{"id":"https://openalex.org/W2058229683","doi":"https://doi.org/10.1063/1.112516","title":"Pulsed laser deposition of high-quality NbN thin films","display_name":"Pulsed laser deposition of high-quality NbN thin films","publication_year":1994,"publication_date":"1994-11-28","ids":{"openalex":"https://openalex.org/W2058229683","doi":"https://doi.org/10.1063/1.112516","mag":"2058229683"},"language":"en","primary_location":{"id":"doi:10.1063/1.112516","doi":"https://doi.org/10.1063/1.112516","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.112516","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109858104","display_name":"Randolph E. Treece","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1288214837","display_name":"United States Naval Research Laboratory","ror":"https://ror.org/04d23a975","country_code":"US","type":"facility","lineage":["https://openalex.org/I1288214837","https://openalex.org/I1330347796","https://openalex.org/I175003984","https://openalex.org/I3130687028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Randolph E. Treece","raw_affiliation_strings":["Naval Research Laboratory, Washington, DC 20375-5345"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Naval Research Laboratory, Washington, DC 20375-5345","institution_ids":["https://openalex.org/I1288214837"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111876798","display_name":"James S. Horwitz","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1288214837","display_name":"United States Naval Research Laboratory","ror":"https://ror.org/04d23a975","country_code":"US","type":"facility","lineage":["https://openalex.org/I1288214837","https://openalex.org/I1330347796","https://openalex.org/I175003984","https://openalex.org/I3130687028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"James S. Horwitz","raw_affiliation_strings":["Naval Research Laboratory, Washington, DC 20375-5345"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Naval Research Laboratory, Washington, DC 20375-5345","institution_ids":["https://openalex.org/I1288214837"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068603227","display_name":"J. H. Claassen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1288214837","display_name":"United States Naval Research Laboratory","ror":"https://ror.org/04d23a975","country_code":"US","type":"facility","lineage":["https://openalex.org/I1288214837","https://openalex.org/I1330347796","https://openalex.org/I175003984","https://openalex.org/I3130687028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"John H. Claassen","raw_affiliation_strings":["Naval Research Laboratory, Washington, DC 20375-5345"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Naval Research Laboratory, Washington, DC 20375-5345","institution_ids":["https://openalex.org/I1288214837"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5060793659","display_name":"Douglas B. Chrisey","orcid":"https://orcid.org/0000-0001-5969-4770","observed_orcids":["https://orcid.org/0000-0001-5969-4770"]},"institutions":[{"id":"https://openalex.org/I1288214837","display_name":"United States Naval Research Laboratory","ror":"https://ror.org/04d23a975","country_code":"US","type":"facility","lineage":["https://openalex.org/I1288214837","https://openalex.org/I1330347796","https://openalex.org/I175003984","https://openalex.org/I3130687028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Douglas B. Chrisey","raw_affiliation_strings":["Naval Research Laboratory, Washington, DC 20375-5345"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Naval Research Laboratory, Washington, DC 20375-5345","institution_ids":["https://openalex.org/I1288214837"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I1288214837"],"apc_list":null,"apc_paid":null,"fwci":7.6695,"has_fulltext":false,"cited_by_count":66,"citation_normalized_percentile":{"value":0.97933748,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"65","issue":"22","first_page":"2860","last_page":"2862"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11808","display_name":"Superconducting Materials and Applications","score":0.5702999830245972,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11808","display_name":"Superconducting Materials and Applications","score":0.5702999830245972,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11803","display_name":"Superconducting and THz Device Technology","score":0.3743000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.015200000256299973,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nbn-thin-films","display_name":"NbN thin films","score":0.9110000133514404},{"id":"https://openalex.org/keywords/pulsed-laser-deposition","display_name":"pulsed laser deposition","score":0.9660000205039978},{"id":"https://openalex.org/keywords/superconducting-thin-films","display_name":"superconducting thin films","score":0.8410000205039978},{"id":"https://openalex.org/keywords/substrate-temperature","display_name":"substrate temperature","score":0.7039999961853027},{"id":"https://openalex.org/keywords/crystal-orientation","display_name":"crystal orientation","score":0.968999981880188},{"id":"https://openalex.org/keywords/textured-films","display_name":"textured films","score":0.7170000076293945},{"id":"https://openalex.org/keywords/mgo-substrate","display_name":"MgO substrate","score":0.9369999766349792},{"id":"https://openalex.org/keywords/fused-silica-substrate","display_name":"fused silica substrate","score":0.8500000238418579},{"id":"https://openalex.org/keywords/critical-current-density","display_name":"critical current density","score":0.9580000042915344},{"id":"https://openalex.org/keywords/critical-temperature","display_name":"critical temperature","score":0.8410000205039978},{"id":"https://openalex.org/keywords/superconducting-transition-width","display_name":"superconducting transition width","score":0.5320000052452087},{"id":"https://openalex.org/keywords/niobium-target","display_name":"niobium target","score":0.5619999766349792},{"id":"https://openalex.org/keywords/nitrogen-atmosphere","display_name":"nitrogen atmosphere","score":0.3319999873638153}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7809957265853882},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.727645754814148},{"id":"https://openalex.org/C137637335","wikidata":"https://www.wikidata.org/wiki/Q899604","display_name":"Crystallite","level":2,"score":0.7050303220748901},{"id":"https://openalex.org/C37982897","wikidata":"https://www.wikidata.org/wiki/Q901321","display_name":"Pulsed laser deposition","level":3,"score":0.6956326961517334},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.6538881063461304},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.586961030960083},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5408883690834045},{"id":"https://openalex.org/C507968137","wikidata":"https://www.wikidata.org/wiki/Q1046","display_name":"Niobium","level":2,"score":0.5027854442596436},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.46911102533340454},{"id":"https://openalex.org/C2777769847","wikidata":"https://www.wikidata.org/wiki/Q2348812","display_name":"Niobium nitride","level":4,"score":0.45805346965789795},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3434728980064392},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.2212340533733368},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18680039048194885},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.15548977255821228},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.11310639977455139},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.11022129654884338},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.05234557390213013},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.112516","doi":"https://doi.org/10.1063/1.112516","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.112516","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W596336036","https://openalex.org/W1650743766","https://openalex.org/W1965843207","https://openalex.org/W1985634017","https://openalex.org/W2017065585","https://openalex.org/W2027415644","https://openalex.org/W2028725449","https://openalex.org/W2034952787","https://openalex.org/W2036129421","https://openalex.org/W2036376502","https://openalex.org/W2038015091","https://openalex.org/W2047715922","https://openalex.org/W2064962173","https://openalex.org/W2072000750","https://openalex.org/W2073866958","https://openalex.org/W2082475237","https://openalex.org/W2094412479","https://openalex.org/W2313228209","https://openalex.org/W2323265793","https://openalex.org/W2328095068"],"related_works":["https://openalex.org/W2031354346","https://openalex.org/W2128373693","https://openalex.org/W2323265793","https://openalex.org/W2046744251","https://openalex.org/W2276075475","https://openalex.org/W2978011129","https://openalex.org/W2033148961","https://openalex.org/W2084579692","https://openalex.org/W2235289241","https://openalex.org/W2008692883"],"abstract_inverted_index":{"Pulsed":[0],"laser":[1],"deposition":[2],"has":[3],"been":[4,34],"used":[5],"to":[6],"grow":[7],"superconducting":[8],"NbN":[9,47],"thin":[10],"films":[11,32],"from":[12],"niobium":[13],"targets":[14],"in":[15,60],"a":[16,37],"reactive":[17],"gas":[18,63],"atmosphere":[19],"of":[20,29,39],"N2":[21],"(10%":[22],"H2).":[23],"The":[24],"structural":[25],"and":[26,42,74,89,94],"electrical":[27],"properties":[28],"the":[30,84],"deposited":[31,49,54],"have":[33],"determined":[35],"as":[36],"function":[38],"substrate":[40],"temperature":[41],"crystallographic":[43],"orientation.":[44],"Highly":[45],"textured":[46],"was":[48],"on":[50,55,79],"MgO":[51,56],"(100).":[52],"Films":[53,77],"at":[57],"600":[58],"\u00b0C":[59],"60":[61],"mTorr":[62],"pressure":[64],"were":[65,87],"characterized":[66,90],"by":[67,91],"Tc=16.6":[68],"K,":[69],"Jc":[70,95],"(4.2":[71,96],"K)=7.1":[72],"MA/cm2,":[73],"\u03bb(0)=3200":[75],"\u00c5.":[76],"grown":[78],"amorphous":[80],"fused":[81],"silica,":[82],"under":[83],"same":[85],"conditions,":[86],"polycrystalline":[88],"Tc=11.3":[92],"K":[93],"K)=1.8":[97],"MA/cm2.":[98]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":3},{"year":2015,"cited_by_count":4},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":3}],"updated_date":"2026-10-15T10:00:46.086208","created_date":"2016-06-24T00:00:00"}