{"id":"https://openalex.org/W2059931265","doi":"https://doi.org/10.1117/12.701384","title":"In-plane photonic transduction for microcantilever sensor arrays","display_name":"In-plane photonic transduction for microcantilever sensor arrays","publication_year":2007,"publication_date":"2007-02-08","ids":{"openalex":"https://openalex.org/W2059931265","doi":"https://doi.org/10.1117/12.701384","mag":"2059931265"},"language":"da","primary_location":{"id":"doi:10.1117/12.701384","doi":"https://doi.org/10.1117/12.701384","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.701384","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5014463843","display_name":"Gregory P. Nordin","orcid":"https://orcid.org/0000-0001-7241-5764","observed_orcids":["https://orcid.org/0000-0001-7241-5764"]},"institutions":[{"id":"https://openalex.org/I100005738","display_name":"Brigham Young University","ror":"https://ror.org/047rhhm47","country_code":"US","type":"education","lineage":["https://openalex.org/I100005738"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gregory P. Nordin","raw_affiliation_strings":["Brigham Young Univ. United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Brigham Young Univ. United States","institution_ids":["https://openalex.org/I100005738"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057046032","display_name":"Jong Wok Noh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100005738","display_name":"Brigham Young University","ror":"https://ror.org/047rhhm47","country_code":"US","type":"education","lineage":["https://openalex.org/I100005738"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jong Wok Noh","raw_affiliation_strings":["Brigham Young Univ. United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Brigham Young Univ. United States","institution_ids":["https://openalex.org/I100005738"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100454609","display_name":"Seunghyun Kim","orcid":"https://orcid.org/0000-0001-5950-7592","observed_orcids":["https://orcid.org/0000-0001-5950-7592"]},"institutions":[{"id":"https://openalex.org/I100005738","display_name":"Brigham Young University","ror":"https://ror.org/047rhhm47","country_code":"US","type":"education","lineage":["https://openalex.org/I100005738"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Seunghyun Kim","raw_affiliation_strings":["Brigham Young Univ. United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Brigham Young Univ. United States","institution_ids":["https://openalex.org/I100005738"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I100005738"],"apc_list":null,"apc_paid":null,"fwci":2.0076,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.84400408,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"6447","issue":null,"first_page":"64470J","last_page":"64470J"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.6991999745368958,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.6991999745368958,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.2736999988555908,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.008100000210106373,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microcantilever-sensors","display_name":"microcantilever sensors","score":0.9160000085830688},{"id":"https://openalex.org/keywords/microcantilever-arrays","display_name":"microcantilever arrays","score":0.8130000233650208},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"silicon-on-insulator","score":0.8240000009536743},{"id":"https://openalex.org/keywords/ridge-waveguide","display_name":"ridge waveguide","score":0.8069999814033508},{"id":"https://openalex.org/keywords/differential-detection","display_name":"differential detection","score":0.8220000267028809},{"id":"https://openalex.org/keywords/microcantilever-deflection","display_name":"microcantilever deflection","score":0.7129999995231628},{"id":"https://openalex.org/keywords/chemical-sensing","display_name":"chemical sensing","score":0.4410000145435333},{"id":"https://openalex.org/keywords/biosensing","display_name":"biosensing","score":0.8730000257492065},{"id":"https://openalex.org/keywords/optical-readout","display_name":"optical readout","score":0.5680000185966492}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7476235032081604},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7194910049438477},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.5514267683029175},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5269806385040283},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.5025439262390137},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.4933561384677887},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4890175759792328},{"id":"https://openalex.org/C147080431","wikidata":"https://www.wikidata.org/wiki/Q1074953","display_name":"Microscopy","level":2,"score":0.4208833873271942},{"id":"https://openalex.org/C67649825","wikidata":"https://www.wikidata.org/wiki/Q196538","display_name":"Microscope","level":2,"score":0.4166554808616638},{"id":"https://openalex.org/C41858301","wikidata":"https://www.wikidata.org/wiki/Q2327870","display_name":"Nanosensor","level":2,"score":0.415569931268692},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.35221290588378906},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3504455089569092},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11513498425483704},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.701384","doi":"https://doi.org/10.1117/12.701384","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.701384","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2029905126","https://openalex.org/W7097341299","https://openalex.org/W124705847","https://openalex.org/W1657839264","https://openalex.org/W2073603007","https://openalex.org/W2064335689","https://openalex.org/W2044310897","https://openalex.org/W2058694948","https://openalex.org/W1966081555","https://openalex.org/W2083645286"],"abstract_inverted_index":{"Microcantilevers":[0],"show":[1],"significant":[2],"promise":[3],"in":[4,13,66,90,142,192],"sensing":[5],"minute":[6],"quantities":[7],"of":[8,19,29,49,139,157,178,195],"chemical":[9,62],"and":[10,15,63,128,183],"biological":[11,64],"analytes":[12],"vapor":[14],"liquid":[16],"media.":[17],"Much":[18],"the":[20,77,144,155,158,193],"reported":[21],"work":[22],"on":[23,51,135],"microcantilever":[24,80,106,140,145,159,179],"sensors":[25,65],"has":[26],"made":[27],"use":[28],"single":[30,53,149],"functionalized":[31],"microcantilevers,":[32],"usually":[33],"derived":[34],"from":[35,154],"commercially":[36],"available":[37],"atomic":[38,91],"force":[39,92],"microscope":[40],"(AFM)":[41],"cantilevers.":[42],"However,":[43],"arrays":[44,120],"with":[45,171],"hundreds":[46],"to":[47,57,98,116,118,166],"thousands":[48],"microcantilevers":[50,69,112],"a":[52,104,123,148,163],"chip":[54],"are":[55,94],"required":[56],"create":[58],"sophisticated,":[59],"broad":[60],"spectrum":[61],"which":[67,143],"individual":[68],"have":[70],"different":[71],"bio-":[72],"or":[73],"chemoselective":[74],"coatings.":[75],"Unfortunately,":[76],"most":[78],"sensitive":[79],"readout":[81],"mechanisms":[82],"(such":[83],"as":[84,88],"laser":[85],"beam":[86],"reflection":[87],"used":[89],"microscopy)":[93],"not":[95],"readily":[96],"scalable":[97],"large":[99,119],"arrays.":[100],"We":[101],"therefore":[102],"introduce":[103],"new":[105],"transduction":[107,138],"mechanism":[108,132],"for":[109],"silicon-on-insulator":[110],"(SOI)":[111],"that":[113,174,189],"is":[114,133,160],"designed":[115],"scale":[117],"while":[121],"maintaining":[122],"very":[124],"compact":[125],"form":[126],"factor":[127],"high":[129],"sensitivity.":[130],"This":[131],"based":[134],"in-plane":[136],"photonic":[137],"deflection":[141,190],"itself":[146],"forms":[147],"mode":[150],"rib":[151],"waveguide.":[152],"Light":[153],"end":[156],"directed":[161],"across":[162],"small":[164],"gap":[165],"an":[167],"asymmetric":[168],"receiving":[169],"waveguide":[170],"two":[172],"outputs":[173],"enables":[175],"differential":[176],"detection":[177],"deflection.":[180],"Initial":[181],"noise":[182],"optical":[184],"power":[185],"budget":[186],"calculations":[187],"indicate":[188],"sensitivities":[191],"10's":[194],"picometer":[196],"range":[197],"should":[198],"be":[199],"achievable.":[200]},"counts_by_year":[],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}