{"id":"https://openalex.org/W2025908440","doi":"https://doi.org/10.1116/1.3664762","title":"Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks","display_name":"Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks","publication_year":2011,"publication_date":"2011-12-05","ids":{"openalex":"https://openalex.org/W2025908440","doi":"https://doi.org/10.1116/1.3664762","mag":"2025908440"},"language":"en","primary_location":{"id":"doi:10.1116/1.3664762","doi":"https://doi.org/10.1116/1.3664762","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.3664762","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://research.tue.nl/en/publications/7f637386-fc54-415e-ab91-8d3e2c9b4d3b","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065752180","display_name":"Wytze Keuning","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"W. Keuning","raw_affiliation_strings":["Eindhoven University of Technology Department of Applied Physics, , P.O. Box 513, 5600 MB Eindhoven, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eindhoven University of Technology Department of Applied Physics, , P.O. Box 513, 5600 MB Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062605773","display_name":"Peter van de Weijer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"P. van de Weijer","raw_affiliation_strings":["Philips Research Laboratories, High Tech Campus 4, P.O. Box WAG12, 5656 AE Eindhoven, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Philips Research Laboratories, High Tech Campus 4, P.O. Box WAG12, 5656 AE Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I4210122849"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037380722","display_name":"Herbert Lifka","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"H. Lifka","raw_affiliation_strings":["Philips Research Laboratories, High Tech Campus 4, P.O. Box WAG12, 5656 AE Eindhoven, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Philips Research Laboratories, High Tech Campus 4, P.O. Box WAG12, 5656 AE Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I4210122849"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018346857","display_name":"W. M. M. Kessels","orcid":"https://orcid.org/0000-0002-7630-8226","observed_orcids":["https://orcid.org/0000-0002-7630-8226"]},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"W. M. M. Kessels","raw_affiliation_strings":["Eindhoven University of Technology Department of Applied Physics, , P.O. Box 513, 5600 MB Eindhoven, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eindhoven University of Technology Department of Applied Physics, , P.O. Box 513, 5600 MB Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5082522882","display_name":"Mariadriana Creatore","orcid":"https://orcid.org/0000-0002-5318-8954","observed_orcids":["https://orcid.org/0000-0002-5318-8954"]},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M. Creatore","raw_affiliation_strings":["Eindhoven University of Technology Department of Applied Physics, , P.O. Box 513, 5600 MB Eindhoven, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eindhoven University of Technology Department of Applied Physics, , P.O. Box 513, 5600 MB Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.6006,"has_fulltext":true,"cited_by_count":51,"citation_normalized_percentile":{"value":0.89692436,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":99},"biblio":{"volume":"30","issue":"1","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10611","display_name":"Organic Light-Emitting Diodes Research","score":0.9330999851226807,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10611","display_name":"Organic Light-Emitting Diodes Research","score":0.9330999851226807,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.03739999979734421,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.0038999998942017555,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/organic-light-emitting-diodes","display_name":"organic light-emitting diodes","score":0.9570000171661377},{"id":"https://openalex.org/keywords/aluminum-oxide-thin-films","display_name":"Al2O3 thin films","score":0.9559999704360962},{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"atomic layer deposition","score":0.7710000276565552},{"id":"https://openalex.org/keywords/hydrogenated-amorphous-silicon-nitride","display_name":"hydrogenated amorphous silicon nitride","score":0.8130000233650208},{"id":"https://openalex.org/keywords/water-vapor-transmission-rate","display_name":"water vapor transmission rate","score":0.9350000023841858},{"id":"https://openalex.org/keywords/particle-coverage","display_name":"particle coverage","score":0.5600000023841858},{"id":"https://openalex.org/keywords/defect-density","display_name":"defect density","score":0.5370000004768372},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"plasma-enhanced chemical vapor deposition","score":0.6729999780654907}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7400255799293518},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.6554001569747925},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.6046773195266724},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.5768320560455322},{"id":"https://openalex.org/C49110097","wikidata":"https://www.wikidata.org/wiki/Q175233","display_name":"Cathode","level":2,"score":0.5258258581161499},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.4765266180038452},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.4397278428077698},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4270317256450653},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.42679959535598755},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.42220962047576904},{"id":"https://openalex.org/C176666156","wikidata":"https://www.wikidata.org/wiki/Q25504","display_name":"Light-emitting diode","level":2,"score":0.41625362634658813},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.41620612144470215},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.41139811277389526},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3792356252670288},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2664417326450348},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.15903785824775696},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":9,"locations":[{"id":"doi:10.1116/1.3664762","doi":"https://doi.org/10.1116/1.3664762","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.3664762","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},{"id":"pmh:oai:pure.tue.nl:openaire/7f637386-fc54-415e-ab91-8d3e2c9b4d3b","doi":null,"is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/7f637386-fc54-415e-ab91-8d3e2c9b4d3b","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Keuning, W, Weijer, van de, P, Lifka, H, Kessels, W M M & Creatore, M 2012, 'Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx: H stacks', Journal of Vacuum Science and Technology A, vol. 30, no. 1, 01A131, pp. 01A131-1/6. https://doi.org/10.1116/1.3664762","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:724988","doi":null,"is_oa":false,"landing_page_url":"http://library.tue.nl/csp/dare/LinkToRepository.csp?recordnumber=724988","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"ISSN:0734-2101","raw_type":"Article / Letter to the editor"},{"id":"pmh:oai:library.tue.nl:724988","doi":null,"is_oa":false,"landing_page_url":"http://repository.tue.nl/724988","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"ISSN:0734-2101","raw_type":"Article / Letter to the editor"},{"id":"pmh:oai:tudelft.nl:uuid:1b21fb74-3aef-4753-9d70-357b5a458528","doi":null,"is_oa":false,"landing_page_url":"http://resolver.tudelft.nl/uuid:1b21fb74-3aef-4753-9d70-357b5a458528","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Journal of Vacuum Science Technology A, 2011","raw_type":"article"},{"id":"pmh:philips:oai:tudelft.nl:uuid:1b21fb74-3aef-4753-9d70-357b5a458528","doi":null,"is_oa":true,"landing_page_url":"http://resolver.tudelft.nl/uuid:1b21fb74-3aef-4753-9d70-357b5a458528","pdf_url":null,"source":{"id":"https://openalex.org/S4306401843","display_name":"Data Archiving and Networked Services (DANS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1322597698","host_organization_name":"Royal Netherlands Academy of Arts and Sciences","host_organization_lineage":["https://openalex.org/I1322597698"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:tue:oai:library.tue.nl:724988","doi":null,"is_oa":false,"landing_page_url":"http://repository.tue.nl/724988","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Journal of Vacuum Science and Technology. A: Vacuum, Surfaces, and Films Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 30(1), 01A131","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:tue:oai:pure.tue.nl:publications/7f637386-fc54-415e-ab91-8d3e2c9b4d3b","doi":null,"is_oa":true,"landing_page_url":"https://research.tue.nl/nl/publications/7f637386-fc54-415e-ab91-8d3e2c9b4d3b","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, 30(1):01A131, 01A131 - 1/6. AVS Science and Technology Society","raw_type":"info:eu-repo/semantics/article"},{"id":"mag:1489215084","doi":null,"is_oa":false,"landing_page_url":"http://repository.tudelft.nl/view/philips/uuid:1b21fb74-3aef-4753-9d70-357b5a458528","pdf_url":null,"source":{"id":"https://openalex.org/S52593085","display_name":"Journal of Vacuum Science and Technology","issn_l":"0022-5355","issn":["0022-5355","2331-1754"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Journal of Vacuum Science and Technology","raw_type":null}],"best_oa_location":{"id":"pmh:oai:pure.tue.nl:openaire/7f637386-fc54-415e-ab91-8d3e2c9b4d3b","doi":null,"is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/7f637386-fc54-415e-ab91-8d3e2c9b4d3b","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Keuning, W, Weijer, van de, P, Lifka, H, Kessels, W M M & Creatore, M 2012, 'Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx: H stacks', Journal of Vacuum Science and Technology A, vol. 30, no. 1, 01A131, pp. 01A131-1/6. https://doi.org/10.1116/1.3664762","raw_type":"info:eu-repo/semantics/article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320334893","display_name":"Stichting voor de Technische Wetenschappen","ror":"https://ror.org/057tq3593"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1645764499","https://openalex.org/W1665344004","https://openalex.org/W1668040035","https://openalex.org/W1977581045","https://openalex.org/W1978277812","https://openalex.org/W1982349625","https://openalex.org/W1996998209","https://openalex.org/W2005222933","https://openalex.org/W2006807598","https://openalex.org/W2009377148","https://openalex.org/W2013901062","https://openalex.org/W2045765444","https://openalex.org/W2046499086","https://openalex.org/W2061595474","https://openalex.org/W2062706445","https://openalex.org/W2074358422","https://openalex.org/W2105574656","https://openalex.org/W2114052758","https://openalex.org/W2121881130","https://openalex.org/W2136013851","https://openalex.org/W2149248689","https://openalex.org/W2158932701","https://openalex.org/W2167874787","https://openalex.org/W3023854223","https://openalex.org/W4231796723"],"related_works":["https://openalex.org/W1489215084","https://openalex.org/W7099357913","https://openalex.org/W2334482494","https://openalex.org/W2340603909","https://openalex.org/W2175051149","https://openalex.org/W1975711883","https://openalex.org/W2178831614","https://openalex.org/W1998453273","https://openalex.org/W2143879408","https://openalex.org/W2049414944"],"abstract_inverted_index":{"Al2O3":[0,88,107],"thin":[1],"films":[2,31,108,113],"synthesized":[3],"by":[4,34],"plasma-enhanced":[5,35],"atomic":[6],"layer":[7],"deposition":[8,38],"(ALD)":[9],"at":[10],"room":[11],"temperature":[12],"(25":[13],"\u00b0C)":[14],"have":[15],"been":[16],"tested":[17],"as":[18,40],"water":[19,60],"vapor":[20,37,61],"permeation":[21],"barriers":[22],"for":[23,85,105,124],"organic":[24],"light":[25],"emitting":[26],"diode":[27],"devices.":[28],"Silicon":[29],"nitride":[30],"(a-SiNx:H)":[32],"deposited":[33],"chemical":[36],"served":[39],"reference":[41],"and":[42,72,89,114],"were":[43,83],"used":[44],"to":[45,110],"develop":[46],"Al2O3/a-SiNx:H":[47],"stacks.":[48],"On":[49],"the":[50,106,111],"basis":[51],"of":[52,64,102,117,128],"Ca":[53],"test":[54],"measurements,":[55],"a":[56,100,125],"very":[57],"low":[58],"intrinsic":[59],"transmission":[62],"rate":[63],"\u2264":[65],"2":[66],"\u00d7":[67,74],"10\u22126":[68,75],"g":[69,76],"m\u22122":[70,77],"day\u22121":[71,78],"4":[73,103],"(20":[79],"oC/50%":[80],"relative":[81],"humidity)":[82],"found":[84],"20\u201340":[86],"nm":[87,91],"300":[90],"a-SiNx:H":[92,112],"films,":[93],"respectively.":[94],"The":[95],"cathode":[96],"particle":[97],"coverage":[98],"was":[99,122],"factor":[101],"better":[104],"compared":[109],"an":[115],"average":[116],"0.12":[118],"defects":[119],"per":[120],"cm2":[121],"obtained":[123],"stack":[126],"consisting":[127],"three":[129],"barrier":[130],"layers":[131],"(Al2O3/a-SiNx:H/Al2O3).":[132]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":6},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":7},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":6},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":8},{"year":2014,"cited_by_count":5},{"year":2013,"cited_by_count":6},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}