{"id":"https://openalex.org/W2039808784","doi":"https://doi.org/10.1109/esime.2012.6191704","title":"PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling","display_name":"PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling","publication_year":2012,"publication_date":"2012-04-01","ids":{"openalex":"https://openalex.org/W2039808784","doi":"https://doi.org/10.1109/esime.2012.6191704","mag":"2039808784"},"language":"en","primary_location":{"id":"doi:10.1109/esime.2012.6191704","doi":"https://doi.org/10.1109/esime.2012.6191704","is_oa":false,"landing_page_url":"https://doi.org/10.1109/esime.2012.6191704","pdf_url":null,"source":{"id":"https://openalex.org/S4306510181","display_name":"International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041972038","display_name":"Fabrice Casset","orcid":"https://orcid.org/0000-0003-0153-9684","observed_orcids":["https://orcid.org/0000-0003-0153-9684"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"F. Casset","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069766189","display_name":"M. Cueff","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Cueff","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027688426","display_name":"Aurelien Suhm","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Suhm","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017816857","display_name":"G. Le Rhun","orcid":"https://orcid.org/0000-0002-4373-0041","observed_orcids":["https://orcid.org/0000-0002-4373-0041"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Le Rhun","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028394488","display_name":"J. Abergel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Abergel","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076301967","display_name":"M. Allain","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Allain","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028974336","display_name":"C. Dieppedale","orcid":"https://orcid.org/0000-0003-3373-1494","observed_orcids":["https://orcid.org/0000-0003-3373-1494"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Dieppedale","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110253486","display_name":"Thibault Ricart","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"T. Ricart","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035551755","display_name":"S. Fanget","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. Fanget","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108222962","display_name":"P. Renaux","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Renaux","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056684621","display_name":"D. Faralli","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"D. Faralli","raw_affiliation_strings":["STMICROELECTRONICS,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMICROELECTRONICS,Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023180655","display_name":"P. Ancey","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Ancey","raw_affiliation_strings":["STMicroelectronics - 850 rue Jean Monnet 38926 Crolles, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics - 850 rue Jean Monnet 38926 Crolles, FRANCE","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007302018","display_name":"A. Devos","orcid":"https://orcid.org/0000-0002-1572-9131","observed_orcids":["https://orcid.org/0000-0002-1572-9131"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I3132279224","display_name":"Institut Sup\u00e9rieur de l'\u00c9lectronique et du Num\u00e9rique","ror":"https://ror.org/017h2rd72","country_code":"FR","type":"education","lineage":["https://openalex.org/I3132279224"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Devos","raw_affiliation_strings":["IEMN/ISEN-CNRS 8520, Av. Poincar\u00e9, 59652, Lille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IEMN/ISEN-CNRS 8520, Av. Poincar\u00e9, 59652, Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I3132279224","https://openalex.org/I4210123471"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5034373348","display_name":"Emmanuel Defa\u00ff","orcid":"https://orcid.org/0000-0003-1462-8969","observed_orcids":["https://orcid.org/0000-0003-1462-8969"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"E. Defay","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":5.7911,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.95348259,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1/4","last_page":"4/4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9345999956130981,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9345999956130981,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.04690000042319298,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators","score":0.009999999776482582,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pzt-thin-films","display_name":"PZT thin films","score":0.9440000057220459},{"id":"https://openalex.org/keywords/piezoelectric-coefficient-d31","display_name":"piezoelectric coefficient d31","score":0.9039999842643738},{"id":"https://openalex.org/keywords/microcantilever","display_name":"microcantilever","score":0.8259999752044678},{"id":"https://openalex.org/keywords/resonant-frequency","display_name":"resonant frequency","score":0.652999997138977},{"id":"https://openalex.org/keywords/cantilever-length","display_name":"cantilever length","score":0.7260000109672546},{"id":"https://openalex.org/keywords/displacement-amplitude","display_name":"displacement amplitude","score":0.8180000185966492},{"id":"https://openalex.org/keywords/piezoelectric-actuation","display_name":"piezoelectric actuation","score":0.7609999775886536},{"id":"https://openalex.org/keywords/piezoelectric-modeling","display_name":"piezoelectric modeling","score":0.6940000057220459}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9030104875564575},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.792996883392334},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7567722797393799},{"id":"https://openalex.org/C135405054","wikidata":"https://www.wikidata.org/wiki/Q7193131","display_name":"Piezoelectric coefficient","level":3,"score":0.7075248956680298},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.6602438688278198},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5929989814758301},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.5651309490203857},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5264863967895508},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5096786022186279},{"id":"https://openalex.org/C2781089630","wikidata":"https://www.wikidata.org/wiki/Q21856745","display_name":"Realization (probability)","level":2,"score":0.49525323510169983},{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.47379180788993835},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3418583869934082},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3096941113471985},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.21259832382202148},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1358579695224762},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12691697478294373},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08077007532119751},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.066690593957901},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/esime.2012.6191704","doi":"https://doi.org/10.1109/esime.2012.6191704","is_oa":false,"landing_page_url":"https://doi.org/10.1109/esime.2012.6191704","pdf_url":null,"source":{"id":"https://openalex.org/S4306510181","display_name":"International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-00801130v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-00801130","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"13th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2012, 2012, Cascais, Portugal. pp.1-4, ⟨10.1109/ESimE.2012.6191704⟩","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W573943996","https://openalex.org/W578687668","https://openalex.org/W2026004457","https://openalex.org/W2051974379","https://openalex.org/W2075436688","https://openalex.org/W2139689957","https://openalex.org/W2169938586","https://openalex.org/W2193401856"],"related_works":["https://openalex.org/W2375699408","https://openalex.org/W4248161435","https://openalex.org/W1989191689","https://openalex.org/W2154722934","https://openalex.org/W2079767288","https://openalex.org/W2063937924","https://openalex.org/W1964888118","https://openalex.org/W2176518890","https://openalex.org/W2221986026","https://openalex.org/W2023703083"],"abstract_inverted_index":{"In":[0],"this":[1,29],"paper,":[2],"we":[3,47],"showed":[4],"the":[5,8,17,25,33,36,39,62,82],"realization":[6],"and":[7,16,31,35],"characterization":[9],"of":[10,19,38],"a":[11,44],"PZT-actuated":[12],"micro-cantilever.":[13],"The":[14],"measurement":[15,34],"modeling":[18,37],"its":[20],"resonant":[21],"frequency":[22],"allow":[23],"deducing":[24],"cantilever":[26,40],"length.":[27],"Using":[28],"value":[30],"combining":[32],"displacement":[41],"amplitude":[42],"at":[43],"given":[45],"voltage,":[46],"extract":[48],"PZT":[49,68],"d":[50,76],"31":[51,77],"piezoelectric":[53],"coefficient":[54],"as":[55],"being":[56],"165\u00b125":[57],"pm/V;":[58],"which":[59],"is":[60,72,79],"among":[61],"highest":[63],"values":[64],"ever":[65],"published":[66],"for":[67],"thin":[69],"films.":[70],"It":[71],"worth":[73],"noting":[74],"that":[75],"homogenous":[80],"throughout":[81],"whole":[83],"200mm":[84],"wafer.":[85]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}