{"id":"https://openalex.org/W2063549331","doi":"https://doi.org/10.1016/0039-6028(79)90397-2","title":"Ion beam techniques for thin and thick film deposition","display_name":"Ion beam techniques for thin and thick film deposition","publication_year":1979,"publication_date":"1979-07-01","ids":{"openalex":"https://openalex.org/W2063549331","doi":"https://doi.org/10.1016/0039-6028(79)90397-2","mag":"2063549331"},"language":"en","primary_location":{"id":"doi:10.1016/0039-6028(79)90397-2","doi":"https://doi.org/10.1016/0039-6028(79)90397-2","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0039-6028(79)90397-2","pdf_url":null,"source":{"id":"https://openalex.org/S137865625","display_name":"Surface Science","issn_l":"0039-6028","issn":["0039-6028","1879-2758"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-100","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface Science","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108429497","display_name":"Ch. Wei\u00dfmantel","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Weissmantel","raw_affiliation_strings":["Sektion Physik/Elektronische Bauelemente, Technische Hochschule, Strosse der Nationen 62, 9010 Karl-Marx-Stadt, GDR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sektion Physik/Elektronische Bauelemente, Technische Hochschule, Strosse der Nationen 62, 9010 Karl-Marx-Stadt, GDR","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014929927","display_name":"H.-J. Erler","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H.J. Erler","raw_affiliation_strings":["Sektion Physik/Elektronische Bauelemente, Technische Hochschule, Strosse der Nationen 62, 9010 Karl-Marx-Stadt, GDR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sektion Physik/Elektronische Bauelemente, Technische Hochschule, Strosse der Nationen 62, 9010 Karl-Marx-Stadt, GDR","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113528494","display_name":"Guenter Reisse","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"G. Reisse","raw_affiliation_strings":["Sektion Physik/Elektronische Bauelemente, Technische Hochschule, Strosse der Nationen 62, 9010 Karl-Marx-Stadt, GDR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sektion Physik/Elektronische Bauelemente, Technische Hochschule, Strosse der Nationen 62, 9010 Karl-Marx-Stadt, GDR","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3340,"currency":"USD","value_usd":3340},"apc_paid":null,"fwci":0.8199,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.68267831,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"86","issue":null,"first_page":"207","last_page":"221"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9448000192642212,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9448000192642212,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.02280000038444996,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.008799999952316284,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ion-beam-deposition","display_name":"ion beam deposition","score":0.9430000185966492},{"id":"https://openalex.org/keywords/thin-film-deposition","display_name":"thin film deposition","score":0.8370000123977661},{"id":"https://openalex.org/keywords/thick-film-deposition","display_name":"thick film deposition","score":0.9300000071525574},{"id":"https://openalex.org/keywords/ion-beam-sputtering","display_name":"ion beam sputtering","score":0.8730000257492065},{"id":"https://openalex.org/keywords/plasma-deposition","display_name":"plasma deposition","score":0.9559999704360962},{"id":"https://openalex.org/keywords/ionized-species","display_name":"ionized species","score":0.6079999804496765},{"id":"https://openalex.org/keywords/multilayer-structures","display_name":"multilayer structures","score":0.8569999933242798}],"concepts":[{"id":"https://openalex.org/C118442862","wikidata":"https://www.wikidata.org/wiki/Q899143","display_name":"Ion plating","level":3,"score":0.8046914339065552},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.7711498141288757},{"id":"https://openalex.org/C93106096","wikidata":"https://www.wikidata.org/wiki/Q17125820","display_name":"Ion beam deposition","level":4,"score":0.7698217630386353},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.7063109278678894},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6377039551734924},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.6330264210700989},{"id":"https://openalex.org/C79176676","wikidata":"https://www.wikidata.org/wiki/Q6063409","display_name":"Ion beam mixing","level":5,"score":0.6119906306266785},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.609864354133606},{"id":"https://openalex.org/C2781463530","wikidata":"https://www.wikidata.org/wiki/Q904053","display_name":"Ion beam-assisted deposition","level":4,"score":0.5418717265129089},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.5237472057342529},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.5201459527015686},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.488180935382843},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.47254180908203125},{"id":"https://openalex.org/C200093464","wikidata":"https://www.wikidata.org/wiki/Q166583","display_name":"Condensation","level":2,"score":0.4314934313297272},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.41434264183044434},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.39894944429397583},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3450772762298584},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.27936673164367676},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.15104088187217712},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0981205403804779},{"id":"https://openalex.org/C107872376","wikidata":"https://www.wikidata.org/wiki/Q321355","display_name":"Environmental chemistry","level":1,"score":0.04825180768966675},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/0039-6028(79)90397-2","doi":"https://doi.org/10.1016/0039-6028(79)90397-2","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0039-6028(79)90397-2","pdf_url":null,"source":{"id":"https://openalex.org/S137865625","display_name":"Surface Science","issn_l":"0039-6028","issn":["0039-6028","1879-2758"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-100","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W1981705568","https://openalex.org/W1992645603","https://openalex.org/W1996096895","https://openalex.org/W1998882998","https://openalex.org/W2001618648","https://openalex.org/W2007733790","https://openalex.org/W2018353394","https://openalex.org/W2026637292","https://openalex.org/W2031844638","https://openalex.org/W2042593211","https://openalex.org/W2046947305","https://openalex.org/W2055606813","https://openalex.org/W2057205035","https://openalex.org/W2064397231","https://openalex.org/W2070200520","https://openalex.org/W2070690119","https://openalex.org/W2081488001","https://openalex.org/W2082704362","https://openalex.org/W2084267055","https://openalex.org/W2086470857","https://openalex.org/W2324133127","https://openalex.org/W3203645184","https://openalex.org/W4232697393"],"related_works":["https://openalex.org/W1566961201","https://openalex.org/W1981705568","https://openalex.org/W7062835497","https://openalex.org/W1030059253","https://openalex.org/W2605166141","https://openalex.org/W1991270610","https://openalex.org/W2068579204","https://openalex.org/W3166734341","https://openalex.org/W2912029057","https://openalex.org/W1986788607"],"abstract_inverted_index":null,"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}