{"id":"https://openalex.org/W2053482883","doi":"https://doi.org/10.1116/1.580190","title":"Reactive magnetron sputter deposited CNx: Effects of N2 pressure and growth temperature on film composition, bonding, and microstructure","display_name":"Reactive magnetron sputter deposited CNx: Effects of N2 pressure and growth temperature on film composition, bonding, and microstructure","publication_year":1996,"publication_date":"1996-09-01","ids":{"openalex":"https://openalex.org/W2053482883","doi":"https://doi.org/10.1116/1.580190","mag":"2053482883"},"language":"en","primary_location":{"id":"doi:10.1116/1.580190","doi":"https://doi.org/10.1116/1.580190","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.580190","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108050913","display_name":"Weitao Zheng","orcid":"https://orcid.org/0000-0002-9028-278X","observed_orcids":["https://orcid.org/0000-0002-9028-278X","https://orcid.org/0000-0003-1354-2784","https://orcid.org/0000-0002-7999-8330"]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"W. T. Zheng","raw_affiliation_strings":["Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077885596","display_name":"H. Sj\u00f6str\u00f6m","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"H. Sj\u00f6str\u00f6m","raw_affiliation_strings":["Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061452744","display_name":"Ivan Gueorguiev Ivanov","orcid":"https://orcid.org/0000-0003-1000-0437","observed_orcids":["https://orcid.org/0000-0003-1000-0437"]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"I. Ivanov","raw_affiliation_strings":["Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109209746","display_name":"Kezhao Xing","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"K. Z. Xing","raw_affiliation_strings":["Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068621815","display_name":"Esteban Broitman","orcid":"https://orcid.org/0000-0003-3277-1945","observed_orcids":["https://orcid.org/0000-0003-3277-1945"]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"E. Broitman","raw_affiliation_strings":["Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016812762","display_name":"William R. Salaneck","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"W. R. Salaneck","raw_affiliation_strings":["Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073585823","display_name":"J. E. Greene","orcid":"https://orcid.org/0000-0002-7825-4030","observed_orcids":["https://orcid.org/0000-0002-7825-4030"]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"J. E. Greene","raw_affiliation_strings":["Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111537154","display_name":"J.\u2010E. Sundgren","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"J.-E. Sundgren","raw_affiliation_strings":["Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Link\u00f6ping University, S-581 83 Link\u00f6ping, Sweden","institution_ids":["https://openalex.org/I102134673"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I102134673"],"apc_list":null,"apc_paid":null,"fwci":28.8881,"has_fulltext":false,"cited_by_count":179,"citation_normalized_percentile":{"value":0.99925012,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"14","issue":"5","first_page":"2696","last_page":"2701"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9868000149726868,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9868000149726868,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.010499999858438969,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11341","display_name":"Boron and Carbon Nanomaterials Research","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/carbon-nitride-films","display_name":"carbon nitride films","score":0.9430000185966492},{"id":"https://openalex.org/keywords/reactive-magnetron-sputtering","display_name":"reactive magnetron sputtering","score":0.9269999861717224},{"id":"https://openalex.org/keywords/nitrogen-partial-pressure","display_name":"nitrogen partial pressure","score":0.9559999704360962},{"id":"https://openalex.org/keywords/growth-temperature","display_name":"growth temperature","score":0.9589999914169312},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.9169999957084656},{"id":"https://openalex.org/keywords/nuclear-to-cytoplasmic-ratio","display_name":"nuclear-cytoplasmic ratio","score":0.7390000224113464},{"id":"https://openalex.org/keywords/chemical-bonding","display_name":"chemical bonding","score":0.7409999966621399},{"id":"https://openalex.org/keywords/sp2-sp3-hybridization","display_name":"sp2/sp3 hybridization","score":0.8560000061988831},{"id":"https://openalex.org/keywords/cyano-radical","display_name":"cyano radical","score":0.6639999747276306},{"id":"https://openalex.org/keywords/ion-induced-desorption","display_name":"ion-induced desorption","score":0.9629999995231628},{"id":"https://openalex.org/keywords/amorphous-films","display_name":"amorphous films","score":0.6539999842643738},{"id":"https://openalex.org/keywords/crystalline-clusters","display_name":"crystalline clusters","score":0.8100000023841858},{"id":"https://openalex.org/keywords/hardness","display_name":"hardness","score":0.7630000114440918},{"id":"https://openalex.org/keywords/elastic-modulus","display_name":"elastic modulus","score":1.0}],"concepts":[{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.7406029105186462},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.7127447724342346},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.6496139764785767},{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.6451408863067627},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.617530882358551},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5892402529716492},{"id":"https://openalex.org/C160892712","wikidata":"https://www.wikidata.org/wiki/Q901559","display_name":"Fourier transform infrared spectroscopy","level":2,"score":0.5830311179161072},{"id":"https://openalex.org/C2777492770","wikidata":"https://www.wikidata.org/wiki/Q5037986","display_name":"Carbon nitride","level":4,"score":0.5737217664718628},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.541412889957428},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.47147467732429504},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.4700671136379242},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.30907177925109863},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.28691890835762024},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.17722216248512268},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1251520812511444},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.09974005818367004},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.06680518388748169},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.05288103222846985},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C65165184","wikidata":"https://www.wikidata.org/wiki/Q218831","display_name":"Photocatalysis","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.580190","doi":"https://doi.org/10.1116/1.580190","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.580190","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306084","display_name":"U.S. Department of Energy","ror":"https://ror.org/01bj3aw27"},{"id":"https://openalex.org/F4320337367","display_name":"Division of Materials Research","ror":"https://ror.org/01pc7k308"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1994632941","https://openalex.org/W133012107","https://openalex.org/W1987194126","https://openalex.org/W1622534972","https://openalex.org/W2045454151","https://openalex.org/W2049347630","https://openalex.org/W2015578116","https://openalex.org/W1653165680","https://openalex.org/W4248525032","https://openalex.org/W2063307704"],"abstract_inverted_index":{"The":[0,31,47,83],"effects":[1],"of":[2,14,98,167],"growth":[3,64,107],"processes":[4],"on":[5,177],"the":[6,62,104],"chemical":[7],"bond":[8],"structure,":[9],"microstructure,":[10],"and":[11,90,106,114,147,154,211,220],"mechanical":[12],"properties":[13],"carbon\u2013nitride":[15],"(CNx)":[16],"thin":[17],"films,":[18],"deposited":[19,187,201,207],"by":[20,95,163,171],"reactive":[21],"magnetron":[22],"sputtering":[23],"in":[24,85,125],"a":[25,68,192,208],"pure":[26],"N2":[27,39],"discharge,":[28],"are":[29],"reported.":[30],"film":[32,63],"deposition":[33],"rate":[34],"RD":[35,55,71,86],"increases":[36],"with":[37,87,131],"increasing":[38],"pressure":[40],"PN2":[41,89,213],"while":[42,191],"N/C":[43],"ratios":[44],"remain":[45],"constant.":[46],"maximum":[48],"N":[49,123],"concentration":[50],"was":[51,56,76,161,197],"\u223c35":[52],"at.":[53],"%.":[54],"found":[57,215],"to":[58,80,141,216],"be":[59,93],"dependent":[60],"upon":[61],"temperature":[65],"Ts.":[66],"For":[67,150],"given":[69],"PN2,":[70,136,156],"decreased":[72],"slightly":[73],"as":[74],"Ts":[75,91,210],"increased":[77],"from":[78,102],"100":[79],"600":[81],"\u00b0C.":[82],"variations":[84],"both":[88,103],"can":[92],"explained":[94],"ion-induced":[96],"desorption":[97],"cyano":[99],"radicals":[100],"CNx":[101,205],"target":[105],"surfaces":[108],"during":[109],"deposition.":[110],"X-ray":[111],"photoelectron":[112],"spectroscopy":[113,118],"Fourier":[115],"transform":[116],"infrared":[117],"(FTIR)":[119],"analyses":[120],"showed":[121],"that":[122],"atoms":[124,143],"films":[126,186,200,206],"grown":[127],"at":[128,188,202],"Ts\u2273350":[129],"\u00b0C":[130,153,204],"low":[132,151],"nitrogen":[133],"partial":[134],"pressures":[135],"\u223c2.5":[137],"mTorr,":[138,158],"were":[139,169,214],"bound":[140],"C":[142],"through":[144],"hybridized":[145],"sp2":[146],"sp3":[148],"configurations.":[149],"Ts=100":[152,189],"higher":[155,209,218],"10":[157],"triple-bonded":[159],"C\u2261N":[160],"detected":[162],"FTIR.":[164],"Two":[165],"types":[166],"microstructures":[168],"observed":[170,198],"high-resolution":[172],"transmission":[173],"electron":[174],"microscopy,":[175],"depending":[176],"Ts:":[178],"an":[179],"amorphous":[180],"phase,":[181],"containing":[182],"crystalline":[183],"clusters":[184],"for":[185,199],"\u00b0C,":[190],"turbostraticlike":[193],"or":[194],"fullerenelike":[195],"phase":[196],"Ts\u2273200":[203],"lower":[212],"have":[217],"hardness":[219],"elastic":[221],"modulus.":[222]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":6}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}