{"id":"https://openalex.org/W2057768076","doi":"https://doi.org/10.1116/1.588774","title":"Silicon structures for in situ characterization of atomic force microscope probe geometry","display_name":"Silicon structures for in situ characterization of atomic force microscope probe geometry","publication_year":1996,"publication_date":"1996-11-01","ids":{"openalex":"https://openalex.org/W2057768076","doi":"https://doi.org/10.1116/1.588774","mag":"2057768076"},"language":"en","primary_location":{"id":"doi:10.1116/1.588774","doi":"https://doi.org/10.1116/1.588774","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.588774","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113698090","display_name":"Konrad Jarausch","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. F. Jarausch","raw_affiliation_strings":["Department of Materials Science and Engineering, Precision Engineering Center, North Carolina State University, Raleigh, North Carolina 27695"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, Precision Engineering Center, North Carolina State University, Raleigh, North Carolina 27695","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032028917","display_name":"T. J. Stark","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. J. Stark","raw_affiliation_strings":["Department of Materials Science and Engineering, Precision Engineering Center, North Carolina State University, Raleigh, North Carolina 27695"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, Precision Engineering Center, North Carolina State University, Raleigh, North Carolina 27695","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110111188","display_name":"and P. E. Russell","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"and P. E. Russell","raw_affiliation_strings":["Department of Materials Science and Engineering, Precision Engineering Center, North Carolina State University, Raleigh, North Carolina 27695"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, Precision Engineering Center, North Carolina State University, Raleigh, North Carolina 27695","institution_ids":["https://openalex.org/I137902535"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I137902535"],"apc_list":null,"apc_paid":null,"fwci":0.8834,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.68376885,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"14","issue":"6","first_page":"3425","last_page":"3430"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/intermittent-contact-mode","display_name":"intermittent contact mode","score":0.8029999732971191},{"id":"https://openalex.org/keywords/afm-calibration","display_name":"AFM calibration","score":0.41100001335144043}],"concepts":[{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.720213770866394},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.6417164206504822},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5480567812919617},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.537905752658844},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.48289012908935547},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.4813059866428375},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4439290463924408},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.41600289940834045},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.38370198011398315},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1852516531944275},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17544838786125183},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.09175354242324829},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.588774","doi":"https://doi.org/10.1116/1.588774","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.588774","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2047838849","https://openalex.org/W2325727296","https://openalex.org/W2042917331","https://openalex.org/W2770869337","https://openalex.org/W2678592640","https://openalex.org/W2008542499","https://openalex.org/W4406861579","https://openalex.org/W2029095435","https://openalex.org/W2295419197","https://openalex.org/W2518355657"],"abstract_inverted_index":{"Atomic":[0],"force":[1],"microscopy":[2,96],"(AFM)":[3],"is":[4,32],"increasingly":[5],"relied":[6],"on":[7],"to":[8,56,68,77,141,153,176,183,187,191],"image":[9,132],"and":[10,13,43,186],"measure":[11],"micron":[12],"submicron":[14],"scale":[15],"surface":[16],"features.":[17],"Consistent":[18],"interpretation":[19],"of":[20,29,40,54,86,133,138,150,162,180],"AFM":[21,160],"information":[22],"is,":[23],"however,":[24],"difficult":[25],"if":[26],"the":[27,30,38,65,87,107,127,134,139,154,159,163,172,177,181,188],"geometry":[28,85,129,156],"probe":[31,47,69,128,142,151,155,182,189],"not":[33],"known.":[34],"In":[35],"this":[36,166],"work,":[37],"fabrication":[39,74],"funnel-like":[41],"structures":[42,88,108,140,173],"their":[44],"use":[45],"in":[46,100],"characterization":[48],"were":[49,71],"developed":[50,124],"from":[51,130,158],"a":[52],"proof":[53],"concept":[55],"readiness":[57],"for":[58,115],"field":[59],"testing.":[60],"The":[61,73,84,136],"specifications":[62],"that":[63,106,125,171],"determine":[64],"structure\u2019s":[66],"sensitivity":[67,137],"shape":[70,143,152],"identified.":[72],"was":[75,89,123,144,169],"tailored":[76],"yield":[78],"large":[79],"reproducible":[80],"arrays":[81],"(>100\u00d7100":[82],"structure).":[83],"characterized":[90],"using":[91],"low":[92],"voltage":[93],"scanning":[94],"electron":[95],"(SEM)":[97],"techniques.":[98],"Testing":[99],"intermittent":[101],"contact":[102],"mode":[103],"has":[104],"shown":[105],"are":[109,174],"stable":[110],"even":[111],"at":[112],"high":[113],"forces":[114],"multiple":[116],"scans":[117],"under":[118],"various":[119],"conditions.":[120],"An":[121],"algorithm":[122],"calculates":[126],"an":[131],"structure.":[135],"tested":[145],"by":[146],"comparing":[147],"SEM":[148],"images":[149,161],"calculated":[157],"structures.":[164],"From":[165],"analysis":[167],"it":[168],"determined":[170],"sensitive":[175],"cone":[178],"angle":[179],"within":[184,192],"5\u00b0":[185],"radius":[190],"50":[193],"nm.":[194]},"counts_by_year":[{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-08-21T09:56:20.448147","created_date":"2016-06-24T00:00:00"}