{"id":"https://openalex.org/W2052230618","doi":"https://doi.org/10.1109/vlsit.2012.6242444","title":"Implementing cubic-phase HfO2 with \u03ba-value \u223c 30 in low-VT replacement gate pMOS devices for improved EOT-Scaling and reliability","display_name":"Implementing cubic-phase HfO2 with \u03ba-value \u223c 30 in low-VT replacement gate pMOS devices for improved EOT-Scaling and reliability","publication_year":2012,"publication_date":"2012-06-01","ids":{"openalex":"https://openalex.org/W2052230618","doi":"https://doi.org/10.1109/vlsit.2012.6242444","mag":"2052230618"},"language":"en","primary_location":{"id":"doi:10.1109/vlsit.2012.6242444","doi":"https://doi.org/10.1109/vlsit.2012.6242444","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsit.2012.6242444","pdf_url":null,"source":{"id":"https://openalex.org/S4306421008","display_name":"Symposium on VLSI Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 Symposium on VLSI Technology (VLSIT)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108622788","display_name":"Lars\u2010\u00c5ke Ragnarsson","orcid":"https://orcid.org/0000-0003-1057-8140","observed_orcids":["https://orcid.org/0000-0003-1057-8140"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Lars-Ake Ragnarsson","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062866036","display_name":"Christoph Adelmann","orcid":"https://orcid.org/0000-0002-4831-3159","observed_orcids":["https://orcid.org/0000-0002-4831-3159"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Christoph Adelmann","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055445949","display_name":"Yuichi Higuchi","orcid":"https://orcid.org/0000-0003-3394-2590","observed_orcids":["https://orcid.org/0000-0003-3394-2590"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Yuichi Higuchi","raw_affiliation_strings":["Imec, Leuven, Belgium","Assignee at IMEC from Panasonic, Kapeldreef 75, B-3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Assignee at IMEC from Panasonic, Kapeldreef 75, B-3001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044508626","display_name":"Karl Opsomer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Karl Opsomer","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081272792","display_name":"Anabela Veloso","orcid":"https://orcid.org/0000-0001-7546-0261","observed_orcids":["https://orcid.org/0000-0001-7546-0261"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Anabela Veloso","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110422658","display_name":"Soon Aik Chew","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Soon Aik Chew","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055595187","display_name":"Erika Rohr","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Erika Rohr","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009081483","display_name":"Emma Vecchio","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Emma Vecchio","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112449211","display_name":"Xiaoping Shi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Xiaoping Shi","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049232971","display_name":"K. Devriendt","orcid":"https://orcid.org/0000-0002-0662-7926","observed_orcids":["https://orcid.org/0000-0002-0662-7926"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Katia Devriendt","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020622600","display_name":"Farid Sebaai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Farid Sebaai","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038148281","display_name":"Thomas Kauerauf","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Thomas Kauerauf","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072042967","display_name":"Ma\u0142gorzata Pawlak","orcid":"https://orcid.org/0000-0002-2519-9736","observed_orcids":["https://orcid.org/0000-0002-2519-9736"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Malgorzata Anna Pawlak","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004538088","display_name":"Tom Schram","orcid":"https://orcid.org/0000-0003-1533-7055","observed_orcids":["https://orcid.org/0000-0003-1533-7055"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Tom Schram","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085573082","display_name":"Sven Van Elshocht","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Sven Van Elshocht","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065113949","display_name":"Naoto Horiguchi","orcid":"https://orcid.org/0000-0001-5490-0416","observed_orcids":["https://orcid.org/0000-0001-5490-0416"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Naoto Horiguchi","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050315289","display_name":"Aaron Thean","orcid":"https://orcid.org/0000-0003-2418-6404","observed_orcids":["https://orcid.org/0000-0003-2418-6404"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Aaron Thean","raw_affiliation_strings":["Imec, Leuven, Belgium","Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":3.6564,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.94139437,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"91","issue":null,"first_page":"27","last_page":"28"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9897000193595886,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9897000193595886,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.004699999932199717,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.00139999995008111,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/high-k-dielectrics","display_name":"high-k dielectrics","score":0.8330000042915344},{"id":"https://openalex.org/keywords/replacement-metal-gate","display_name":"replacement metal gate","score":0.8870000243186951},{"id":"https://openalex.org/keywords/pmos-transistors","display_name":"PMOS transistors","score":0.9340000152587891},{"id":"https://openalex.org/keywords/gate-leakage-current","display_name":"gate leakage current","score":0.7879999876022339},{"id":"https://openalex.org/keywords/equivalent-oxide-thickness-scaling","display_name":"equivalent oxide thickness scaling","score":0.9380000233650208},{"id":"https://openalex.org/keywords/gate-stack-reliability","display_name":"gate stack reliability","score":0.621999979019165}],"concepts":[{"id":"https://openalex.org/C27050352","wikidata":"https://www.wikidata.org/wiki/Q173605","display_name":"PMOS logic","level":4,"score":0.6235924363136292},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.36154747009277344},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3224632740020752},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.27014443278312683},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.09232142567634583},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsit.2012.6242444","doi":"https://doi.org/10.1109/vlsit.2012.6242444","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsit.2012.6242444","pdf_url":null,"source":{"id":"https://openalex.org/S4306421008","display_name":"Symposium on VLSI Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 Symposium on VLSI Technology (VLSIT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2024803671","https://openalex.org/W2055103492"],"related_works":["https://openalex.org/W2546317330","https://openalex.org/W2502513883","https://openalex.org/W6980364677","https://openalex.org/W3006217415","https://openalex.org/W2271338138","https://openalex.org/W1976822381","https://openalex.org/W3151564461","https://openalex.org/W2524478169","https://openalex.org/W2083624388","https://openalex.org/W4241639127"],"abstract_inverted_index":{"Higher":[0],"\u03ba-value":[1],"HfO2(\u03ba~30)":[2],"was":[3,13],"evaluated":[4],"in":[5,55],"replacement":[6],"metal":[7],"gate":[8],"pMOS":[9],"devices.":[10],"The":[11,27,50],"higher-\u03ba":[12],"achieved":[14],"by":[15],"doping":[16],"and":[17,57],"anneal":[18],"of":[19],"the":[20,24,63],"HfO2causing":[21],"crystallization":[22],"into":[23],"cubic":[25],"phase.":[26],"resulting":[28],"gate-stack":[29],"has":[30],"up":[31],"to":[32,38,62],"103\u00d7":[33],"lower":[34],"gate-leakage":[35],"current":[36],"compared":[37],"a":[39],"reference":[40],"HfO2:":[41],"JGat":[42],"-1":[43],"V":[44],"~":[45],"2":[46],"\u03bcA/cm2at":[47],"EOT~9.7":[48],"\u00c5.":[49],"better":[51],"JG-":[52],"EOT-scaling,":[53],"result":[54],"performance":[56],"reliability":[58],"improvements":[59],"when":[60],"normalized":[61],"JG.":[64]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":5},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-13T10:08:12.033832","created_date":"2016-06-24T00:00:00"}