{"id":"https://openalex.org/W2056482102","doi":"https://doi.org/10.1109/glsv.1999.757430","title":"Design automation of MEMS systems using behavioral modeling","display_name":"Design automation of MEMS systems using behavioral modeling","publication_year":1999,"publication_date":"1999-01-01","ids":{"openalex":"https://openalex.org/W2056482102","doi":"https://doi.org/10.1109/glsv.1999.757430","mag":"2056482102"},"language":"en","primary_location":{"id":"doi:10.1109/glsv.1999.757430","doi":"https://doi.org/10.1109/glsv.1999.757430","is_oa":false,"landing_page_url":"https://doi.org/10.1109/glsv.1999.757430","pdf_url":null,"source":{"id":"https://openalex.org/S4363608736","display_name":"ACM Great Lakes Symposium on VLSI (GLSVLSI)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings Ninth Great Lakes Symposium on VLSI","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"D. Gibson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Gibson","raw_affiliation_strings":["ECECS Department, University of Cincinnati, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECECS Department, University of Cincinnati, USA","institution_ids":["https://openalex.org/I63135867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110492453","display_name":"Carla Purdy","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Purdy","raw_affiliation_strings":["ECECS Department, University of Cincinnati, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECECS Department, University of Cincinnati, USA","institution_ids":["https://openalex.org/I63135867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059249772","display_name":"A. E. Hare","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Hare","raw_affiliation_strings":["ECECS Department, University of Cincinnati, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECECS Department, University of Cincinnati, USA","institution_ids":["https://openalex.org/I63135867"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5036344518","display_name":"Fred R. Beyette","orcid":"https://orcid.org/0000-0001-8704-7810","observed_orcids":["https://orcid.org/0000-0001-8704-7810"]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"F. Beyette","raw_affiliation_strings":["ECECS Department, University of Cincinnati, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECECS Department, University of Cincinnati, USA","institution_ids":["https://openalex.org/I63135867"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I63135867"],"apc_list":null,"apc_paid":null,"fwci":2.9024,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.89937107,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"266","last_page":"269"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.986299991607666,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.986299991607666,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11522","display_name":"VLSI and FPGA Design Techniques","score":0.003700000001117587,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10904","display_name":"Embedded Systems Design Techniques","score":0.003100000089034438,"subfield":{"id":"https://openalex.org/subfields/1708","display_name":"Hardware and Architecture"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/behavioral-modeling","display_name":"behavioral modeling","score":0.9980000257492065},{"id":"https://openalex.org/keywords/optical-processors","display_name":"optical processors","score":0.574999988079071},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"microelectromechanical systems","score":0.6990000009536743}],"concepts":[{"id":"https://openalex.org/C78639753","wikidata":"https://www.wikidata.org/wiki/Q3318160","display_name":"Behavioral modeling","level":2,"score":0.7161146998405457},{"id":"https://openalex.org/C115901376","wikidata":"https://www.wikidata.org/wiki/Q184199","display_name":"Automation","level":2,"score":0.7125747203826904},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7102027535438538},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.705644965171814},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5848143100738525},{"id":"https://openalex.org/C64260653","wikidata":"https://www.wikidata.org/wiki/Q1194864","display_name":"Electronic design automation","level":2,"score":0.43628451228141785},{"id":"https://openalex.org/C107457646","wikidata":"https://www.wikidata.org/wiki/Q207434","display_name":"Human\u2013computer interaction","level":1,"score":0.4330732226371765},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.43070194125175476},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.3557390570640564},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.31781280040740967},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.23765835165977478},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21652930974960327},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.0924098789691925},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.08207190036773682},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/glsv.1999.757430","doi":"https://doi.org/10.1109/glsv.1999.757430","is_oa":false,"landing_page_url":"https://doi.org/10.1109/glsv.1999.757430","pdf_url":null,"source":{"id":"https://openalex.org/S4363608736","display_name":"ACM Great Lakes Symposium on VLSI (GLSVLSI)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings Ninth Great Lakes Symposium on VLSI","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1570577480","https://openalex.org/W1666015432","https://openalex.org/W2108750784","https://openalex.org/W2119229660"],"related_works":["https://openalex.org/W1981698903","https://openalex.org/W1677625238","https://openalex.org/W1993091616","https://openalex.org/W1970351835","https://openalex.org/W2112014599","https://openalex.org/W2602978704","https://openalex.org/W7095288918","https://openalex.org/W2120172081","https://openalex.org/W2157718832","https://openalex.org/W2104389773"],"abstract_inverted_index":{"We":[0],"propose":[1],"a":[2,32,49],"behavioral":[3,37],"approach":[4,10,19,45],"to":[5],"designing":[6],"MEMS":[7],"devices.":[8],"This":[9,39],"differs":[11],"from":[12],"much":[13],"current":[14],"research":[15],"in":[16],"that":[17],"this":[18],"would":[20,30,46],"not":[21],"require":[22,31],"dimensional":[23],"parameters":[24],"for":[25],"the":[26,59],"device,":[27],"but":[28],"instead":[29],"high":[33],"level,":[34],"functional":[35],"or":[36],"description.":[38],"paper":[40],"examines":[41],"how":[42],"such":[43],"an":[44,53],"work":[47],"using":[48,58],"case":[50],"study":[51],"of":[52],"optical":[54],"processor":[55],"manually":[56],"designed":[57],"MUMP's":[60],"process.":[61]},"counts_by_year":[],"updated_date":"2026-10-05T09:50:58.205359","created_date":"2016-06-24T00:00:00"}