{"id":"https://openalex.org/W2040697409","doi":"https://doi.org/10.1088/0963-0252/15/4/024","title":"Spatial characterization of Ar\u2013Ti plasma in a magnetron sputtering system using emission and absorption spectroscopy","display_name":"Spatial characterization of Ar\u2013Ti plasma in a magnetron sputtering system using emission and absorption spectroscopy","publication_year":2006,"publication_date":"2006-09-01","ids":{"openalex":"https://openalex.org/W2040697409","doi":"https://doi.org/10.1088/0963-0252/15/4/024","mag":"2040697409"},"language":"en","primary_location":{"id":"doi:10.1088/0963-0252/15/4/024","doi":"https://doi.org/10.1088/0963-0252/15/4/024","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0963-0252/15/4/024","pdf_url":null,"source":{"id":"https://openalex.org/S57082650","display_name":"Plasma Sources Science and Technology","issn_l":"0963-0252","issn":["0963-0252","1361-6595"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Plasma Sources Science and Technology","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W2040697409"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016510735","display_name":"Nikolay V. Britun","orcid":"https://orcid.org/0000-0003-4488-8016","observed_orcids":["https://orcid.org/0000-0003-4488-8016"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"N Britun","raw_affiliation_strings":["CAPST (South Korea)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CAPST (South Korea)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030407612","display_name":"Mireille Gaillard","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M Gaillard","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035278114","display_name":"Laurent Schwaederl\u00e9","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"L Schwaederl\u00e9","raw_affiliation_strings":["CAPST - Center for Advanced Plasma Surface Technology (Sung Kyun Kwan University, 300 Chun-Chun-Dong Jangan-gu, Suwon 440-746, Korea - South Korea)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CAPST - Center for Advanced Plasma Surface Technology (Sung Kyun Kwan University, 300 Chun-Chun-Dong Jangan-gu, Suwon 440-746, Korea - South Korea)","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006342195","display_name":"Y M Kim","orcid":"https://orcid.org/0009-0004-6001-7952","observed_orcids":["https://orcid.org/0009-0004-6001-7952"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Y M Kim","raw_affiliation_strings":["CAPST (South Korea)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CAPST (South Korea)","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5021484419","display_name":"Jung\u2010Hoon Han","orcid":"https://orcid.org/0000-0002-2048-6736","observed_orcids":["https://orcid.org/0000-0002-2048-6736"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J G Han","raw_affiliation_strings":["CAPST (South Korea)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CAPST (South Korea)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":0.9705,"has_fulltext":false,"cited_by_count":19,"citation_normalized_percentile":{"value":0.75778239,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":97},"biblio":{"volume":"15","issue":"4","first_page":"790","last_page":"796"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.98580002784729,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.98580002784729,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.008799999952316284,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11854","display_name":"Laser-induced spectroscopy and plasma","score":0.0017000000225380063,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/titanium-sputtering","display_name":"titanium sputtering","score":0.8100000023841858},{"id":"https://openalex.org/keywords/magnetron-sputtering","display_name":"magnetron sputtering","score":0.875},{"id":"https://openalex.org/keywords/optical-emission-spectroscopy","display_name":"optical emission spectroscopy","score":0.9089999794960022},{"id":"https://openalex.org/keywords/optical-absorption-spectroscopy","display_name":"optical absorption spectroscopy","score":0.9210000038146973},{"id":"https://openalex.org/keywords/working-pressure","display_name":"working pressure","score":0.48100000619888306},{"id":"https://openalex.org/keywords/planar-magnetron","display_name":"planar magnetron","score":0.734000027179718},{"id":"https://openalex.org/keywords/titanium-target","display_name":"titanium target","score":0.3449999988079071}],"concepts":[{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.6854864358901978},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.6398758292198181},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6150417923927307},{"id":"https://openalex.org/C32891209","wikidata":"https://www.wikidata.org/wiki/Q483666","display_name":"Spectroscopy","level":2,"score":0.6075224280357361},{"id":"https://openalex.org/C125287762","wikidata":"https://www.wikidata.org/wiki/Q1758948","display_name":"Absorption (acoustics)","level":2,"score":0.6055279970169067},{"id":"https://openalex.org/C119824511","wikidata":"https://www.wikidata.org/wiki/Q13553575","display_name":"Absorption spectroscopy","level":2,"score":0.5639760494232178},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.5611845254898071},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5286985635757446},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.46528759598731995},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.4376775026321411},{"id":"https://openalex.org/C96141758","wikidata":"https://www.wikidata.org/wiki/Q216817","display_name":"Emission spectrum","level":3,"score":0.415319561958313},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.27897846698760986},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.26484477519989014},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.1861199140548706},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1314910352230072},{"id":"https://openalex.org/C4839761","wikidata":"https://www.wikidata.org/wiki/Q212111","display_name":"Spectral line","level":2,"score":0.10109618306159973},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09006062150001526},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.06850424408912659},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1088/0963-0252/15/4/024","doi":"https://doi.org/10.1088/0963-0252/15/4/024","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0963-0252/15/4/024","pdf_url":null,"source":{"id":"https://openalex.org/S57082650","display_name":"Plasma Sources Science and Technology","issn_l":"0963-0252","issn":["0963-0252","1361-6595"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Plasma Sources Science and Technology","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-00705268v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-00705268","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Plasma Sources Science and Technology, 2006, 15 (4), pp.790-796. ⟨10.1088/0963-0252/15/4/024⟩","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1977308113","https://openalex.org/W1992075164","https://openalex.org/W1997232426","https://openalex.org/W2015804839","https://openalex.org/W2022787052","https://openalex.org/W2024550733","https://openalex.org/W2087529855","https://openalex.org/W2094970744","https://openalex.org/W2123348232","https://openalex.org/W2915645029","https://openalex.org/W4300338959"],"related_works":["https://openalex.org/W1974447498","https://openalex.org/W2006989368","https://openalex.org/W2082724478","https://openalex.org/W2022369090","https://openalex.org/W2320892889","https://openalex.org/W1985516068","https://openalex.org/W2036981396","https://openalex.org/W2093774430","https://openalex.org/W2087635897","https://openalex.org/W2525356965"],"abstract_inverted_index":{"We":[0],"present":[1],"experimental":[2],"results":[3,54],"of":[4,8,22,59,83,134],"the":[5,57,65,68,71,80,84,87,100,103,116,131,138],"spatial":[6],"distribution":[7],"Ar":[9],"and":[10,14,50,102],"Ti":[11,118],"optical":[12,37],"emission":[13,60,125],"absorption":[15,119],"lines":[16,61],"in":[17,27,67,137],"Ar-Ti":[18],"plasma":[19,88],"during":[20],"sputtering":[21],"Ti.":[23],"Measurements":[24],"were":[25],"performed":[26],"a":[28,91,107],"dc":[29],"magnetron":[30,35],"reactor":[31],"with":[32,64,73,90,106],"movable":[33],"planar":[34],"using":[36],"emission/absorption":[38],"spectroscopy.":[39],"A":[40],"study":[41],"was":[42],"made":[43],"for":[44,144],"two":[45,74],"different":[46,75,81],"working":[47],"pressures:":[48],"0.5":[49],"4":[51],"Pa.":[52],"The":[53,124],"show":[55],"that":[56],"intensity":[58,135],"decay":[62,93,109,133,146],"exponentially":[63],"increase":[66],"distance":[69],"from":[70,99,115],"target":[72],"decrements":[76],"which":[77,128],"correspond":[78,129],"to":[79,95,130],"parts":[82],"discharge,":[85],"namely":[86],"region":[89,105],"steep":[92,132],"(up":[94],"about":[96],"1.5":[97],"cm":[98,113],"target)":[101],"'far'":[104],"slow":[108,145],"(more":[110],"than":[111],"2":[112],"away":[114],"target).":[117],"data":[120],"reveal":[121],"similar":[122],"behaviour.":[123],"decrement":[126],"values":[127],"lie":[136],"range":[139],"1.4-3":[140],"cm(-1),":[141],"whereas":[142],"those":[143],"group":[147],"around":[148],"0.3":[149],"cm(-1).":[150]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":3}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2016-06-24T00:00:00"}