{"id":"https://openalex.org/W2052043901","doi":"https://doi.org/10.1007/s00542-009-0993-0","title":"Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering","display_name":"Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering","publication_year":2010,"publication_date":"2010-01-07","ids":{"openalex":"https://openalex.org/W2052043901","doi":"https://doi.org/10.1007/s00542-009-0993-0","mag":"2052043901"},"language":"en","primary_location":{"id":"doi:10.1007/s00542-009-0993-0","doi":"https://doi.org/10.1007/s00542-009-0993-0","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s00542-009-0993-0","pdf_url":null,"source":{"id":"https://openalex.org/S54043040","display_name":"Microsystem Technologies","issn_l":"0946-7076","issn":["0946-7076","1432-1858"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microsystem Technologies","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111973920","display_name":"Michaela Grosser","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I91712215","display_name":"Saarland University","ror":"https://ror.org/01jdpyv68","country_code":"DE","type":"education","lineage":["https://openalex.org/I91712215"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Michaela Grosser","raw_affiliation_strings":["Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123, Saarbruecken, Germany","Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, 66123, Saarbruecken, Germany#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123, Saarbruecken, Germany","institution_ids":["https://openalex.org/I91712215"]},{"raw_affiliation_string":"Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, 66123, Saarbruecken, Germany#TAB#","institution_ids":["https://openalex.org/I91712215"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033035943","display_name":"Mathias M\u00fcnch","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I91712215","display_name":"Saarland University","ror":"https://ror.org/01jdpyv68","country_code":"DE","type":"education","lineage":["https://openalex.org/I91712215"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. M\u00fcnch","raw_affiliation_strings":["Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123, Saarbruecken, Germany","Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, 66123, Saarbruecken, Germany#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123, Saarbruecken, Germany","institution_ids":["https://openalex.org/I91712215"]},{"raw_affiliation_string":"Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, 66123, Saarbruecken, Germany#TAB#","institution_ids":["https://openalex.org/I91712215"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069593237","display_name":"Josef Brenner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210100444","display_name":"AC2T Research (Austria)","ror":"https://ror.org/012d0ge65","country_code":"AT","type":"company","lineage":["https://openalex.org/I4210100444"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"J. Brenner","raw_affiliation_strings":["Austrian Center of Competence for Tribology, Viktor Kaplan-Stra\u00dfe 2, 2700, Wiener Neustadt, Austria","Austrian Center of Competence for Tribology, Viktor Kaplan-Stra\u00dfe 2, 2700, Wiener Neustadt, Austria#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Austrian Center of Competence for Tribology, Viktor Kaplan-Stra\u00dfe 2, 2700, Wiener Neustadt, Austria","institution_ids":["https://openalex.org/I4210100444"]},{"raw_affiliation_string":"Austrian Center of Competence for Tribology, Viktor Kaplan-Stra\u00dfe 2, 2700, Wiener Neustadt, Austria#TAB#","institution_ids":["https://openalex.org/I4210100444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061493381","display_name":"Marcus Wilke","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Wilke","raw_affiliation_strings":["MFPA Weimar, Gustav-Kirchhoff-Strasse 5, 98693, Ilmenau, Germany","MFPA Weimar, Gustav-Kirchhoff-Strasse 5, 98693, Ilmenau, Germany#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MFPA Weimar, Gustav-Kirchhoff-Strasse 5, 98693, Ilmenau, Germany","institution_ids":[]},{"raw_affiliation_string":"MFPA Weimar, Gustav-Kirchhoff-Strasse 5, 98693, Ilmenau, Germany#TAB#","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026915398","display_name":"Helmut Seidel","orcid":"https://orcid.org/0000-0003-4210-2964","observed_orcids":["https://orcid.org/0000-0003-4210-2964"]},"institutions":[{"id":"https://openalex.org/I91712215","display_name":"Saarland University","ror":"https://ror.org/01jdpyv68","country_code":"DE","type":"education","lineage":["https://openalex.org/I91712215"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Seidel","raw_affiliation_strings":["Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123, Saarbruecken, Germany","Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, 66123, Saarbruecken, Germany#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123, Saarbruecken, Germany","institution_ids":["https://openalex.org/I91712215"]},{"raw_affiliation_string":"Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, 66123, Saarbruecken, Germany#TAB#","institution_ids":["https://openalex.org/I91712215"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074689407","display_name":"C. Bienert","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"C. Bienert","raw_affiliation_strings":["Friedrich-Alexander-University, Erlangen-N\u00fcrnberg, Martensstr. 5, 91058, Erlangen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Friedrich-Alexander-University, Erlangen-N\u00fcrnberg, Martensstr. 5, 91058, Erlangen, Germany","institution_ids":["https://openalex.org/I181369854"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004759165","display_name":"Andreas Roosen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Roosen","raw_affiliation_strings":["Friedrich-Alexander-University, Erlangen-N\u00fcrnberg, Martensstr. 5, 91058, Erlangen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Friedrich-Alexander-University, Erlangen-N\u00fcrnberg, Martensstr. 5, 91058, Erlangen, Germany","institution_ids":["https://openalex.org/I181369854"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5017133878","display_name":"U. Schmid","orcid":"https://orcid.org/0000-0003-4528-8653","observed_orcids":["https://orcid.org/0000-0003-4528-8653"]},"institutions":[{"id":"https://openalex.org/I145847075","display_name":"TU Wien","ror":"https://ror.org/04d836q62","country_code":"AT","type":"education","lineage":["https://openalex.org/I145847075"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"U. Schmid","raw_affiliation_strings":["Department for Microsystems Technology, Institute of Sensor and Actuator Systems, Vienna University of Technology, Floragasse 7, 1040, Vienna, Austria","Vienna University of Technology, Department for Microsystems Technology, Institute of Sensor and Actuator Systems, Floragasse 7, 1040, Vienna, Austria#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department for Microsystems Technology, Institute of Sensor and Actuator Systems, Vienna University of Technology, Floragasse 7, 1040, Vienna, Austria","institution_ids":["https://openalex.org/I145847075"]},{"raw_affiliation_string":"Vienna University of Technology, Department for Microsystems Technology, Institute of Sensor and Actuator Systems, Floragasse 7, 1040, Vienna, Austria#TAB#","institution_ids":["https://openalex.org/I145847075"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5111973920"],"corresponding_institution_ids":["https://openalex.org/I91712215"],"apc_list":{"value":2790,"currency":"USD","value_usd":2790},"apc_paid":null,"fwci":2.4756,"has_fulltext":false,"cited_by_count":21,"citation_normalized_percentile":{"value":0.87006961,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"16","issue":"5","first_page":"825","last_page":"836"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.8237000107765198,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.8237000107765198,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.04540000110864639,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.038100000470876694,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tantalum-nitride-thin-films","display_name":"tantalum nitride thin films","score":0.9459999799728394},{"id":"https://openalex.org/keywords/reactive-magnetron-sputtering","display_name":"reactive magnetron sputtering","score":0.8519999980926514},{"id":"https://openalex.org/keywords/dc-magnetron-sputtering","display_name":"DC magnetron sputtering","score":0.8090000152587891},{"id":"https://openalex.org/keywords/microstructure","display_name":"microstructure","score":0.6930000185966492},{"id":"https://openalex.org/keywords/chemical-composition","display_name":"chemical composition","score":0.9900000095367432},{"id":"https://openalex.org/keywords/electrical-properties","display_name":"electrical properties","score":0.9860000014305115},{"id":"https://openalex.org/keywords/nitrogen-content","display_name":"nitrogen content","score":0.5960000157356262},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.7639999985694885},{"id":"https://openalex.org/keywords/low-temperature-co-fired-ceramic","display_name":"low temperature co-fired ceramic","score":0.953000009059906},{"id":"https://openalex.org/keywords/harsh-environment-sensors","display_name":"harsh environment sensors","score":0.8970000147819519}],"concepts":[{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.748903751373291},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7381390333175659},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6245630383491516},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5989603996276855},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5900887250900269},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.5841094851493835},{"id":"https://openalex.org/C2778112282","wikidata":"https://www.wikidata.org/wiki/Q415489","display_name":"Tantalum nitride","level":3,"score":0.5489344596862793},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5468976497650146},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.49802684783935547},{"id":"https://openalex.org/C514619126","wikidata":"https://www.wikidata.org/wiki/Q1123","display_name":"Tantalum","level":2,"score":0.4273339509963989},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3325645923614502},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.2614489495754242},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.20665693283081055},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.20366019010543823},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20195168256759644},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.15493306517601013},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.05910003185272217},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/s00542-009-0993-0","doi":"https://doi.org/10.1007/s00542-009-0993-0","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s00542-009-0993-0","pdf_url":null,"source":{"id":"https://openalex.org/S54043040","display_name":"Microsystem Technologies","issn_l":"0946-7076","issn":["0946-7076","1432-1858"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microsystem Technologies","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320879","display_name":"Deutsche Forschungsgemeinschaft","ror":"https://ror.org/018mejw64"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":34,"referenced_works":["https://openalex.org/W1965123525","https://openalex.org/W1973833155","https://openalex.org/W1977652981","https://openalex.org/W1980548458","https://openalex.org/W1987794677","https://openalex.org/W1995128401","https://openalex.org/W1995939366","https://openalex.org/W1999703222","https://openalex.org/W2006438547","https://openalex.org/W2010074302","https://openalex.org/W2024721275","https://openalex.org/W2027370009","https://openalex.org/W2030444818","https://openalex.org/W2034758288","https://openalex.org/W2041143655","https://openalex.org/W2042705332","https://openalex.org/W2043702497","https://openalex.org/W2048796937","https://openalex.org/W2048935982","https://openalex.org/W2056224016","https://openalex.org/W2059015838","https://openalex.org/W2059610717","https://openalex.org/W2067110049","https://openalex.org/W2071402106","https://openalex.org/W2074934419","https://openalex.org/W2081599193","https://openalex.org/W2084362253","https://openalex.org/W2084404579","https://openalex.org/W2086103622","https://openalex.org/W2086534873","https://openalex.org/W2087152318","https://openalex.org/W2116418689","https://openalex.org/W2132808539","https://openalex.org/W2138259569"],"related_works":["https://openalex.org/W2090641881","https://openalex.org/W4290091022","https://openalex.org/W2355694035","https://openalex.org/W2281576940","https://openalex.org/W3093929694","https://openalex.org/W2043762612","https://openalex.org/W2171404548","https://openalex.org/W2030777765","https://openalex.org/W2085065190","https://openalex.org/W2001840565"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}