{"id":"https://openalex.org/W2034412792","doi":"https://doi.org/10.1109/icsict.2014.7021207","title":"10nm FINFET technology for low power and high performance applications","display_name":"10nm FINFET technology for low power and high performance applications","publication_year":2014,"publication_date":"2014-10-01","ids":{"openalex":"https://openalex.org/W2034412792","doi":"https://doi.org/10.1109/icsict.2014.7021207","mag":"2034412792"},"language":"en","primary_location":{"id":"doi:10.1109/icsict.2014.7021207","doi":"https://doi.org/10.1109/icsict.2014.7021207","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsict.2014.7021207","pdf_url":null,"source":{"id":"https://openalex.org/S4306418723","display_name":"IEEE International Conference on Solid-State and Integrated Circuit Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5053443919","display_name":"Dechao Guo","orcid":"https://orcid.org/0000-0003-1727-0798","observed_orcids":["https://orcid.org/0000-0003-1727-0798"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Guo","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110666390","display_name":"Huiling Shang","orcid":"https://orcid.org/0009-0009-8761-1720","observed_orcids":["https://orcid.org/0009-0009-8761-1720"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Shang","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111862933","display_name":"Kang-Ill Seo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"K. Seo","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110987984","display_name":"Bala Haran","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. Haran","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022372139","display_name":"Theodorus E. Standaert","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Standaert","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":null,"display_name":"D. Gupta","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Gupta","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074710112","display_name":"Emre Alptekin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Alptekin","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110066438","display_name":"Dong-il Bae","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"D. Bae","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":null,"display_name":"G. Bae","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"G. Bae","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056657002","display_name":"Daniel Chanemougame","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"D. Chanemougame","raw_affiliation_strings":["STMicroelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102930278","display_name":"Kangguo Cheng","orcid":"https://orcid.org/0000-0002-9196-5013","observed_orcids":["https://orcid.org/0000-0002-9196-5013"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"K. Cheng","raw_affiliation_strings":["Albany Nanotechnology Center, Albany, NY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Albany Nanotechnology Center, Albany, NY","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111520420","display_name":"J. Cho","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Cho","raw_affiliation_strings":["GLOBALFOUNDRIES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040573877","display_name":"Bassem Hamieh","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B. Hamieh","raw_affiliation_strings":["STMicroelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018143807","display_name":"Joon Goo Hong","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"J. Hong","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111917208","display_name":"Terence B. Hook","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Hook","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087873340","display_name":"Jaehoon Jung","orcid":"https://orcid.org/0000-0002-9562-6828","observed_orcids":["https://orcid.org/0000-0002-9562-6828"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"J. Jung","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114151073","display_name":"R. Kambhampati","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Kambhampati","raw_affiliation_strings":["GLOBALFOUNDRIES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068856732","display_name":"B. Kim","orcid":"https://orcid.org/0009-0005-5845-2143","observed_orcids":["https://orcid.org/0009-0005-5845-2143"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"B. Kim","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110595647","display_name":"H. Kim","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Kim","raw_affiliation_strings":["GLOBALFOUNDRIES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065828999","display_name":"Kyu Hong Kim","orcid":"https://orcid.org/0000-0002-5027-4881","observed_orcids":["https://orcid.org/0000-0002-5027-4881"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. Kim","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100657827","display_name":"Taekyung Kim","orcid":"https://orcid.org/0000-0001-7632-8756","observed_orcids":["https://orcid.org/0000-0001-7632-8756"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"T. Kim","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038699040","display_name":"D. Liu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Liu","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028218873","display_name":"H. Mallela","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Mallela","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091170560","display_name":"Pietro Montanini","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Montanini","raw_affiliation_strings":["STMicroelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010648453","display_name":"M. Mottura","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Mottura","raw_affiliation_strings":["STMicroelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057890470","display_name":"S.M. Nam","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"S. Nam","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091478170","display_name":"Kang Min Ok","orcid":"https://orcid.org/0000-0002-7195-9089","observed_orcids":["https://orcid.org/0000-0002-7195-9089"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"I. Ok","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001687095","display_name":"Young-Shin Park","orcid":"https://orcid.org/0000-0002-9291-2706","observed_orcids":["https://orcid.org/0000-0002-9291-2706"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Y. Park","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010061726","display_name":"Ajoy Paul","orcid":"https://orcid.org/0000-0003-4063-5919","observed_orcids":["https://orcid.org/0000-0003-4063-5919"]},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Paul","raw_affiliation_strings":["GLOBALFOUNDRIES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109132032","display_name":"Chris Prindle","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Prindle","raw_affiliation_strings":["GLOBALFOUNDRIES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":null,"display_name":"R. Ramachandran","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Ramachandran","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051181201","display_name":"Vinayak Sardesai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"V. Sardesai","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027300071","display_name":"A. Scholze","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Scholze","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073548687","display_name":"Soon\u2010Cheon Seo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Seo","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078561472","display_name":"Richard G. Southwick","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Southwick","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017904114","display_name":"Jay W. Strane","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Strane","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101886784","display_name":"Xiao Ning Sun","orcid":"https://orcid.org/0000-0002-8385-7020","observed_orcids":["https://orcid.org/0000-0002-8385-7020"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"X. Sun","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007807266","display_name":"Gen Tsutsui","orcid":"https://orcid.org/0000-0002-1237-3483","observed_orcids":["https://orcid.org/0000-0002-1237-3483"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"G. Tsutsui","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":null,"display_name":"N. Tripathi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"N. Tripathi","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015010150","display_name":"Reinaldo A. Vega","orcid":"https://orcid.org/0000-0001-6407-0081","observed_orcids":["https://orcid.org/0000-0001-6407-0081"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Vega","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045034369","display_name":"M. Weybright","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Weybright","raw_affiliation_strings":["IBM SRDC, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC, Korea","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090558480","display_name":"Ruijie Xie","orcid":"https://orcid.org/0000-0003-2424-1282","observed_orcids":["https://orcid.org/0000-0003-2424-1282"]},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Xie","raw_affiliation_strings":["GLOBALFOUNDRIES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110266791","display_name":"Chun-Chen Yeh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Yeh","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111192751","display_name":"H. Bu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Bu","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062157709","display_name":"Sean D. Burns","orcid":"https://orcid.org/0000-0002-0144-0863","observed_orcids":["https://orcid.org/0000-0002-0144-0863"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Burns","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010258734","display_name":"D. Canaperi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Canaperi","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087753758","display_name":"M. Celik","orcid":"https://orcid.org/0000-0001-5119-8705","observed_orcids":["https://orcid.org/0000-0001-5119-8705"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Celik","raw_affiliation_strings":["Albany Nanotechnology Center, Albany, NY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Albany Nanotechnology Center, Albany, NY","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003933483","display_name":"Matthew E. Colburn","orcid":"https://orcid.org/0009-0000-7951-0924","observed_orcids":["https://orcid.org/0009-0000-7951-0924"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Colburn","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112527234","display_name":"Hemanth Jagannathan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Jagannathan","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033567098","display_name":"S. Kanakasabaphthy","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Kanakasabaphthy","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066853791","display_name":"Walter Kleemeier","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"W. Kleemeier","raw_affiliation_strings":["STMicroelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073775409","display_name":"Lars W. Liebmann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Liebmann","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086004236","display_name":"D. McHerron","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Mcherron","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028651252","display_name":"Philip J. Oldiges","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"P. Oldiges","raw_affiliation_strings":["IBM SRDC, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC, Korea","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089557626","display_name":"Vamsi K. Paruchuri","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"V. Paruchuri","raw_affiliation_strings":["IBM SRDC, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC, Korea","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088961543","display_name":"Terry A. Spooner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Spooner","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036267166","display_name":"James H. Stathis","orcid":"https://orcid.org/0000-0001-8340-2475","observed_orcids":["https://orcid.org/0000-0001-8340-2475"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Stathis","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070410885","display_name":"Rama Divakaruni","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Divakaruni","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067988101","display_name":"T. R. Gow","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Gow","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088992890","display_name":"John A. Iacoponi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Iacoponi","raw_affiliation_strings":["GLOBALFOUNDRIES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007549891","display_name":"J. Jenq","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Jenq","raw_affiliation_strings":["UMC, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"UMC, Japan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113984490","display_name":"R. Sampson","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"R Sampson","raw_affiliation_strings":["STMicroelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036591884","display_name":"Wonyoung Yang","orcid":"https://orcid.org/0000-0002-2995-4639","observed_orcids":["https://orcid.org/0000-0002-2995-4639","https://orcid.org/0009-0001-9101-2546"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"W. Yang","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"last","author":{"id":null,"display_name":"M. Khare","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Khare","raw_affiliation_strings":["IBM SRDC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC","institution_ids":["https://openalex.org/I1341412227"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.8022,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.60358692,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.8812999725341797,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.8812999725341797,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10363","display_name":"Low-power high-performance VLSI design","score":0.10639999806880951,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.004999999888241291,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos-technology-nodes","display_name":"CMOS technology nodes","score":0.8539999723434448},{"id":"https://openalex.org/keywords/sram-cell","display_name":"SRAM cell","score":0.8080000281333923},{"id":"https://openalex.org/keywords/static-noise-margin","display_name":"static noise margin","score":0.9829999804496765},{"id":"https://openalex.org/keywords/multi-patterning","display_name":"multi-patterning","score":0.8830000162124634},{"id":"https://openalex.org/keywords/self-aligned-process","display_name":"self-aligned process","score":0.6710000038146973},{"id":"https://openalex.org/keywords/random-dopant-fluctuation","display_name":"random dopant fluctuation","score":0.9620000123977661},{"id":"https://openalex.org/keywords/soi-substrate","display_name":"SOI substrate","score":0.640999972820282},{"id":"https://openalex.org/keywords/low-power-vlsi-design","display_name":"low-power VLSI design","score":0.628000020980835}],"concepts":[{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7512539625167847},{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.7447957992553711},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6232707500457764},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5938450694084167},{"id":"https://openalex.org/C68043766","wikidata":"https://www.wikidata.org/wiki/Q267416","display_name":"Static random-access memory","level":2,"score":0.5915292501449585},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5335049629211426},{"id":"https://openalex.org/C179499742","wikidata":"https://www.wikidata.org/wiki/Q1324892","display_name":"Noise margin","level":4,"score":0.5086003541946411},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.5049071907997131},{"id":"https://openalex.org/C2779679103","wikidata":"https://www.wikidata.org/wiki/Q5251805","display_name":"Degradation (telecommunications)","level":2,"score":0.47380250692367554},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4572855830192566},{"id":"https://openalex.org/C2778413303","wikidata":"https://www.wikidata.org/wiki/Q210793","display_name":"MOSFET","level":4,"score":0.45642420649528503},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.456053227186203},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.4355526268482208},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.41922321915626526},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.4159187972545624},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3684784770011902},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.35367822647094727},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.35272613167762756},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.3006996512413025},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2449806034564972},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.2268797755241394},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22507613897323608},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsict.2014.7021207","doi":"https://doi.org/10.1109/icsict.2014.7021207","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsict.2014.7021207","pdf_url":null,"source":{"id":"https://openalex.org/S4306418723","display_name":"IEEE International Conference on Solid-State and Integrated Circuit Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.5378999710083008,"id":"https://metadata.un.org/sdg/9"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2096288219","https://openalex.org/W2526988581","https://openalex.org/W2610866326","https://openalex.org/W2755690115","https://openalex.org/W2787310733","https://openalex.org/W1974338211","https://openalex.org/W2526863509","https://openalex.org/W3213767385","https://openalex.org/W2789915455","https://openalex.org/W7212230667"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"we":[3],"present":[4],"a":[5,49],"10nm":[6],"CMOS":[7],"platform":[8],"technology":[9,36,61],"for":[10],"low":[11],"power":[12],"and":[13,26,40,62],"high":[14],"performance":[15],"applications":[16],"with":[17,48,69],"the":[18,34,89],"tightest":[19],"contacted":[20],"poly":[21],"pitch":[22,28],"(CPP)":[23],"of":[24,29,55],"64nm":[25],"metallization":[27],"48nm":[30],"ever":[31],"reported":[32,47],"in":[33],"FinFET":[35],"on":[37],"both":[38],"bulk":[39],"SOI":[41],"substrates.":[42],"A":[43],"0.053um2SRAM":[44],"bit-cell":[45],"is":[46],"corresponding":[50],"Static":[51],"Noise":[52],"Margin":[53],"(SNM)":[54],"140mV":[56],"at":[57],"0.75V.":[58],"Intensive":[59],"multi-patterning":[60],"various":[63],"self-aligned":[64],"processes":[65],"have":[66],"been":[67,82],"developed":[68],"193i":[70],"lithography":[71],"to":[72,84],"overcome":[73],"optical":[74],"patterning":[75],"limits.":[76],"Multi-workfunction":[77],"(MWF)":[78],"gate":[79],"stack":[80],"has":[81],"enabled":[83],"provide":[85],"Vt":[86],"tunability":[87],"without":[88],"variability":[90],"degradation":[91],"induced":[92],"by":[93],"Random":[94],"Dopant":[95],"Fluctuation":[96],"(RDF)":[97],"from":[98],"channel":[99],"dopants.":[100]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-11-05T12:25:35.769452","created_date":"2016-06-24T00:00:00"}