{"id":"https://openalex.org/W2050873145","doi":"https://doi.org/10.1016/j.sse.2014.06.024","title":"Planarized ambipolar a-SiGe:H thin-film transistors: Influence of the sequence of fabrication process","display_name":"Planarized ambipolar a-SiGe:H thin-film transistors: Influence of the sequence of fabrication process","publication_year":2014,"publication_date":"2014-06-26","ids":{"openalex":"https://openalex.org/W2050873145","doi":"https://doi.org/10.1016/j.sse.2014.06.024","mag":"2050873145"},"language":"en","primary_location":{"id":"doi:10.1016/j.sse.2014.06.024","doi":"https://doi.org/10.1016/j.sse.2014.06.024","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.sse.2014.06.024","pdf_url":null,"source":{"id":"https://openalex.org/S77418581","display_name":"Solid-State Electronics","issn_l":"0038-1101","issn":["0038-1101","1879-2405"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Solid-State Electronics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5091506339","display_name":"Miguel A. Dom\u00ednguez","orcid":"https://orcid.org/0000-0002-3014-7236","observed_orcids":["https://orcid.org/0000-0002-3014-7236"]},"institutions":[{"id":"https://openalex.org/I721619","display_name":"Benem\u00e9rita Universidad Aut\u00f3noma de Puebla","ror":"https://ror.org/03p2z7827","country_code":"MX","type":"education","lineage":["https://openalex.org/I721619"]}],"countries":["MX"],"is_corresponding":true,"raw_author_name":"Miguel Dominguez","raw_affiliation_strings":["Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemerita Universidad Autonoma de Puebla (BUAP), Puebla 72570, Mexico","Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benem\u00e9rita Universidad Aut\u00f3noma de Puebla (BUAP), Puebla 72570, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemerita Universidad Autonoma de Puebla (BUAP), Puebla 72570, Mexico","institution_ids":["https://openalex.org/I721619"]},{"raw_affiliation_string":"Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benem\u00e9rita Universidad Aut\u00f3noma de Puebla (BUAP), Puebla 72570, Mexico","institution_ids":["https://openalex.org/I721619"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078392704","display_name":"Pedro Rosales-Q","orcid":"https://orcid.org/0000-0002-8352-5114","observed_orcids":["https://orcid.org/0000-0002-8352-5114"]},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Pedro Rosales","raw_affiliation_strings":["National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla Z.P. 72840, Mexico"],"raw_orcid":"https://orcid.org/0000-0002-8352-5114","affiliations":[{"raw_affiliation_string":"National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla Z.P. 72840, Mexico","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052376128","display_name":"Alfonso J Torres","orcid":"https://orcid.org/0000-0002-8733-8527","observed_orcids":["https://orcid.org/0000-0002-8733-8527"]},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Alfonso Torres","raw_affiliation_strings":["National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla Z.P. 72840, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla Z.P. 72840, Mexico","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100627685","display_name":"Fredy Roger Flores Flores","orcid":"https://orcid.org/0000-0002-3572-7969","observed_orcids":["https://orcid.org/0000-0002-3572-7969"]},"institutions":[{"id":"https://openalex.org/I721619","display_name":"Benem\u00e9rita Universidad Aut\u00f3noma de Puebla","ror":"https://ror.org/03p2z7827","country_code":"MX","type":"education","lineage":["https://openalex.org/I721619"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Francisco Flores","raw_affiliation_strings":["Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemerita Universidad Autonoma de Puebla (BUAP), Puebla 72570, Mexico","Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benem\u00e9rita Universidad Aut\u00f3noma de Puebla (BUAP), Puebla 72570, Mexico"],"raw_orcid":"https://orcid.org/0000-0002-3572-7969","affiliations":[{"raw_affiliation_string":"Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemerita Universidad Autonoma de Puebla (BUAP), Puebla 72570, Mexico","institution_ids":["https://openalex.org/I721619"]},{"raw_affiliation_string":"Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benem\u00e9rita Universidad Aut\u00f3noma de Puebla (BUAP), Puebla 72570, Mexico","institution_ids":["https://openalex.org/I721619"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067075015","display_name":"Joel Molina Reyes","orcid":"https://orcid.org/0000-0002-5681-1713","observed_orcids":["https://orcid.org/0000-0002-5681-1713"]},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Joel Molina","raw_affiliation_strings":["National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla Z.P. 72840, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla Z.P. 72840, Mexico","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086976474","display_name":"Mario Moreno","orcid":"https://orcid.org/0000-0001-5264-8296","observed_orcids":["https://orcid.org/0000-0001-5264-8296"]},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Mario Moreno","raw_affiliation_strings":["National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla Z.P. 72840, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla Z.P. 72840, Mexico","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109130503","display_name":"Jos\u00e9 Alberto Luna","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I721619","display_name":"Benem\u00e9rita Universidad Aut\u00f3noma de Puebla","ror":"https://ror.org/03p2z7827","country_code":"MX","type":"education","lineage":["https://openalex.org/I721619"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Jose Luna","raw_affiliation_strings":["Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemerita Universidad Autonoma de Puebla (BUAP), Puebla 72570, Mexico","Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benem\u00e9rita Universidad Aut\u00f3noma de Puebla (BUAP), Puebla 72570, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemerita Universidad Autonoma de Puebla (BUAP), Puebla 72570, Mexico","institution_ids":["https://openalex.org/I721619"]},{"raw_affiliation_string":"Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benem\u00e9rita Universidad Aut\u00f3noma de Puebla (BUAP), Puebla 72570, Mexico","institution_ids":["https://openalex.org/I721619"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5051374677","display_name":"Abd\u00fa Ordu\u00f1a-D\u00edaz","orcid":"https://orcid.org/0000-0002-6868-5769","observed_orcids":["https://orcid.org/0000-0002-6868-5769"]},"institutions":[{"id":"https://openalex.org/I59361560","display_name":"Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/059sp8j34","country_code":"MX","type":"education","lineage":["https://openalex.org/I59361560"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Abdu Ordu\u00f1a","raw_affiliation_strings":["Centro de Investigaci\u00f3n en Biotecnolog\u00eda Aplicada (CIBA), IPN, Tlaxcala, Tlax. 72197, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centro de Investigaci\u00f3n en Biotecnolog\u00eda Aplicada (CIBA), IPN, Tlaxcala, Tlax. 72197, Mexico","institution_ids":["https://openalex.org/I59361560"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5091506339"],"corresponding_institution_ids":["https://openalex.org/I721619"],"apc_list":{"value":2410,"currency":"USD","value_usd":2410},"apc_paid":null,"fwci":0.973,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.76609089,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":96},"biblio":{"volume":"99","issue":null,"first_page":"45","last_page":"50"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9868000149726868,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9868000149726868,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10045","display_name":"Organic Electronics and Photovoltaics","score":0.00430000014603138,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.0038999998942017555,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/amorphous-silicon-germanium-alloys","display_name":"amorphous silicon-germanium alloys","score":0.7429999709129333},{"id":"https://openalex.org/keywords/thin-film-transistors","display_name":"thin-film transistors","score":0.8970000147819519},{"id":"https://openalex.org/keywords/silicon-nitride-passivation","display_name":"silicon nitride passivation","score":0.9879999756813049},{"id":"https://openalex.org/keywords/ambipolar-behavior","display_name":"ambipolar behavior","score":0.8550000190734863},{"id":"https://openalex.org/keywords/trap-density","display_name":"trap density","score":0.8320000171661377},{"id":"https://openalex.org/keywords/device-modeling","display_name":"device modeling","score":0.875}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8835762739181519},{"id":"https://openalex.org/C25621703","wikidata":"https://www.wikidata.org/wiki/Q2658857","display_name":"Ambipolar diffusion","level":3,"score":0.761679470539093},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7496216893196106},{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.7265921831130981},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6161832213401794},{"id":"https://openalex.org/C87359718","wikidata":"https://www.wikidata.org/wiki/Q1271916","display_name":"Thin-film transistor","level":3,"score":0.5184952020645142},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.4747339189052582},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4518704414367676},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.43065470457077026},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.387519896030426},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3078048825263977},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1885467767715454},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.13879179954528809},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.08607417345046997},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.sse.2014.06.024","doi":"https://doi.org/10.1016/j.sse.2014.06.024","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.sse.2014.06.024","pdf_url":null,"source":{"id":"https://openalex.org/S77418581","display_name":"Solid-State Electronics","issn_l":"0038-1101","issn":["0038-1101","1879-2405"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Solid-State Electronics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W613598210","https://openalex.org/W1556667216","https://openalex.org/W1980071150","https://openalex.org/W1985909368","https://openalex.org/W1990787771","https://openalex.org/W1997475392","https://openalex.org/W2005546781","https://openalex.org/W2007076561","https://openalex.org/W2021452248","https://openalex.org/W2022042203","https://openalex.org/W2026424527","https://openalex.org/W2028842652","https://openalex.org/W2034622255","https://openalex.org/W2044517669","https://openalex.org/W2075371655","https://openalex.org/W2086103622","https://openalex.org/W2091220318","https://openalex.org/W2091860477","https://openalex.org/W2102003414","https://openalex.org/W2102866249","https://openalex.org/W2107507841","https://openalex.org/W2129117143","https://openalex.org/W2138642596","https://openalex.org/W2156940637","https://openalex.org/W2160144321","https://openalex.org/W2486622476","https://openalex.org/W4229578609","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W2324542004","https://openalex.org/W1556667216","https://openalex.org/W2156940637","https://openalex.org/W2114003907","https://openalex.org/W1972329934","https://openalex.org/W2917850813","https://openalex.org/W3212871562","https://openalex.org/W2104349692","https://openalex.org/W2544771231","https://openalex.org/W2006586454"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}
