{"id":"https://openalex.org/W2028082278","doi":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","title":"Study on Mechanical Polishing for CVD Diamond Films of Forming Nucleus Surface and Growing Surface","display_name":"Study on Mechanical Polishing for CVD Diamond Films of Forming Nucleus Surface and Growing Surface","publication_year":2007,"publication_date":"2007-11-01","ids":{"openalex":"https://openalex.org/W2028082278","doi":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","mag":"2028082278"},"language":"en","primary_location":{"id":"doi:10.4028/www.scientific.net/kem.359-360.285","doi":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5082640407","display_name":"Rong Fa Chen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I9842412","display_name":"Nanjing University of Aeronautics and Astronautics","ror":"https://ror.org/01scyh794","country_code":"CN","type":"education","lineage":["https://openalex.org/I9842412"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rong Fa Chen","raw_affiliation_strings":["Nanjing University of Aeronautics and Astronautics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Aeronautics and Astronautics","institution_ids":["https://openalex.org/I9842412"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110074569","display_name":"Dun Wen Zuo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I9842412","display_name":"Nanjing University of Aeronautics and Astronautics","ror":"https://ror.org/01scyh794","country_code":"CN","type":"education","lineage":["https://openalex.org/I9842412"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dun Wen Zuo","raw_affiliation_strings":["Nanjing University of Aeronautics and Astronautics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Aeronautics and Astronautics","institution_ids":["https://openalex.org/I9842412"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110559285","display_name":"Wenzhuang Lu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I9842412","display_name":"Nanjing University of Aeronautics and Astronautics","ror":"https://ror.org/01scyh794","country_code":"CN","type":"education","lineage":["https://openalex.org/I9842412"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wen Zhuang Lu","raw_affiliation_strings":["Nanjing University of Aeronautics and Astronautics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Aeronautics and Astronautics","institution_ids":["https://openalex.org/I9842412"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061816200","display_name":"Duo Sheng Li","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I9842412","display_name":"Nanjing University of Aeronautics and Astronautics","ror":"https://ror.org/01scyh794","country_code":"CN","type":"education","lineage":["https://openalex.org/I9842412"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Duo Sheng Li","raw_affiliation_strings":["Nanjing University of Aeronautics and Astronautics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Aeronautics and Astronautics","institution_ids":["https://openalex.org/I9842412"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060412775","display_name":"Feng Hua Xu","orcid":"https://orcid.org/0000-0001-6372-635X","observed_orcids":["https://orcid.org/0000-0001-6372-635X","https://orcid.org/0000-0001-5802-7925"]},"institutions":[{"id":"https://openalex.org/I9842412","display_name":"Nanjing University of Aeronautics and Astronautics","ror":"https://ror.org/01scyh794","country_code":"CN","type":"education","lineage":["https://openalex.org/I9842412"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Feng Xu","raw_affiliation_strings":["Nanjing University of Aeronautics and Astronautics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Aeronautics and Astronautics","institution_ids":["https://openalex.org/I9842412"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Tong Ji","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I9842412","display_name":"Nanjing University of Aeronautics and Astronautics","ror":"https://ror.org/01scyh794","country_code":"CN","type":"education","lineage":["https://openalex.org/I9842412"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tong Ji","raw_affiliation_strings":["Nanjing University of Aeronautics and Astronautics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Aeronautics and Astronautics","institution_ids":["https://openalex.org/I9842412"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101640349","display_name":"Min Wang","orcid":"https://orcid.org/0000-0001-7955-5217","observed_orcids":["https://orcid.org/0000-0001-7955-5217"]},"institutions":[{"id":"https://openalex.org/I9842412","display_name":"Nanjing University of Aeronautics and Astronautics","ror":"https://ror.org/01scyh794","country_code":"CN","type":"education","lineage":["https://openalex.org/I9842412"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Min Wang","raw_affiliation_strings":["Nanjing University of Aeronautics and Astronautics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Aeronautics and Astronautics","institution_ids":["https://openalex.org/I9842412"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I9842412"],"apc_list":null,"apc_paid":null,"fwci":0.4781,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.67307984,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"359-360","issue":null,"first_page":"285","last_page":"289"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mechanical-polishing","display_name":"mechanical polishing","score":0.7559999823570251},{"id":"https://openalex.org/keywords/cvd-diamond-films","display_name":"CVD diamond films","score":0.9160000085830688},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"surface roughness","score":0.9139999747276306},{"id":"https://openalex.org/keywords/material-removal-rate","display_name":"material removal rate","score":0.8849999904632568},{"id":"https://openalex.org/keywords/polishing-force","display_name":"polishing force","score":0.8920000195503235},{"id":"https://openalex.org/keywords/polishing-efficiency","display_name":"polishing efficiency","score":0.5759999752044678}],"concepts":[{"id":"https://openalex.org/C138113353","wikidata":"https://www.wikidata.org/wiki/Q611639","display_name":"Polishing","level":2,"score":0.9294396638870239},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.804649829864502},{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.7107953429222107},{"id":"https://openalex.org/C2780957350","wikidata":"https://www.wikidata.org/wiki/Q372301","display_name":"Abrasive","level":2,"score":0.6548235416412354},{"id":"https://openalex.org/C79261456","wikidata":"https://www.wikidata.org/wiki/Q443756","display_name":"Profilometer","level":3,"score":0.6426712274551392},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.6346675753593445},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.6089261174201965},{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.5619490146636963},{"id":"https://openalex.org/C108649604","wikidata":"https://www.wikidata.org/wiki/Q1065170","display_name":"Full width at half maximum","level":2,"score":0.4904312789440155},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.4741089940071106},{"id":"https://openalex.org/C192191005","wikidata":"https://www.wikidata.org/wiki/Q466491","display_name":"Grain size","level":2,"score":0.4675290584564209},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4565742313861847},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.41951465606689453},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.4110042154788971},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.32509565353393555},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.19190174341201782},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19128236174583435},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.4028/www.scientific.net/kem.359-360.285","doi":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.4028/www.scientific.net/kem.359-360.285","doi":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.359-360.285","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2028499417"],"related_works":["https://openalex.org/W2012193654","https://openalex.org/W2018473518","https://openalex.org/W2038106360","https://openalex.org/W2364890040","https://openalex.org/W2055288296","https://openalex.org/W2081420281","https://openalex.org/W1965449983","https://openalex.org/W2140320257","https://openalex.org/W2012657461","https://openalex.org/W1983638732"],"abstract_inverted_index":{"In":[0,108],"the":[1,37,45,54,60,67,81,92,97,109,113,116,119,145],"present":[2],"work,":[3],"high":[4],"power":[5],"DC":[6],"arc":[7],"plasma":[8],"jet":[9],"chemical":[10],"vapor":[11],"deposition":[12],"(CVD)":[13],"is":[14,42,76,85],"used":[15,142],"to":[16,143],"prepare":[17],"diamond":[18,40,149],"films":[19,150],"with":[20,59],"full":[21],"width":[22],"half":[23],"magnitude":[24],"(FWHM)":[25],"less":[26],"than":[27],"10":[28],"wave":[29],"numbers":[30],"at":[31],"1332":[32],"cm\u22121":[33],"Raman":[34,131],"peak.":[35],"During":[36],"polishing":[38,123,161],"process,":[39],"film":[41],"hold":[43],"against":[44],"stainless":[46],"steel":[47],"holder,":[48],"which":[49],"rotates":[50],"and":[51,72,96,122,135,152,163],"swings":[52],"when":[53],"sample":[55],"comes":[56],"into":[57],"contact":[58],"cast-iron":[61],"plate.":[62],"Average":[63],"surface":[64,71,75,95,103,146],"roughness":[65],"of":[66,91,101,112,115,148,160],"forming":[68,93],"nucleus":[69,94],"polished":[70,74],"growing":[73,102],"560nm,":[77],"90nm":[78],"respectively.":[79],"And":[80],"materials":[82],"removal":[83],"rate":[84],"quite":[86],"different.":[87],"Fine":[88],"crystal":[89,100],"grain":[90],"thick":[98],"column":[99],"are":[104,125],"dominant":[105],"in":[106],"structure.":[107],"meantime,":[110],"effects":[111],"size":[114],"abrasive":[117],"power,":[118],"applied":[120],"force":[121],"direction":[124],"also":[126],"discussed.":[127],"A":[128],"profilometer,":[129],"an":[130],"spectroscopy,":[132],"X-ray":[133],"diffraction":[134],"a":[136,164],"scanning":[137],"electron":[138],"microscope":[139],"have":[140],"been":[141],"evaluate":[144],"states":[147],"before":[151],"after":[153],"polishing.":[154],"This":[155],"result":[156],"reveals":[157],"an.":[158],"improvement":[159],"efficiency":[162],"great":[165],"potential":[166],"for":[167],"commercial":[168],"application.":[169]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2013,"cited_by_count":3}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}