{"id":"https://openalex.org/W2059797407","doi":"https://doi.org/10.3390/s7030319","title":"Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors","display_name":"Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors","publication_year":2007,"publication_date":"2007-03-14","ids":{"openalex":"https://openalex.org/W2059797407","doi":"https://doi.org/10.3390/s7030319","mag":"2059797407"},"language":"en","primary_location":{"id":"doi:10.3390/s7030319","doi":"https://doi.org/10.3390/s7030319","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s7030319","pdf_url":"https://www.mdpi.com/1424-8220/7/3/319/pdf?version=1403303039","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-scientific","cwts-core","doaj","jufo-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/7/3/319/pdf?version=1403303039","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5002357592","display_name":"Khaled Sadek","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I154425047","display_name":"University of Alberta","ror":"https://ror.org/0160cpw27","country_code":"CA","type":"education","lineage":["https://openalex.org/I154425047"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Khaled Sadek","raw_affiliation_strings":["4-9, Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G8"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"4-9, Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G8","institution_ids":["https://openalex.org/I154425047"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049879303","display_name":"Walied A. Moussa","orcid":"https://orcid.org/0000-0001-7385-0469","observed_orcids":["https://orcid.org/0000-0001-7385-0469","https://orcid.org/0000-0001-5948-5602"]},"institutions":[{"id":"https://openalex.org/I154425047","display_name":"University of Alberta","ror":"https://ror.org/0160cpw27","country_code":"CA","type":"education","lineage":["https://openalex.org/I154425047"]}],"countries":["CA"],"is_corresponding":true,"raw_author_name":"Walied Moussa","raw_affiliation_strings":["4-9, Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G8"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"4-9, Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G8","institution_ids":["https://openalex.org/I154425047"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5049879303"],"corresponding_institution_ids":["https://openalex.org/I154425047"],"apc_list":{"value":2600,"currency":"CHF","value_usd":3137},"apc_paid":{"value":2600,"currency":"CHF","value_usd":3137},"fwci":0.9165,"has_fulltext":true,"cited_by_count":14,"citation_normalized_percentile":{"value":0.7725256,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"7","issue":"3","first_page":"319","last_page":"340"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.006800000090152025,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-gas-sensor","display_name":"MEMS gas sensor","score":0.9919999837875366},{"id":"https://openalex.org/keywords/thin-film-deposition-conditions","display_name":"thin film deposition conditions","score":0.7519999742507935},{"id":"https://openalex.org/keywords/sensor-reliability","display_name":"sensor reliability","score":0.8989999890327454},{"id":"https://openalex.org/keywords/multiphysics-simulation","display_name":"multiphysics simulation","score":0.7170000076293945},{"id":"https://openalex.org/keywords/electrothermal-coupling","display_name":"electro-thermal coupling","score":0.9039999842643738},{"id":"https://openalex.org/keywords/thermal-structural-coupling","display_name":"thermal-structural coupling","score":0.9919999837875366},{"id":"https://openalex.org/keywords/substructuring","display_name":"substructuring","score":0.8679999709129333},{"id":"https://openalex.org/keywords/computational-cost-reduction","display_name":"computational complexity reduction","score":0.6940000057220459},{"id":"https://openalex.org/keywords/parametric-study","display_name":"parametric study","score":0.7099999785423279},{"id":"https://openalex.org/keywords/design-rules","display_name":"design rules","score":0.7580000162124634}],"concepts":[{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.9711824655532837},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8611384034156799},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.7590843439102173},{"id":"https://openalex.org/C2779426163","wikidata":"https://www.wikidata.org/wiki/Q17123760","display_name":"Microheater","level":4,"score":0.6836870312690735},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.5995160341262817},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.5894923210144043},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.5442197918891907},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.5278558731079102},{"id":"https://openalex.org/C117251300","wikidata":"https://www.wikidata.org/wiki/Q1849855","display_name":"Parametric statistics","level":2,"score":0.5127099752426147},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.4805186688899994},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4587033987045288},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4471908211708069},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.4283653497695923},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4140092134475708},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4135456085205078},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3484874963760376},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.30987125635147095},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.19372230768203735},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.1535428762435913},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.09103026986122131},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08934229612350464},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s7030319","doi":"https://doi.org/10.3390/s7030319","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s7030319","pdf_url":"https://www.mdpi.com/1424-8220/7/3/319/pdf?version=1403303039","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-scientific","cwts-core","doaj","jufo-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmh:oai:europepmc.org:2746992","doi":null,"is_oa":true,"landing_page_url":"http://europepmc.org/articles/PMC3756723","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:3756723","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3756723","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.120.3816","doi":null,"is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.120.3816","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.mdpi.org/sensors/papers/s7030319.pdf","raw_type":"text"},{"id":"pmh:oai:doaj.org/article:2fd077705e6e4d5f80dc3397438ee13f","doi":null,"is_oa":true,"landing_page_url":"https://doaj.org/article/2fd077705e6e4d5f80dc3397438ee13f","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 7, Iss 3, Pp 319-340 (2007)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/s7030319","doi":"https://doi.org/10.3390/s7030319","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s7030319","pdf_url":"https://www.mdpi.com/1424-8220/7/3/319/pdf?version=1403303039","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-scientific","cwts-core","doaj","jufo-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320334593","display_name":"Natural Sciences and Engineering Research Council of Canada","ror":"https://ror.org/01h531d29"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2059797407.pdf","grobid_xml":"https://content.openalex.org/works/W2059797407.grobid-xml"},"referenced_works_count":40,"referenced_works":["https://openalex.org/W586922167","https://openalex.org/W1511808748","https://openalex.org/W1563868197","https://openalex.org/W1982677453","https://openalex.org/W1988168576","https://openalex.org/W1989773904","https://openalex.org/W1993493122","https://openalex.org/W2002248747","https://openalex.org/W2002845214","https://openalex.org/W2003253584","https://openalex.org/W2005630995","https://openalex.org/W2012688126","https://openalex.org/W2017155940","https://openalex.org/W2023005517","https://openalex.org/W2027984618","https://openalex.org/W2031805983","https://openalex.org/W2046171951","https://openalex.org/W2050787901","https://openalex.org/W2058230957","https://openalex.org/W2060295799","https://openalex.org/W2061976368","https://openalex.org/W2091471897","https://openalex.org/W2095738314","https://openalex.org/W2100206678","https://openalex.org/W2103344824","https://openalex.org/W2111215451","https://openalex.org/W2114013994","https://openalex.org/W2125950824","https://openalex.org/W2126326964","https://openalex.org/W2128283957","https://openalex.org/W2130886040","https://openalex.org/W2136416174","https://openalex.org/W2142253039","https://openalex.org/W2150485908","https://openalex.org/W2151103381","https://openalex.org/W2152873042","https://openalex.org/W2154183381","https://openalex.org/W2154990246","https://openalex.org/W2221824833","https://openalex.org/W2888782157"],"related_works":["https://openalex.org/W2160400252","https://openalex.org/W2118016988","https://openalex.org/W2005630995","https://openalex.org/W2104114788","https://openalex.org/W2348364941","https://openalex.org/W2101994713","https://openalex.org/W2021069487","https://openalex.org/W4410614266","https://openalex.org/W4404953278","https://openalex.org/W1986509521"],"abstract_inverted_index":{"In":[0],"this":[1,58],"paper,":[2],"the":[3,52,82,90,94,104,113,118,125,129,140,166,178],"reliability":[4],"of":[5,81,99,112,139,150,172,180],"a":[6,30,38,78,148],"micro-electro-mechanical":[7],"system":[8],"(MEMS)-based":[9],"gas":[10,84,141,174],"sensor":[11,85],"has":[12],"been":[13],"investigated":[14],"using":[15,153],"Three":[16],"Dimensional":[17],"(3D)":[18],"coupled":[19,26,60],"multiphysics":[20,61,71],"Finite":[21],"Element":[22],"(FE)":[23],"analysis.":[24],"The":[25,69],"field":[27],"analysis":[28,63],"involved":[29,55],"two-way":[31],"sequential":[32,40],"electro-":[33],"thermal":[34,95],"fields":[35,42],"coupling":[36],"and":[37,96,155,168],"one-way":[39],"thermal-structural":[41],"coupling.":[43],"An":[44],"automated":[45],"substructuring":[46],"code":[47],"was":[48,73],"developed":[49],"to":[50,66,76,89,128,146,176],"reduce":[51],"computational":[53],"cost":[54],"in":[56,87,93,124,163],"simulating":[57],"complicated":[59],"FE":[62],"by":[64],"up":[65],"76":[67],"percent.":[68],"substructured":[70],"model":[72],"then":[74],"used":[75,145],"conduct":[77],"parametric":[79],"study":[80],"MEMS-based":[83],"performance":[86],"response":[88],"variations":[91],"expected":[92],"mechanical":[97],"characteristics":[98],"thin":[100],"films":[101],"layers":[102],"composing":[103],"sensing":[105],"MEMS":[106],"device":[107],"generated":[108],"at":[109,165],"various":[110],"stages":[111,171],"microfabrication":[114,179],"process.":[115],"Whenever":[116],"possible,":[117],"appropriate":[119],"deposition":[120],"variables":[121],"were":[122],"correlated":[123],"current":[126],"work":[127],"design":[130,151,167],"parameters,":[131],"with":[132,183],"good":[133],"accuracy,":[134],"for":[135],"optimum":[136],"operation":[137],"conditions":[138],"sensor.":[142],"This":[143],"is":[144],"establish":[147],"set":[149],"rules,":[152],"linear":[154],"nonlinear":[156],"empirical":[157],"relations,":[158],"which":[159],"can":[160],"be":[161],"utilized":[162],"real-time":[164],"development":[169],"decision-making":[170],"similar":[173],"sensors":[175,182],"enable":[177],"these":[181],"reliable":[184],"operation.":[185]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2022,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-10-27T15:51:10.671819","created_date":"2016-06-24T00:00:00"}