{"id":"https://openalex.org/W2029397231","doi":"https://doi.org/10.1063/1.2972114","title":"Influence of top surface passivation on bottom-channel hole mobility of ultrathin SiGe- and Ge-on-insulator","display_name":"Influence of top surface passivation on bottom-channel hole mobility of ultrathin SiGe- and Ge-on-insulator","publication_year":2008,"publication_date":"2008-08-18","ids":{"openalex":"https://openalex.org/W2029397231","doi":"https://doi.org/10.1063/1.2972114","mag":"2029397231"},"language":"en","primary_location":{"id":"doi:10.1063/1.2972114","doi":"https://doi.org/10.1063/1.2972114","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.2972114","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111698654","display_name":"Haigui Yang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Haigui Yang","raw_affiliation_strings":["Kyushu University 1 Art, Science and Technology Center for Cooperative Research, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kyushu University 1 Art, Science and Technology Center for Cooperative Research, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079444981","display_name":"Dong Wang","orcid":"https://orcid.org/0000-0003-0634-953X","observed_orcids":["https://orcid.org/0000-0003-0634-953X","https://orcid.org/0000-0002-7268-3483"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Dong Wang","raw_affiliation_strings":["Kyushu University 1 Art, Science and Technology Center for Cooperative Research, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kyushu University 1 Art, Science and Technology Center for Cooperative Research, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103046524","display_name":"Hiroshi Nakashima","orcid":"https://orcid.org/0000-0002-3551-391X","observed_orcids":["https://orcid.org/0000-0002-3551-391X"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroshi Nakashima","raw_affiliation_strings":["Kyushu University 1 Art, Science and Technology Center for Cooperative Research, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kyushu University 1 Art, Science and Technology Center for Cooperative Research, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]},{"raw_affiliation_string":"Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100877031","display_name":"Hongye Gao","orcid":"https://orcid.org/0009-0007-4069-3963","observed_orcids":["https://orcid.org/0009-0007-4069-3963","https://orcid.org/0009-0008-2953-7596"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hongye Gao","raw_affiliation_strings":["Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004942910","display_name":"Kana Hirayama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kana Hirayama","raw_affiliation_strings":["Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030892617","display_name":"Ken\u2010ichi Ikeda","orcid":"https://orcid.org/0000-0003-0845-8457","observed_orcids":["https://orcid.org/0000-0003-0845-8457"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ken-ichi Ikeda","raw_affiliation_strings":["Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044134729","display_name":"Satoshi Hata","orcid":"https://orcid.org/0000-0001-6030-8363","observed_orcids":["https://orcid.org/0000-0001-6030-8363"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Satoshi Hata","raw_affiliation_strings":["Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113554801","display_name":"Hideharu Nakashima","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hideharu Nakashima","raw_affiliation_strings":["Kyushu University 1 Art, Science and Technology Center for Cooperative Research, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kyushu University 1 Art, Science and Technology Center for Cooperative Research, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]},{"raw_affiliation_string":"Kyushu University 2 Interdisciplinary Graduate School of Engineering Sciences, , 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan","institution_ids":["https://openalex.org/I135598925"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I135598925"],"apc_list":null,"apc_paid":null,"fwci":3.5119,"has_fulltext":false,"cited_by_count":27,"citation_normalized_percentile":{"value":0.91907539,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"93","issue":"7","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.6693999767303467,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.6693999767303467,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.29589998722076416,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.006599999964237213,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sige-on-insulator","display_name":"SiGe-on-insulator","score":0.9380000233650208},{"id":"https://openalex.org/keywords/ge-on-insulator","display_name":"Ge-on-insulator","score":0.9980000257492065},{"id":"https://openalex.org/keywords/ultrathin-layers","display_name":"ultrathin layers","score":0.7649999856948853},{"id":"https://openalex.org/keywords/sio2-passivation-layer","display_name":"SiO2 passivation layer","score":0.7900000214576721},{"id":"https://openalex.org/keywords/mobility-degradation","display_name":"mobility degradation","score":0.878000020980835},{"id":"https://openalex.org/keywords/dry-oxidation","display_name":"dry oxidation","score":0.5830000042915344},{"id":"https://openalex.org/keywords/ge-condensation","display_name":"Ge condensation","score":0.7799999713897705},{"id":"https://openalex.org/keywords/channel-mobility","display_name":"channel mobility","score":0.527999997138977}],"concepts":[{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.9621737003326416},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.760049045085907},{"id":"https://openalex.org/C106782819","wikidata":"https://www.wikidata.org/wiki/Q6501076","display_name":"Electron mobility","level":2,"score":0.6331852674484253},{"id":"https://openalex.org/C212702","wikidata":"https://www.wikidata.org/wiki/Q178150","display_name":"Insulator (electricity)","level":2,"score":0.629224956035614},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5989993810653687},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4736253619194031},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.46992290019989014},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4677942395210266},{"id":"https://openalex.org/C145598152","wikidata":"https://www.wikidata.org/wiki/Q176097","display_name":"Field-effect transistor","level":4,"score":0.4611167907714844},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.45007967948913574},{"id":"https://openalex.org/C550623735","wikidata":"https://www.wikidata.org/wiki/Q867","display_name":"Germanium","level":3,"score":0.44896554946899414},{"id":"https://openalex.org/C544153396","wikidata":"https://www.wikidata.org/wiki/Q11426","display_name":"Metal","level":2,"score":0.4103519320487976},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.27488142251968384},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.1728581190109253},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.1698799431324005},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1550351083278656},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.2972114","doi":"https://doi.org/10.1063/1.2972114","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.2972114","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W2013137617","https://openalex.org/W2076051440","https://openalex.org/W2080890525","https://openalex.org/W2086224603","https://openalex.org/W2086239803","https://openalex.org/W2093592974","https://openalex.org/W2111229602","https://openalex.org/W2119951441","https://openalex.org/W2136538126","https://openalex.org/W2138406861","https://openalex.org/W2140182689","https://openalex.org/W2168019427"],"related_works":["https://openalex.org/W7066633480","https://openalex.org/W2151226468","https://openalex.org/W2056438304","https://openalex.org/W2490395472","https://openalex.org/W2912264807","https://openalex.org/W2013617720","https://openalex.org/W2904425220","https://openalex.org/W2171743727","https://openalex.org/W2076051440","https://openalex.org/W2540496656"],"abstract_inverted_index":{"Bottom-channel":[0],"hole":[1,47],"mobility":[2,97],"was":[3,51],"examined":[4],"by":[5,24],"a":[6,33,66,95],"pseudo-metal-oxide-semiconductor":[7],"field-effect":[8],"transistors":[9],"method":[10],"for":[11],"ultrathin":[12,55],"SiGe-on-insulator":[13],"(SGOI)":[14],"and":[15,31,61],"Ge-on-insulator":[16],"(GOI),":[17],"which":[18,75],"were":[19],"fabricated":[20],"using":[21],"Ge":[22],"condensation":[23],"dry":[25],"oxidation.":[26],"By":[27],"comparing":[28],"samples":[29],"with":[30,65,92],"without":[32,58],"top":[34,42,59,79],"SiO2":[35,60],"layer,":[36,74],"we":[37],"investigated":[38],"the":[39,69,72],"influence":[40],"of":[41,71,99],"surface":[43,80],"passivation":[44,81,93],"on":[45],"bottom-channel":[46],"mobility.":[48,88],"Mobility":[49],"degradation":[50],"found":[52],"in":[53,68],"an":[54],"SGOI/GOI":[56,73],"layer":[57],"became":[62],"more":[63],"serious":[64],"decrease":[67],"thickness":[70],"strongly":[76],"suggested":[77],"that":[78],"is":[82],"necessary":[83],"to":[84],"evaluate":[85],"accurate":[86],"channel":[87],"A":[89],"13-nm-thick":[90],"GOI":[91],"showed":[94],"high":[96],"value":[98],"440":[100],"cm2/V":[101],"s.":[102]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2015,"cited_by_count":5},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":3}],"updated_date":"2026-11-05T12:25:35.769452","created_date":"2016-06-24T00:00:00"}