{"id":"https://openalex.org/W2061237335","doi":"https://doi.org/10.1063/1.1363695","title":"Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering","display_name":"Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering","publication_year":2001,"publication_date":"2001-05-21","ids":{"openalex":"https://openalex.org/W2061237335","doi":"https://doi.org/10.1063/1.1363695","mag":"2061237335"},"language":"en","primary_location":{"id":"doi:10.1063/1.1363695","doi":"https://doi.org/10.1063/1.1363695","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.1363695","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063493678","display_name":"Mansour ElSabbagh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"M. A. Mansour ElSabbagh","raw_affiliation_strings":["Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056360703","display_name":"Mark D. Bowden","orcid":"https://orcid.org/0000-0003-4128-4823","observed_orcids":["https://orcid.org/0000-0003-4128-4823"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"M.D. Bowden","raw_affiliation_strings":["Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007014949","display_name":"Kenji Uchino","orcid":"https://orcid.org/0000-0003-1651-7912","observed_orcids":["https://orcid.org/0000-0003-1651-7912"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Uchino","raw_affiliation_strings":["Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5055428774","display_name":"Katsunori Muraoka","orcid":"https://orcid.org/0009-0008-2846-9149","observed_orcids":["https://orcid.org/0009-0008-2846-9149"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Muraoka","raw_affiliation_strings":["Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I135598925"],"apc_list":null,"apc_paid":null,"fwci":2.0025,"has_fulltext":false,"cited_by_count":26,"citation_normalized_percentile":{"value":0.85931133,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"78","issue":"21","first_page":"3187","last_page":"3189"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10346","display_name":"Magnetic confinement fusion research","score":0.0007999999797903001,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.000699999975040555,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electron-energy-distribution-function","display_name":"electron energy distribution","score":0.8730000257492065},{"id":"https://openalex.org/keywords/bi-maxwellian-distribution","display_name":"bi-Maxwellian distribution","score":0.9850000143051147},{"id":"https://openalex.org/keywords/maxwell-boltzmann-distribution","display_name":"Maxwell-Boltzmann distribution","score":0.9559999704360962},{"id":"https://openalex.org/keywords/argon-discharge","display_name":"argon discharge","score":0.8199999928474426},{"id":"https://openalex.org/keywords/low-pressure-plasma","display_name":"low-pressure plasma","score":0.8820000290870667},{"id":"https://openalex.org/keywords/electron-temperature","display_name":"electron temperature","score":0.7200000286102295},{"id":"https://openalex.org/keywords/electron-density","display_name":"electron density","score":0.972000002861023},{"id":"https://openalex.org/keywords/cold-electrons","display_name":"cold electrons","score":0.7570000290870667},{"id":"https://openalex.org/keywords/laser-thomson-scattering","display_name":"laser Thomson scattering","score":0.8859999775886536}],"concepts":[{"id":"https://openalex.org/C2779146573","wikidata":"https://www.wikidata.org/wiki/Q1477639","display_name":"Thomson scattering","level":3,"score":0.8285700082778931},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.7288495302200317},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.712799072265625},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.6681836843490601},{"id":"https://openalex.org/C191486275","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Scattering","level":2,"score":0.5578420162200928},{"id":"https://openalex.org/C43503373","wikidata":"https://www.wikidata.org/wiki/Q7201771","display_name":"Plasma diagnostics","level":3,"score":0.5565504431724548},{"id":"https://openalex.org/C547737533","wikidata":"https://www.wikidata.org/wiki/Q696","display_name":"Argon","level":2,"score":0.5399615168571472},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.5330530405044556},{"id":"https://openalex.org/C22175881","wikidata":"https://www.wikidata.org/wiki/Q7201785","display_name":"Electron temperature","level":3,"score":0.5072081089019775},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.47069740295410156},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.4584140479564667},{"id":"https://openalex.org/C125485243","wikidata":"https://www.wikidata.org/wiki/Q905186","display_name":"Electron density","level":3,"score":0.4517476260662079},{"id":"https://openalex.org/C186603090","wikidata":"https://www.wikidata.org/wiki/Q55505926","display_name":"Distribution function","level":2,"score":0.4481359124183655},{"id":"https://openalex.org/C68687820","wikidata":"https://www.wikidata.org/wiki/Q5034482","display_name":"Capacitively coupled plasma","level":4,"score":0.4125567376613617},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.34869927167892456},{"id":"https://openalex.org/C95974651","wikidata":"https://www.wikidata.org/wiki/Q2454436","display_name":"Inductively coupled plasma","level":3,"score":0.17831194400787354},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.17376843094825745},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.11648988723754883},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.1363695","doi":"https://doi.org/10.1063/1.1363695","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.1363695","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1993361798","https://openalex.org/W1999687322","https://openalex.org/W2011351253","https://openalex.org/W2016716598","https://openalex.org/W2018978718","https://openalex.org/W2021117071","https://openalex.org/W2025079943","https://openalex.org/W2038270970","https://openalex.org/W2038968163","https://openalex.org/W2054836295","https://openalex.org/W2063374909","https://openalex.org/W2136907555","https://openalex.org/W2166955644","https://openalex.org/W2324085323"],"related_works":["https://openalex.org/W2024730944","https://openalex.org/W2034293790","https://openalex.org/W2045383655","https://openalex.org/W2025360208","https://openalex.org/W2153176594","https://openalex.org/W2031707517","https://openalex.org/W1999687322","https://openalex.org/W2999274892","https://openalex.org/W1996854649","https://openalex.org/W1996516514"],"abstract_inverted_index":{"Electron":[0],"energy":[1],"distribution":[2,25],"functions":[3,26],"in":[4,50],"low-pressure":[5],"capacitively":[6],"coupled":[7],"radio-frequency":[8],"argon":[9],"discharges":[10],"were":[11,64],"measured":[12,65],"using":[13],"the":[14,24,59],"technique":[15],"of":[16,46,58,62,69],"laser":[17],"Thomson":[18],"scattering.":[19],"It":[20],"was":[21],"found":[22],"that":[23],"changed":[27],"from":[28],"a":[29,35],"bi-Maxwellian":[30],"at":[31,38],"lower":[32],"pressures":[33],"to":[34],"single":[36],"Maxwellian":[37],"higher":[39],"pressures.":[40],"These":[41],"measurements":[42,48],"provide":[43],"independent":[44],"confirmation":[45],"probe":[47],"made":[49],"similar":[51],"discharges.":[52],"The":[53],"electron":[54],"temperature":[55],"and":[56],"density":[57],"cold":[60],"group":[61],"electrons":[63],"with":[66],"an":[67],"accuracy":[68],"better":[70],"than":[71],"10%.":[72]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":3}],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}