{"id":"https://openalex.org/W2038024371","doi":"https://doi.org/10.1016/0250-6874(89)80006-x","title":"Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)","display_name":"Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)","publication_year":1989,"publication_date":"1989-01-01","ids":{"openalex":"https://openalex.org/W2038024371","doi":"https://doi.org/10.1016/0250-6874(89)80006-x","mag":"2038024371"},"language":"en","primary_location":{"id":"doi:10.1016/0250-6874(89)80006-x","doi":"https://doi.org/10.1016/0250-6874(89)80006-x","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0250-6874(89)80006-x","pdf_url":null,"source":{"id":"https://openalex.org/S73278439","display_name":"Sensors and Actuators","issn_l":"0250-6874","issn":["0250-6874","1873-3050"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors and Actuators","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5084077761","display_name":"Y. Lind\u00e9n","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I123387679","display_name":"Uppsala University","ror":"https://ror.org/048a87296","country_code":"SE","type":"education","lineage":["https://openalex.org/I123387679"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Y. Lind\u00e9n","raw_affiliation_strings":["Electronics Department, Institute of Technology, Uppsala University, Box 534, S-751 21 Uppsala Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronics Department, Institute of Technology, Uppsala University, Box 534, S-751 21 Uppsala Sweden","institution_ids":["https://openalex.org/I123387679"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021740955","display_name":"Lars Tenerz","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I123387679","display_name":"Uppsala University","ror":"https://ror.org/048a87296","country_code":"SE","type":"education","lineage":["https://openalex.org/I123387679"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"L. Tenerz","raw_affiliation_strings":["Electronics Department, Institute of Technology, Uppsala University, Box 534, S-751 21 Uppsala Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronics Department, Institute of Technology, Uppsala University, Box 534, S-751 21 Uppsala Sweden","institution_ids":["https://openalex.org/I123387679"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080201256","display_name":"J Tir\u00e9n","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I123387679","display_name":"Uppsala University","ror":"https://ror.org/048a87296","country_code":"SE","type":"education","lineage":["https://openalex.org/I123387679"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"J. Tir\u00e9n","raw_affiliation_strings":["Electronics Department, Institute of Technology, Uppsala University, Box 534, S-751 21 Uppsala Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronics Department, Institute of Technology, Uppsala University, Box 534, S-751 21 Uppsala Sweden","institution_ids":["https://openalex.org/I123387679"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111400346","display_name":"Bertil H\u00f6k","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I123387679","display_name":"Uppsala University","ror":"https://ror.org/048a87296","country_code":"SE","type":"education","lineage":["https://openalex.org/I123387679"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"B. H\u00f6k","raw_affiliation_strings":["Electronics Department, Institute of Technology, Uppsala University, Box 534, S-751 21 Uppsala Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronics Department, Institute of Technology, Uppsala University, Box 534, S-751 21 Uppsala Sweden","institution_ids":["https://openalex.org/I123387679"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I123387679"],"apc_list":null,"apc_paid":null,"fwci":7.555,"has_fulltext":false,"cited_by_count":42,"citation_normalized_percentile":{"value":0.97466562,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":94},"biblio":{"volume":"16","issue":"1-2","first_page":"67","last_page":"82"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-micromachining","display_name":"silicon micromachining","score":0.9309999942779541},{"id":"https://openalex.org/keywords/silicon-detectors","display_name":"silicon detectors","score":0.7960000038146973},{"id":"https://openalex.org/keywords/etch-anisotropy","display_name":"etch anisotropy","score":0.8180000185966492},{"id":"https://openalex.org/keywords/current-voltage-characteristics","display_name":"current-voltage characteristics","score":0.7409999966621399},{"id":"https://openalex.org/keywords/thin-membranes","display_name":"thin membranes","score":0.8050000071525574},{"id":"https://openalex.org/keywords/cantilever-beam","display_name":"cantilever beam","score":0.996999979019165},{"id":"https://openalex.org/keywords/passivation","display_name":"passivation","score":0.6399999856948853}],"concepts":[{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.7199620008468628},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7128652334213257},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6949981451034546},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6776909232139587},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6423152685165405},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.551128089427948},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5472792983055115},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.5048580765724182},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.4873667359352112},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.47896483540534973},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.47762149572372437},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4326171576976776},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.42317214608192444},{"id":"https://openalex.org/C41075158","wikidata":"https://www.wikidata.org/wiki/Q4996485","display_name":"Bulk micromachining","level":5,"score":0.4127081334590912},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/0250-6874(89)80006-x","doi":"https://doi.org/10.1016/0250-6874(89)80006-x","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0250-6874(89)80006-x","pdf_url":null,"source":{"id":"https://openalex.org/S73278439","display_name":"Sensors and Actuators","issn_l":"0250-6874","issn":["0250-6874","1873-3050"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors and Actuators","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1967954878","https://openalex.org/W2002220921","https://openalex.org/W2009400107","https://openalex.org/W2010151677","https://openalex.org/W2052703248","https://openalex.org/W2077511770","https://openalex.org/W2081523598","https://openalex.org/W2137178805","https://openalex.org/W2162121852"],"related_works":["https://openalex.org/W780995283","https://openalex.org/W4239790179","https://openalex.org/W7095984681","https://openalex.org/W2094368312","https://openalex.org/W2092360481","https://openalex.org/W4253312979","https://openalex.org/W2013590185","https://openalex.org/W2000275053","https://openalex.org/W1985857652","https://openalex.org/W7098287390"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}