https://openalex.org/W2066662566","https://openalex.org/W2244402960","https://openalex.org/W2046211444","https://openalex.org/W2085733290","https://openalex.org/W2364987224","https://openalex.org/W2993893588","https://openalex.org/W1993245048","https://openalex.org/W2015637928","https://openalex.org/W2083842027"],"abstract_inverted_index":null,"counts_by_year":[{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-09-23T05:00:35.095934","created_date":"2016-06-24T00:00:00"}