{"id":"https://openalex.org/W2056974450","doi":"https://doi.org/10.1143/jjap.37.4649","title":"Impact of Organic Contamination on Thin Gate Oxide Quality","display_name":"Impact of Organic Contamination on Thin Gate Oxide Quality","publication_year":1998,"publication_date":"1998-09-01","ids":{"openalex":"https://openalex.org/W2056974450","doi":"https://doi.org/10.1143/jjap.37.4649","mag":"2056974450"},"language":"en","primary_location":{"id":"doi:10.1143/jjap.37.4649","doi":"https://doi.org/10.1143/jjap.37.4649","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.37.4649","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.37.4649/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1143/JJAP.37.4649/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064307108","display_name":"Stefan De Gendt","orcid":"https://orcid.org/0000-0003-3775-3578","observed_orcids":["https://orcid.org/0000-0003-3775-3578"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Stefan De Gendt","raw_affiliation_strings":["IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087199830","display_name":"D. Martin Knotter","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"D. Martin Knotter","raw_affiliation_strings":["Philips Research, Prof. Holstlaan 4, 5656 AA Eindhoven, The Netherlands","Philips Research, Prof. Holstlaan 4, 5656 AA, Eindhoven, The Netherlands#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Philips Research, Prof. Holstlaan 4, 5656 AA Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I4210122849"]},{"raw_affiliation_string":"Philips Research, Prof. Holstlaan 4, 5656 AA, Eindhoven, The Netherlands#TAB#","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061145610","display_name":"Karine Kenis","orcid":"https://orcid.org/0000-0001-7116-7498","observed_orcids":["https://orcid.org/0000-0001-7116-7498"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Karine Kenis","raw_affiliation_strings":["IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014193303","display_name":"Michel Depas","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Michel Depas","raw_affiliation_strings":["IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089857324","display_name":"Marc Meuris","orcid":"https://orcid.org/0000-0002-9580-6810","observed_orcids":["https://orcid.org/0000-0002-9580-6810"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Marc Meuris","raw_affiliation_strings":["IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109196979","display_name":"Paul Mertens","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Paul W. Mertens","raw_affiliation_strings":["IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053777799","display_name":"Marc Heyns","orcid":"https://orcid.org/0000-0002-1199-4341","observed_orcids":["https://orcid.org/0000-0002-1199-4341"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Marc M. Heyns","raw_affiliation_strings":["IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2210,"currency":"USD","value_usd":2210},"apc_paid":null,"fwci":3.7844,"has_fulltext":true,"cited_by_count":51,"citation_normalized_percentile":{"value":0.92825612,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"37","issue":"9R","first_page":"4649","last_page":"4649"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/organic-pollution","display_name":"organic pollution","score":0.9940000176429749},{"id":"https://openalex.org/keywords/thin-gate-oxide","display_name":"thin gate oxide","score":0.925000011920929},{"id":"https://openalex.org/keywords/gate-oxidation","display_name":"gate oxidation","score":0.7950000166893005},{"id":"https://openalex.org/keywords/electrical-breakdown","display_name":"electrical breakdown","score":0.6970000267028809},{"id":"https://openalex.org/keywords/vacuum-exposure","display_name":"vacuum exposure","score":0.9789999723434448},{"id":"https://openalex.org/keywords/pollution-sources","display_name":"pollution sources","score":0.47999998927116394},{"id":"https://openalex.org/keywords/gate-oxide-reliability","display_name":"gate oxide reliability","score":0.335999995470047}],"concepts":[{"id":"https://openalex.org/C112570922","wikidata":"https://www.wikidata.org/wiki/Q60528603","display_name":"Contamination","level":2,"score":0.9014781713485718},{"id":"https://openalex.org/C77176794","wikidata":"https://www.wikidata.org/wiki/Q187689","display_name":"Oxidizing agent","level":2,"score":0.7988752126693726},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6759330034255981},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.5449049472808838},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5399743318557739},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.45968741178512573},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.41458332538604736},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2874905467033386},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28242868185043335},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.13683652877807617},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.10342946648597717},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0794108510017395},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.05619212985038757},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1143/jjap.37.4649","doi":"https://doi.org/10.1143/jjap.37.4649","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.37.4649","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.37.4649/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1143/jjap.37.4649","doi":"https://doi.org/10.1143/jjap.37.4649","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.37.4649","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.37.4649/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2056974450.pdf","grobid_xml":"https://content.openalex.org/works/W2056974450.grobid-xml"},"referenced_works_count":3,"referenced_works":["https://openalex.org/W1973301257","https://openalex.org/W2017638128","https://openalex.org/W2151560708"],"related_works":["https://openalex.org/W2522509306","https://openalex.org/W2159971987","https://openalex.org/W844474262","https://openalex.org/W2093798086","https://openalex.org/W2068612855","https://openalex.org/W2150496428","https://openalex.org/W4240777544","https://openalex.org/W2017638128","https://openalex.org/W1993043859","https://openalex.org/W2030816893"],"abstract_inverted_index":{"The":[0,45],"impact":[1],"of":[2,8,22,49],"organic":[3,23,51,72],"contamination":[4,24,52,73,79],"on":[5,59],"the":[6,50,60,82],"quality":[7],"5-nm-thick":[9],"gate":[10,17],"oxide":[11,40],"structures,":[12],"both":[13],"before":[14],"and":[15,35],"after":[16],"oxidation,":[18],"is":[19,42,53],"studied.":[20],"Sources":[21],"are":[25],"chemical":[26],"surface":[27],"modification":[28],"(i.e.":[29],"hexamethyldisilazane":[30],"priming),":[31],"wafer":[32],"box":[33],"storage":[34],"extended":[36],"vacuum":[37],"exposure.":[38],"Gate":[39],"integrity":[41],"evaluated":[43],"electrically.":[44],"origin":[46],"and/or":[47],"nature":[48],"seen":[54],"to":[55,71,75,87],"have":[56],"different":[57],"effects":[58],"electrical":[61],"breakdown.":[62],"Care":[63],"should":[64],"be":[65,94],"taken":[66],"when":[67,78],"exposing":[68],"silicon":[69],"wafers":[70],"prior":[74,86],"processing.":[76],"Especially":[77],"occurs":[80],"at":[81],"SiO2/polysilicon":[83],"interface,":[84],"i.e.":[85],"a":[88],"non-oxidizing":[89],"process":[90],"step,":[91],"organics":[92],"can":[93],"extremely":[95],"deleterious.":[96]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":3}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}