{"id":"https://openalex.org/W2053512397","doi":"https://doi.org/10.1149/1.2423533","title":"Vapor Deposition of Germanium on Molybdenum","display_name":"Vapor Deposition of Germanium on Molybdenum","publication_year":1965,"publication_date":"1965-01-01","ids":{"openalex":"https://openalex.org/W2053512397","doi":"https://doi.org/10.1149/1.2423533","mag":"2053512397"},"language":"en","primary_location":{"id":"doi:10.1149/1.2423533","doi":"https://doi.org/10.1149/1.2423533","is_oa":false,"landing_page_url":"https://doi.org/10.1149/1.2423533","pdf_url":null,"source":{"id":"https://openalex.org/S138759888","display_name":"Journal of The Electrochemical Society","issn_l":"0013-4651","issn":["0013-4651","1945-7111"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of The Electrochemical Society","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111606467","display_name":"Ilmar L Kalnin","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"I. L. Kalnin","raw_affiliation_strings":["American\u2010Standard Research Division, New Brunswick, New Jersey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"American\u2010Standard Research Division, New Brunswick, New Jersey","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5088827644","display_name":"J. Rosenstock","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Rosenstock","raw_affiliation_strings":["American\u2010Standard Research Division, New Brunswick, New Jersey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"American\u2010Standard Research Division, New Brunswick, New Jersey","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":1950,"currency":"USD","value_usd":1950},"apc_paid":null,"fwci":0.4073,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.58548531,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"112","issue":"3","first_page":"329","last_page":"329"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.6660000085830688,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.6660000085830688,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.20749999582767487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.10490000247955322,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/germanium-thin-films","display_name":"germanium thin films","score":0.7960000038146973},{"id":"https://openalex.org/keywords/molybdenum-substrate","display_name":"molybdenum substrate","score":0.8960000276565552},{"id":"https://openalex.org/keywords/vapor-deposition","display_name":"vapor deposition","score":0.6370000243186951},{"id":"https://openalex.org/keywords/hydrogen-reduction","display_name":"hydrogen reduction","score":0.6230000257492065},{"id":"https://openalex.org/keywords/germanium-tetrachloride","display_name":"germanium tetrachloride","score":0.8100000023841858},{"id":"https://openalex.org/keywords/deposition-temperature","display_name":"deposition temperature","score":0.8840000033378601},{"id":"https://openalex.org/keywords/activation-energy","display_name":"activation energy","score":0.9409999847412109},{"id":"https://openalex.org/keywords/intermediate-phase","display_name":"intermediate phase","score":0.5189999938011169},{"id":"https://openalex.org/keywords/microhardness","display_name":"microhardness","score":0.8450000286102295},{"id":"https://openalex.org/keywords/electrical-resistivity","display_name":"electrical resistivity","score":0.9990000128746033},{"id":"https://openalex.org/keywords/film-adherence","display_name":"film adherence","score":0.7940000295639038},{"id":"https://openalex.org/keywords/polycrystalline-germanium","display_name":"polycrystalline germanium","score":0.8259999752044678}],"concepts":[{"id":"https://openalex.org/C549387045","wikidata":"https://www.wikidata.org/wiki/Q1053","display_name":"Molybdenum","level":2,"score":0.814655601978302},{"id":"https://openalex.org/C550623735","wikidata":"https://www.wikidata.org/wiki/Q867","display_name":"Germanium","level":3,"score":0.7277300357818604},{"id":"https://openalex.org/C137637335","wikidata":"https://www.wikidata.org/wiki/Q899604","display_name":"Crystallite","level":2,"score":0.6533714532852173},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.6197942495346069},{"id":"https://openalex.org/C95121573","wikidata":"https://www.wikidata.org/wiki/Q190474","display_name":"Activation energy","level":2,"score":0.5609327554702759},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4972269833087921},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.49061575531959534},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.48954710364341736},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.48796790838241577},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4824007749557495},{"id":"https://openalex.org/C2776579772","wikidata":"https://www.wikidata.org/wiki/Q5551947","display_name":"Germanide","level":4,"score":0.4429038166999817},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.37648433446884155},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.28640931844711304},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.14854827523231506},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.09501913189888},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.08466336131095886},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.06906870007514954},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1149/1.2423533","doi":"https://doi.org/10.1149/1.2423533","is_oa":false,"landing_page_url":"https://doi.org/10.1149/1.2423533","pdf_url":null,"source":{"id":"https://openalex.org/S138759888","display_name":"Journal of The Electrochemical Society","issn_l":"0013-4651","issn":["0013-4651","1945-7111"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of The Electrochemical Society","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2992325254","https://openalex.org/W2012340956","https://openalex.org/W1541835066","https://openalex.org/W2074847089","https://openalex.org/W2064191178","https://openalex.org/W1515609275","https://openalex.org/W2031665954","https://openalex.org/W2069216984","https://openalex.org/W2046239846","https://openalex.org/W4245540775"],"abstract_inverted_index":{"The":[0,41,68],"vapor":[1,17],"deposition":[2,25],"of":[3,14,24,44],"germanium":[4],"on":[5],"single":[6],"and":[7,34,63,77,81,88],"polycrystalline":[8,65],"molybdenum":[9,56,69],"substrates":[10],"by":[11,74,79],"hydrogen":[12],"reduction":[13],"GeCl":[15,28],"4":[16,29],"has":[18],"been":[19],"studied":[20],"as":[21],"a":[22],"function":[23],"temperature":[26],"(600\u00b0\u2013950\u00b0C),":[27],"concentration":[30],"(0.2\u20134":[31],"mole":[32],"%)":[33],"total":[35],"gas":[36],"flow":[37],"(200\u2013600":[38],"Std.":[39],"cc/min).":[40],"activation":[42],"energy":[43],"this":[45],"process":[46],"was":[47,58],"12":[48],"kcal/mole.":[49],"A":[50],"multiphase":[51],"intermediate":[52],"region":[53],"containing":[54],"several":[55],"germanides":[57],"found":[59],"between":[60],"the":[61,64],"Mo":[62],"Ge":[66],"deposit.":[67],"germanide":[70],"phases":[71],"were":[72,90],"identified":[73],"x\u2010ray":[75],"diffraction":[76],"delineated":[78],"sectioning":[80],"selective":[82],"etching.":[83],"Their":[84],"microhardness,":[85],"electrical":[86],"resistivity,":[87],"adherence":[89],"investigated.":[91]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}
