{"id":"https://openalex.org/W2060600644","doi":"https://doi.org/10.1063/1.2425044","title":"Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas","display_name":"Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas","publication_year":2006,"publication_date":"2006-12-25","ids":{"openalex":"https://openalex.org/W2060600644","doi":"https://doi.org/10.1063/1.2425044","mag":"2060600644"},"language":"en","primary_location":{"id":"doi:10.1063/1.2425044","doi":"https://doi.org/10.1063/1.2425044","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.2425044","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015062886","display_name":"Timo Gans","orcid":"https://orcid.org/0000-0003-1362-8000","observed_orcids":["https://orcid.org/0000-0003-1362-8000"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"T. Gans","raw_affiliation_strings":["Ruhr-University Bochum Institute for Plasma and Atomic Physics, CPST, , 44780 Bochum, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr-University Bochum Institute for Plasma and Atomic Physics, CPST, , 44780 Bochum, Germany","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010518216","display_name":"Julian Schulze","orcid":"https://orcid.org/0000-0001-7929-5734","observed_orcids":["https://orcid.org/0000-0001-7929-5734"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J. Schulze","raw_affiliation_strings":["Ruhr-University Bochum Institute for Plasma and Atomic Physics, CPST, , 44780 Bochum, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr-University Bochum Institute for Plasma and Atomic Physics, CPST, , 44780 Bochum, Germany","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042220335","display_name":"Deborah O\u2019Connell","orcid":"https://orcid.org/0000-0002-1457-9004","observed_orcids":["https://orcid.org/0000-0002-1457-9004"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D. O\u2019Connell","raw_affiliation_strings":["Ruhr-University Bochum Institute for Plasma and Atomic Physics, CPST, , 44780 Bochum, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr-University Bochum Institute for Plasma and Atomic Physics, CPST, , 44780 Bochum, Germany","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005908187","display_name":"Uwe Czarnetzki","orcid":"https://orcid.org/0000-0002-5823-1501","observed_orcids":["https://orcid.org/0000-0002-5823-1501"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"U. Czarnetzki","raw_affiliation_strings":["Ruhr-University Bochum Institute for Plasma and Atomic Physics, CPST, , 44780 Bochum, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr-University Bochum Institute for Plasma and Atomic Physics, CPST, , 44780 Bochum, Germany","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071664120","display_name":"Ronan Faulkner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I42934936","display_name":"Dublin City University","ror":"https://ror.org/04a1a1e81","country_code":"IE","type":"education","lineage":["https://openalex.org/I42934936"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"R. Faulkner","raw_affiliation_strings":["Dublin City University National Centre for Plasma Science and Technology, , Dublin 9, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dublin City University National Centre for Plasma Science and Technology, , Dublin 9, Ireland","institution_ids":["https://openalex.org/I42934936"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064680232","display_name":"Albert Rogers Ellingboe","orcid":"https://orcid.org/0000-0002-3997-0392","observed_orcids":["https://orcid.org/0000-0002-3997-0392"]},"institutions":[{"id":"https://openalex.org/I42934936","display_name":"Dublin City University","ror":"https://ror.org/04a1a1e81","country_code":"IE","type":"education","lineage":["https://openalex.org/I42934936"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"A. R. Ellingboe","raw_affiliation_strings":["Dublin City University National Centre for Plasma Science and Technology, , Dublin 9, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dublin City University National Centre for Plasma Science and Technology, , Dublin 9, Ireland","institution_ids":["https://openalex.org/I42934936"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5021385616","display_name":"Miles M. Turner","orcid":"https://orcid.org/0000-0001-9713-6198","observed_orcids":["https://orcid.org/0000-0001-9713-6198"]},"institutions":[{"id":"https://openalex.org/I42934936","display_name":"Dublin City University","ror":"https://ror.org/04a1a1e81","country_code":"IE","type":"education","lineage":["https://openalex.org/I42934936"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"M. M. Turner","raw_affiliation_strings":["Dublin City University National Centre for Plasma Science and Technology, , Dublin 9, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dublin City University National Centre for Plasma Science and Technology, , Dublin 9, Ireland","institution_ids":["https://openalex.org/I42934936"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":8.8588,"has_fulltext":false,"cited_by_count":182,"citation_normalized_percentile":{"value":0.9799675,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":97,"max":99},"biblio":{"volume":"89","issue":"26","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.0010000000474974513,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10642","display_name":"Atmospheric-Pressure Plasma Applications","score":0.0010000000474974513,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dual-frequency-plasma","display_name":"dual-frequency plasma","score":0.8149999976158142},{"id":"https://openalex.org/keywords/frequency-coupling","display_name":"frequency coupling","score":0.7070000171661377},{"id":"https://openalex.org/keywords/plasma-etching","display_name":"plasma etching","score":0.8360000252723694},{"id":"https://openalex.org/keywords/optical-emission-spectroscopy","display_name":"optical emission spectroscopy","score":0.949999988079071},{"id":"https://openalex.org/keywords/ionization-dynamics","display_name":"ionization dynamics","score":0.7879999876022339},{"id":"https://openalex.org/keywords/plasma-density-control","display_name":"plasma density control","score":0.9359999895095825},{"id":"https://openalex.org/keywords/ion-energy","display_name":"ion energy","score":0.8960000276565552},{"id":"https://openalex.org/keywords/discharge-dynamics","display_name":"discharge dynamics","score":0.5550000071525574}],"concepts":[{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.6832255125045776},{"id":"https://openalex.org/C68687820","wikidata":"https://www.wikidata.org/wiki/Q5034482","display_name":"Capacitively coupled plasma","level":4,"score":0.6581542491912842},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6392398476600647},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.5776275396347046},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.5604490637779236},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.5146709084510803},{"id":"https://openalex.org/C198291218","wikidata":"https://www.wikidata.org/wiki/Q190382","display_name":"Ionization","level":3,"score":0.499361515045166},{"id":"https://openalex.org/C60034648","wikidata":"https://www.wikidata.org/wiki/Q1754650","display_name":"Plasma oscillation","level":3,"score":0.4881380498409271},{"id":"https://openalex.org/C95974651","wikidata":"https://www.wikidata.org/wiki/Q2454436","display_name":"Inductively coupled plasma","level":3,"score":0.4263850450515747},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3926345109939575},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3212195634841919},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2977725565433502},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.27630138397216797},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1063/1.2425044","doi":"https://doi.org/10.1063/1.2425044","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.2425044","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},{"id":"pmh:oai:pure.qub.ac.uk/portal:publications/57ed7caf-6ade-4a53-be6c-f89a145ad431","doi":null,"is_oa":false,"landing_page_url":"https://pure.qub.ac.uk/en/publications/57ed7caf-6ade-4a53-be6c-f89a145ad431","pdf_url":null,"source":{"id":"https://openalex.org/S4306402319","display_name":"Research Portal (Queen's University Belfast)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I126231945","host_organization_name":"Queen's University Belfast","host_organization_lineage":["https://openalex.org/I126231945"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Gans, T, Schulze, J, O'Connell, D, Czarnetzki, U, Faulkner, R, Ellingboe, A R & Turner, M M 2006, 'Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas', Applied Physics Letters, vol. 89, no. 26, 261502, pp. 261502-1-261502-3. https://doi.org/10.1063/1.2425044","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1491321482","https://openalex.org/W1964606560","https://openalex.org/W1984876632","https://openalex.org/W2005448809","https://openalex.org/W2006634883","https://openalex.org/W2016551723","https://openalex.org/W2036964892","https://openalex.org/W2044798880","https://openalex.org/W2047966468","https://openalex.org/W2058296462","https://openalex.org/W2065455126","https://openalex.org/W2080461130","https://openalex.org/W2094167831","https://openalex.org/W2132564529"],"related_works":["https://openalex.org/W2167562880","https://openalex.org/W2030311366","https://openalex.org/W2091099831","https://openalex.org/W2147092467","https://openalex.org/W1661143077","https://openalex.org/W1990694794","https://openalex.org/W2087013422","https://openalex.org/W2135841236","https://openalex.org/W1674323303","https://openalex.org/W4391733955"],"abstract_inverted_index":{"An":[0],"industrial,":[1],"confined,":[2],"dual":[3],"frequency,":[4],"capacitively":[5],"coupled,":[6],"radio-frequency":[7],"plasma":[8,65,83],"etch":[9],"reactor":[10],"(Exelan\u00ae,":[11],"Lam":[12],"Research)":[13],"has":[14],"been":[15],"modified":[16],"for":[17],"spatially":[18],"resolved":[19,25],"optical":[20,26],"measurements.":[21],"Space":[22],"and":[23,85],"phase":[24],"emission":[27,48],"spectroscopy":[28],"yields":[29],"insight":[30],"into":[31],"the":[32,35,41,47,51,68,76],"dynamics":[33],"of":[34,40,64,82],"discharge.":[36],"A":[37],"strong":[38],"coupling":[39],"two":[42],"frequencies":[43],"is":[44,57,88],"observed":[45],"in":[46],"profiles.":[49],"Consequently,":[50],"ionization":[52],"dynamics,":[53],"probed":[54],"through":[55],"excitation,":[56],"determined":[58],"by":[59,67,75],"both":[60],"frequencies.":[61],"The":[62],"control":[63,81],"density":[66,84],"high":[69],"frequency":[70],"is,":[71],"therefore,":[72],"also":[73],"influenced":[74],"low":[77],"frequency.":[78],"Hence,":[79],"separate":[80],"ion":[86],"energy":[87],"rather":[89],"complex.":[90]},"counts_by_year":[{"year":2026,"cited_by_count":5},{"year":2025,"cited_by_count":8},{"year":2024,"cited_by_count":9},{"year":2023,"cited_by_count":10},{"year":2022,"cited_by_count":12},{"year":2021,"cited_by_count":8},{"year":2020,"cited_by_count":5},{"year":2019,"cited_by_count":7},{"year":2018,"cited_by_count":7},{"year":2017,"cited_by_count":8},{"year":2016,"cited_by_count":13},{"year":2015,"cited_by_count":11},{"year":2014,"cited_by_count":8},{"year":2013,"cited_by_count":11},{"year":2012,"cited_by_count":9}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}