{"id":"https://openalex.org/W2040507186","doi":"https://doi.org/10.1021/ie010424h","title":"Prevention of Photoresist Pattern Collapse by Using Liquid Carbon Dioxide","display_name":"Prevention of Photoresist Pattern Collapse by Using Liquid Carbon Dioxide","publication_year":2001,"publication_date":"2001-10-30","ids":{"openalex":"https://openalex.org/W2040507186","doi":"https://doi.org/10.1021/ie010424h","mag":"2040507186"},"language":"en","primary_location":{"id":"doi:10.1021/ie010424h","doi":"https://doi.org/10.1021/ie010424h","is_oa":false,"landing_page_url":"https://doi.org/10.1021/ie010424h","pdf_url":null,"source":{"id":"https://openalex.org/S202680183","display_name":"Industrial & Engineering Chemistry Research","issn_l":"0888-5885","issn":["0888-5885","1520-5045"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-2","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320006","host_organization_name":"American Chemical Society","host_organization_lineage":["https://openalex.org/P4310320006"],"host_organization_lineage_names":["American Chemical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Industrial & Engineering Chemistry Research","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041292245","display_name":"Ye Jincao","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I155781252","display_name":"University of South Carolina","ror":"https://ror.org/02b6qw903","country_code":"US","type":"education","lineage":["https://openalex.org/I155781252"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ye Jincao","raw_affiliation_strings":["Department of Chemical Engineering, University of South Carolina, 300 Main Street, Columbia, South Carolina 29208"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Chemical Engineering, University of South Carolina, 300 Main Street, Columbia, South Carolina 29208","institution_ids":["https://openalex.org/I155781252"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041828792","display_name":"Michael Matthews","orcid":"https://orcid.org/0000-0001-6355-4746","observed_orcids":["https://orcid.org/0000-0001-6355-4746"]},"institutions":[{"id":"https://openalex.org/I155781252","display_name":"University of South Carolina","ror":"https://ror.org/02b6qw903","country_code":"US","type":"education","lineage":["https://openalex.org/I155781252"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Michael A. Matthews","raw_affiliation_strings":["Department of Chemical Engineering, University of South Carolina, 300 Main Street, Columbia, South Carolina 29208"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Chemical Engineering, University of South Carolina, 300 Main Street, Columbia, South Carolina 29208","institution_ids":["https://openalex.org/I155781252"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5008539485","display_name":"Charles H. Darvin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1302368450","display_name":"Environmental Protection Agency","ror":"https://ror.org/03tns0030","country_code":"US","type":"government","lineage":["https://openalex.org/I1302368450"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Charles H. Darvin","raw_affiliation_strings":["Office of Research and Development, Air Pollution Prevention and Control Division, U.S. Environmental Protection Agency, Research Triangle Park, North Carolina 27711"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Office of Research and Development, Air Pollution Prevention and Control Division, U.S. Environmental Protection Agency, Research Triangle Park, North Carolina 27711","institution_ids":["https://openalex.org/I1302368450"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":4500,"currency":"USD","value_usd":4500},"apc_paid":null,"fwci":2.0035,"has_fulltext":false,"cited_by_count":25,"citation_normalized_percentile":{"value":0.85717764,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"40","issue":"24","first_page":"5858","last_page":"5860"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.00279999990016222,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10402","display_name":"Phase Equilibria and Thermodynamics","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/1606","display_name":"Physical and Theoretical Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/liquid-carbon-dioxide","display_name":"liquid carbon dioxide","score":0.9750000238418579},{"id":"https://openalex.org/keywords/environmentally-friendly-solvents","display_name":"environmentally friendly solvents","score":0.8240000009536743}],"concepts":[{"id":"https://openalex.org/C134406635","wikidata":"https://www.wikidata.org/wiki/Q1439684","display_name":"Photoresist","level":3,"score":0.9381872415542603},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.9159165620803833},{"id":"https://openalex.org/C8892853","wikidata":"https://www.wikidata.org/wiki/Q170749","display_name":"Surface tension","level":2,"score":0.6726713180541992},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6079463958740234},{"id":"https://openalex.org/C530467964","wikidata":"https://www.wikidata.org/wiki/Q1997","display_name":"Carbon dioxide","level":2,"score":0.5981354713439941},{"id":"https://openalex.org/C2780471494","wikidata":"https://www.wikidata.org/wiki/Q146505","display_name":"Solvent","level":2,"score":0.5876383185386658},{"id":"https://openalex.org/C184651966","wikidata":"https://www.wikidata.org/wiki/Q906356","display_name":"Aqueous solution","level":2,"score":0.507225751876831},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.4965255856513977},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.4340037405490875},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.427713006734848},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.34440577030181885},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2701573967933655},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.1522296965122223},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.08241766691207886},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06006532907485962},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1021/ie010424h","doi":"https://doi.org/10.1021/ie010424h","is_oa":false,"landing_page_url":"https://doi.org/10.1021/ie010424h","pdf_url":null,"source":{"id":"https://openalex.org/S202680183","display_name":"Industrial & Engineering Chemistry Research","issn_l":"0888-5885","issn":["0888-5885","1520-5045"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-2","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320006","host_organization_name":"American Chemical Society","host_organization_lineage":["https://openalex.org/P4310320006"],"host_organization_lineage_names":["American Chemical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Industrial & Engineering Chemistry Research","raw_type":"journal-article"},{"id":"pmh:oai:scholarcommons.sc.edu:eche_facpub-1244","doi":null,"is_oa":false,"landing_page_url":"https://scholarcommons.sc.edu/eche_facpub/268","pdf_url":null,"source":{"id":"https://openalex.org/S4377196354","display_name":"Scholar Commons (University of South Carolina)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I155781252","host_organization_name":"University of South Carolina","host_organization_lineage":["https://openalex.org/I155781252"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Faculty Publications","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306107","display_name":"U.S. Environmental Protection Agency","ror":"https://ror.org/03tns0030"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2007862943","https://openalex.org/W2035656515","https://openalex.org/W2132656669"],"related_works":["https://openalex.org/W2032507736","https://openalex.org/W2073957517","https://openalex.org/W1999039913","https://openalex.org/W2014880400","https://openalex.org/W1991255622","https://openalex.org/W2037772476","https://openalex.org/W2054130612","https://openalex.org/W1971478116","https://openalex.org/W2038739036","https://openalex.org/W2071414888"],"abstract_inverted_index":{"Photoresist":[0],"polymers":[1],"with":[2,9],"high":[3,13],"aspect":[4,14],"ratios":[5],"are":[6],"presently":[7],"cleaned":[8],"aqueous":[10],"solutions.":[11],"For":[12],"ratios,":[15],"the":[16,20,30,34,43,65,70,74,85,99,102,106,110,125],"pattern":[17,27,68,76,88,127],"collapses":[18],"during":[19],"drying":[21],"step.":[22],"The":[23,113],"origin":[24],"of":[25,33,45,67,73,101,109,115],"resist":[26,111,126],"collapse":[28,128],"is":[29],"surface":[31],"tension":[32],"rinse":[35,103,120],"liquid.":[36],"Following":[37],"a":[38,46,60,119],"theoretical":[39],"model,":[40],"we":[41],"present":[42],"results":[44],"preliminary":[47],"analysis":[48],"on":[49,98],"using":[50],"environmentally":[51],"benign":[52],"liquid":[53,104,121],"carbon":[54],"dioxide":[55],"(CO":[56],"2":[57,117],")":[58,80],"as":[59,118],"cleaning":[61],"solvent.":[62],"To":[63],"avoid":[64],"likelihood":[66],"collapse,":[69],"relative":[71],"size":[72],"actual":[75],"spacing":[77,89],"(":[78,90],"S":[79],"should":[81,122],"be":[82,95],"larger":[83],"than":[84],"minimum":[86],"allowable":[87],"d":[91],"),":[92],"which":[93],"can":[94],"calculated":[96],"based":[97],"properties":[100,108],"and":[105],"mechanical":[107],"material.":[112],"use":[114],"CO":[116],"help":[123],"prevent":[124],"problem.":[129]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":3}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}