{"id":"https://openalex.org/W2050154093","doi":"https://doi.org/10.1116/1.586028","title":"Focused ion beam deposition of Pt containing films","display_name":"Focused ion beam deposition of Pt containing films","publication_year":1992,"publication_date":"1992-11-01","ids":{"openalex":"https://openalex.org/W2050154093","doi":"https://doi.org/10.1116/1.586028","mag":"2050154093"},"language":"en","primary_location":{"id":"doi:10.1116/1.586028","doi":"https://doi.org/10.1116/1.586028","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.586028","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5013547802","display_name":"J. Puretz","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Puretz","raw_affiliation_strings":["FEI Company, Beaverton, Oregon 97006"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEI Company, Beaverton, Oregon 97006","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109971410","display_name":"Lynwood W. Swanson","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"L. W. Swanson","raw_affiliation_strings":["FEI Company, Beaverton, Oregon 97006"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEI Company, Beaverton, Oregon 97006","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5689,"has_fulltext":false,"cited_by_count":81,"citation_normalized_percentile":{"value":0.78142529,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"10","issue":"6","first_page":"2695","last_page":"2698"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.923799991607666,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.923799991607666,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.039000000804662704,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.013399999588727951,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/focused-ion-beam-deposition","display_name":"focused ion beam deposition","score":0.9629999995231628},{"id":"https://openalex.org/keywords/platinum-films","display_name":"platinum films","score":0.7680000066757202},{"id":"https://openalex.org/keywords/gallium-ion-beam","display_name":"gallium ion beam","score":0.7829999923706055},{"id":"https://openalex.org/keywords/film-resistivity","display_name":"film resistivity","score":0.6240000128746033},{"id":"https://openalex.org/keywords/carbon-contamination","display_name":"carbon contamination","score":0.6850000023841858},{"id":"https://openalex.org/keywords/interconnects","display_name":"interconnects","score":0.8539999723434448},{"id":"https://openalex.org/keywords/tungsten-hexacarbonyl","display_name":"tungsten hexacarbonyl","score":0.8199999928474426},{"id":"https://openalex.org/keywords/figure-of-merit","display_name":"figure of merit","score":0.7009999752044678}],"concepts":[{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.6411715745925903},{"id":"https://openalex.org/C518104683","wikidata":"https://www.wikidata.org/wiki/Q880","display_name":"Platinum","level":3,"score":0.6023896336555481},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.601791501045227},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5910906195640564},{"id":"https://openalex.org/C2780646311","wikidata":"https://www.wikidata.org/wiki/Q1142501","display_name":"Auger","level":2,"score":0.5625717639923096},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.5597763061523438},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5504738092422485},{"id":"https://openalex.org/C93106096","wikidata":"https://www.wikidata.org/wiki/Q17125820","display_name":"Ion beam deposition","level":4,"score":0.5254237651824951},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.4776231646537781},{"id":"https://openalex.org/C151637689","wikidata":"https://www.wikidata.org/wiki/Q5318064","display_name":"Dwell time","level":2,"score":0.4517313241958618},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.4507753849029541},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.28898632526397705},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1953316330909729},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.17382675409317017},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C70410870","wikidata":"https://www.wikidata.org/wiki/Q199906","display_name":"Clinical psychology","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.586028","doi":"https://doi.org/10.1116/1.586028","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.586028","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1964461291","https://openalex.org/W1995083482","https://openalex.org/W2363043100","https://openalex.org/W2098845319","https://openalex.org/W2092794164","https://openalex.org/W2069648117","https://openalex.org/W2023403804","https://openalex.org/W1817495804","https://openalex.org/W2021923849","https://openalex.org/W2035757541"],"abstract_inverted_index":{"Focused":[0],"ion":[1],"beam":[2,25,52],"induced":[3],"deposition":[4,79],"of":[5,11,26,31,51,65,87,99,105,115,129],"platinum":[6,14],"films":[7,95,116,124],"from":[8],"a":[9,22,38,49],"gas":[10,55],"methylcyclopentadienyl":[12],"trimethyl":[13],"is":[15,110,125],"reported.":[16],"Deposition":[17],"was":[18,35],"carried":[19,80],"out":[20,81],"with":[21,28],"25":[23],"kV":[24],"Ga+":[27],"current":[29,53],"densities":[30],"2\u20137":[32],"A/cm2":[33],"that":[34,93,128],"controlled":[36],"by":[37],"digital":[39],"scan":[40,57],"generator.":[41],"Film":[42],"yields":[43,64],"and":[44,59,68],"resistivity":[45],"were":[46,76,96],"measured":[47,77],"as":[48,70,72],"function":[50],"density,":[54],"flux,":[56],"dwell,":[58],"loop":[60],"time.":[61],"Relatively":[62],"high":[63],"1.4":[66],"\u03bcm3/nC":[67],"resistivities":[69],"low":[71],"400":[73],"\u03bc\u03a9":[74],"cm":[75],"for":[78,118,121],"in":[82],"1\u00d710\u22126":[83],"Torr":[84],"background":[85],"pressure":[86],"residual":[88],"gas.":[89],"Auger":[90],"studies":[91],"revealed":[92],"the":[94,122],"surprisingly":[97],"free":[98],"oxygen,":[100],"but":[101],"contained":[102],"significant":[103],"amounts":[104],"carbon.":[106],"A":[107],"figure-of-merit,":[108],"Fm=\u03c1/Y,":[109],"defined":[111],"which":[112],"enables":[113],"comparison":[114],"used":[117],"interconnects.":[119],"Fm":[120],"Pt":[123],"superior":[126],"to":[127],"W(CO)6":[130],"deposited":[131],"W":[132],"films.":[133]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":3},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":5}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}