{"id":"https://openalex.org/W2058711151","doi":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","title":"Rapid Planarization Method by Ultraviolet Light Irradiation for Gallium Nitride Using Platinum Catalyst","display_name":"Rapid Planarization Method by Ultraviolet Light Irradiation for Gallium Nitride Using Platinum Catalyst","publication_year":2012,"publication_date":"2012-11-01","ids":{"openalex":"https://openalex.org/W2058711151","doi":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","mag":"2058711151"},"language":"en","primary_location":{"id":"doi:10.4028/www.scientific.net/kem.523-524.46","doi":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5026263072","display_name":"Hiroya Asano","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroya Asano","raw_affiliation_strings":["Osaka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Osaka University","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079189477","display_name":"Shun Sadakuni","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shun Sadakuni","raw_affiliation_strings":["Osaka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Osaka University","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101019037","display_name":"Keita Yagi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I74894318","display_name":"Ebara (Japan)","ror":"https://ror.org/02yemx219","country_code":"JP","type":"company","lineage":["https://openalex.org/I74894318"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Keita Yagi","raw_affiliation_strings":["Ebara Research Corporation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ebara Research Corporation","institution_ids":["https://openalex.org/I74894318"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038392913","display_name":"Yasuhisa Sano","orcid":"https://orcid.org/0000-0002-1767-922X","observed_orcids":["https://orcid.org/0000-0002-1767-922X"]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yasuhisa Sano","raw_affiliation_strings":["Osaka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Osaka University","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089011806","display_name":"Satoshi Matsuyama","orcid":"https://orcid.org/0000-0001-9567-9690","observed_orcids":["https://orcid.org/0000-0001-9567-9690"]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Satoshi Matsuyama","raw_affiliation_strings":["Osaka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Osaka University","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003171350","display_name":"Takeshi Okamoto","orcid":"https://orcid.org/0000-0001-9719-0282","observed_orcids":["https://orcid.org/0000-0001-9719-0282","https://orcid.org/0009-0003-0285-507X"]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takeshi Okamoto","raw_affiliation_strings":["Osaka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Osaka University","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050567633","display_name":"Kazuma Tachibana","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuma Tachibana","raw_affiliation_strings":["Osaka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Osaka University","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5080012966","display_name":"Kazuto Yamauchi","orcid":"https://orcid.org/0000-0001-7831-9423","observed_orcids":["https://orcid.org/0000-0001-7831-9423"]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuto Yamauchi","raw_affiliation_strings":["Osaka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Osaka University","institution_ids":["https://openalex.org/I98285908"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2175,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.5491927,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"523-524","issue":null,"first_page":"46","last_page":"49"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.9735999703407288,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.9735999703407288,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.02070000022649765,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.0017999999690800905,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gallium-nitride","display_name":"gallium nitride","score":0.9909999966621399},{"id":"https://openalex.org/keywords/surface-planarization","display_name":"surface planarization","score":0.8830000162124634},{"id":"https://openalex.org/keywords/platinum-catalysts","display_name":"platinum catalysts","score":0.7789999842643738},{"id":"https://openalex.org/keywords/uv-irradiation","display_name":"UV irradiation","score":0.9200000166893005},{"id":"https://openalex.org/keywords/photoelectrochemical-etching","display_name":"photoelectrochemical etching","score":0.7910000085830688},{"id":"https://openalex.org/keywords/hydrolysis","display_name":"hydrolysis","score":0.6230000257492065},{"id":"https://openalex.org/keywords/etch-pits","display_name":"etch pits","score":0.7680000066757202},{"id":"https://openalex.org/keywords/selective-etching","display_name":"selective etching","score":0.4309999942779541}],"concepts":[{"id":"https://openalex.org/C180088628","wikidata":"https://www.wikidata.org/wiki/Q1069404","display_name":"Chemical-mechanical planarization","level":3,"score":0.9135879874229431},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7677111029624939},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.7096298933029175},{"id":"https://openalex.org/C518104683","wikidata":"https://www.wikidata.org/wiki/Q880","display_name":"Platinum","level":3,"score":0.6315850019454956},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.611545979976654},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5813460350036621},{"id":"https://openalex.org/C2776798109","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Ultraviolet","level":2,"score":0.544457733631134},{"id":"https://openalex.org/C2778871202","wikidata":"https://www.wikidata.org/wiki/Q411713","display_name":"Gallium nitride","level":3,"score":0.5012519359588623},{"id":"https://openalex.org/C550372918","wikidata":"https://www.wikidata.org/wiki/Q861","display_name":"Gallium","level":2,"score":0.49787044525146484},{"id":"https://openalex.org/C2987116853","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Ultraviolet light","level":2,"score":0.46632295846939087},{"id":"https://openalex.org/C162847780","wikidata":"https://www.wikidata.org/wiki/Q1902073","display_name":"Photodegradation","level":4,"score":0.46256858110427856},{"id":"https://openalex.org/C65165184","wikidata":"https://www.wikidata.org/wiki/Q218831","display_name":"Photocatalysis","level":3,"score":0.4308113753795624},{"id":"https://openalex.org/C75473681","wikidata":"https://www.wikidata.org/wiki/Q188651","display_name":"Photochemistry","level":1,"score":0.4149203896522522},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3420659303665161},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.33004218339920044},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.26482415199279785},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.1977057158946991},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1803741157054901},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.11813369393348694},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.06445685029029846},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.4028/www.scientific.net/kem.523-524.46","doi":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.4028/www.scientific.net/kem.523-524.46","doi":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.523-524.46","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1975916624","https://openalex.org/W1980084682","https://openalex.org/W1991576655","https://openalex.org/W1997243304","https://openalex.org/W2001200374","https://openalex.org/W2021568603","https://openalex.org/W2054227182","https://openalex.org/W2066389194","https://openalex.org/W2071493821","https://openalex.org/W2088533199"],"related_works":["https://openalex.org/W2021105385","https://openalex.org/W2088533199","https://openalex.org/W2072536515","https://openalex.org/W2124853924","https://openalex.org/W2056500793","https://openalex.org/W2093694962","https://openalex.org/W2946798059","https://openalex.org/W2630968095","https://openalex.org/W7026901803","https://openalex.org/W1994516284"],"abstract_inverted_index":{"We":[0,102],"have":[1],"developed":[2],"a":[3,14,27,34,46,51,107],"chemical":[4],"process":[5,23],"for":[6],"atomic":[7],"planarization":[8,105],"of":[9,50,60,110],"gallium":[10],"nitride":[11],"(GaN)":[12],"using":[13],"platinum":[15,32],"catalyst":[16],"and":[17],"ultraviolet":[18],"(UV)":[19],"light":[20],"irradiation.":[21],"The":[22],"is":[24,55,73],"mediated":[25],"by":[26,31,91,114],"hydrolysis":[28],"reaction":[29,39],"catalyzed":[30],"as":[33],"solid":[35],"catalyst.":[36],"Because":[37],"the":[38,43,58,65,70,89,98],"occurs":[40],"selectively":[41],"from":[42],"step":[44,67,99],"edges,":[45],"flat":[47],"surface":[48,104],"composed":[49],"straight":[52],"step-and-terrace":[53],"structure":[54],"obtained.":[56],"In":[57,79],"absence":[59],"UV":[61,82,117],"light,":[62,83],"owing":[63],"to":[64],"low":[66],"edge":[68,100],"density,":[69],"removal":[71,108],"rate":[72,109],"quite":[74],"slow,":[75],"approximately":[76],"1":[77],"nm/h.":[78],"contrast,":[80],"under":[81],"etch":[84],"pits":[85],"are":[86],"formed":[87],"on":[88],"terraces":[90],"photo-electrochemical":[92],"etching":[93],"causing":[94],"an":[95],"increase":[96],"in":[97],"density.":[101],"achieved":[103],"with":[106,116],"9.6":[111],"nm/h":[112],"assisted":[113],"irradiation":[115],"light.":[118]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-10-22T18:32:59.640997","created_date":"2016-06-24T00:00:00"}