{"id":"https://openalex.org/W2025548639","doi":"https://doi.org/10.1016/j.mejo.2007.03.010","title":"Fabrication and characterization of stacked ZnO and ZnOGa2O3 layers for the realization of bulk acoustic wave resonated membranes","display_name":"Fabrication and characterization of stacked ZnO and ZnOGa2O3 layers for the realization of bulk acoustic wave resonated membranes","publication_year":2007,"publication_date":"2007-04-01","ids":{"openalex":"https://openalex.org/W2025548639","doi":"https://doi.org/10.1016/j.mejo.2007.03.010","mag":"2025548639"},"language":"en","primary_location":{"id":"doi:10.1016/j.mejo.2007.03.010","doi":"https://doi.org/10.1016/j.mejo.2007.03.010","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.mejo.2007.03.010","pdf_url":null,"source":{"id":"https://openalex.org/S98831239","display_name":"Microelectronics Journal","issn_l":"1879-2391","issn":["1879-2391"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Journal","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W2025548639"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113527112","display_name":"Y. Zaatar","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I189998669","display_name":"Holy Spirit University of Kaslik","ror":"https://ror.org/05g06bh89","country_code":"LB","type":"education","lineage":["https://openalex.org/I189998669"]}],"countries":["LB"],"is_corresponding":false,"raw_author_name":"Y. Zaatar","raw_affiliation_strings":["Facult\u00e9 des Sciences et de G\u00e9nie Informatique, Universit\u00e9 Saint-Esprit de Kaslik, B.P. 446 Jounieh, Lebanon#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Facult\u00e9 des Sciences et de G\u00e9nie Informatique, Universit\u00e9 Saint-Esprit de Kaslik, B.P. 446 Jounieh, Lebanon#TAB#","institution_ids":["https://openalex.org/I189998669"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029253991","display_name":"Roy Al Asmar","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I19894307","display_name":"Universit\u00e9 de Montpellier","ror":"https://ror.org/051escj72","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307"]},{"id":"https://openalex.org/I4210134800","display_name":"Institut d'\u00c9lectronique et des Syst\u00e8mes","ror":"https://ror.org/0431hh004","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I19894307","https://openalex.org/I4210095849","https://openalex.org/I4210134800"]},{"id":"https://openalex.org/I4387154756","display_name":"Universit\u00e9 Montpellier 2","ror":"https://ror.org/00wh4bp03","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307","https://openalex.org/I4387154756"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"R. Al Asmar","raw_affiliation_strings":["CEM2, Universite Montpellier II, UMR CNRS 5507, Universit\u00e9 Montpellier II, Place E. Bataillon, 34095 Montpellier, France and Facult\u00e9 des Sciences et de G\u00e9nie Informatique, Universit "],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEM2, Universite Montpellier II, UMR CNRS 5507, Universit\u00e9 Montpellier II, Place E. Bataillon, 34095 Montpellier, France and Facult\u00e9 des Sciences et de G\u00e9nie Informatique, Universit ","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I19894307","https://openalex.org/I4210134800","https://openalex.org/I4387154756"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028984358","display_name":"Jean Podlecki","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210134800","display_name":"Institut d'\u00c9lectronique et des Syst\u00e8mes","ror":"https://ror.org/0431hh004","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I19894307","https://openalex.org/I4210095849","https://openalex.org/I4210134800"]},{"id":"https://openalex.org/I4387154756","display_name":"Universit\u00e9 Montpellier 2","ror":"https://ror.org/00wh4bp03","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307","https://openalex.org/I4387154756"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Podlecki","raw_affiliation_strings":["CEM2 \u2013 Universite Montpellier II \u2013 UMR CNRS 5507, Universit\u00e9 Montpellier II, Place E. Bataillon, 34095 Montpellier, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEM2 \u2013 Universite Montpellier II \u2013 UMR CNRS 5507, Universit\u00e9 Montpellier II, Place E. Bataillon, 34095 Montpellier, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210134800","https://openalex.org/I4387154756"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111781867","display_name":"S. Youssef","orcid":"https://orcid.org/0000-0003-1307-428X","observed_orcids":["https://orcid.org/0000-0003-1307-428X"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210134800","display_name":"Institut d'\u00c9lectronique et des Syst\u00e8mes","ror":"https://ror.org/0431hh004","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I19894307","https://openalex.org/I4210095849","https://openalex.org/I4210134800"]},{"id":"https://openalex.org/I4387154756","display_name":"Universit\u00e9 Montpellier 2","ror":"https://ror.org/00wh4bp03","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307","https://openalex.org/I4387154756"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. Youssef","raw_affiliation_strings":["CEM2 \u2013 Universite Montpellier II \u2013 UMR CNRS 5507, Universit\u00e9 Montpellier II, Place E. Bataillon, 34095 Montpellier, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEM2 \u2013 Universite Montpellier II \u2013 UMR CNRS 5507, Universit\u00e9 Montpellier II, Place E. Bataillon, 34095 Montpellier, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210134800","https://openalex.org/I4387154756"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080972658","display_name":"Maher Abdallah","orcid":"https://orcid.org/0000-0001-9514-0054","observed_orcids":["https://orcid.org/0000-0001-9514-0054"]},"institutions":[{"id":"https://openalex.org/I189998669","display_name":"Holy Spirit University of Kaslik","ror":"https://ror.org/05g06bh89","country_code":"LB","type":"education","lineage":["https://openalex.org/I189998669"]}],"countries":["LB"],"is_corresponding":false,"raw_author_name":"M. Abdallah","raw_affiliation_strings":["Facult\u00e9 des Sciences et de G\u00e9nie Informatique, Universit\u00e9 Saint-Esprit de Kaslik, B.P. 446 Jounieh, Lebanon#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Facult\u00e9 des Sciences et de G\u00e9nie Informatique, Universit\u00e9 Saint-Esprit de Kaslik, B.P. 446 Jounieh, Lebanon#TAB#","institution_ids":["https://openalex.org/I189998669"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111847012","display_name":"Na\u00efm Oua\u00efni","orcid":"https://orcid.org/0000-0003-3033-5330","observed_orcids":["https://orcid.org/0000-0003-3033-5330"]},"institutions":[{"id":"https://openalex.org/I189998669","display_name":"Holy Spirit University of Kaslik","ror":"https://ror.org/05g06bh89","country_code":"LB","type":"education","lineage":["https://openalex.org/I189998669"]}],"countries":["LB"],"is_corresponding":false,"raw_author_name":"N. Ouaini","raw_affiliation_strings":["Facult\u00e9 des Sciences et de G\u00e9nie Informatique, Universit\u00e9 Saint-Esprit de Kaslik, B.P. 446 Jounieh, Lebanon#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Facult\u00e9 des Sciences et de G\u00e9nie Informatique, Universit\u00e9 Saint-Esprit de Kaslik, B.P. 446 Jounieh, Lebanon#TAB#","institution_ids":["https://openalex.org/I189998669"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5107429857","display_name":"A. Foucaran","orcid":"https://orcid.org/0000-0002-2029-9535","observed_orcids":["https://orcid.org/0000-0002-2029-9535"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210134800","display_name":"Institut d'\u00c9lectronique et des Syst\u00e8mes","ror":"https://ror.org/0431hh004","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I19894307","https://openalex.org/I4210095849","https://openalex.org/I4210134800"]},{"id":"https://openalex.org/I4387154756","display_name":"Universit\u00e9 Montpellier 2","ror":"https://ror.org/00wh4bp03","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307","https://openalex.org/I4387154756"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Foucaran","raw_affiliation_strings":["CEM2 \u2013 Universite Montpellier II \u2013 UMR CNRS 5507, Universit\u00e9 Montpellier II, Place E. Bataillon, 34095 Montpellier, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEM2 \u2013 Universite Montpellier II \u2013 UMR CNRS 5507, Universit\u00e9 Montpellier II, Place E. Bataillon, 34095 Montpellier, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210134800","https://openalex.org/I4387154756"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2390,"currency":"USD","value_usd":2390},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"38","issue":"4-5","first_page":"538","last_page":"546"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/zinc-oxide","display_name":"zinc oxide","score":0.671999990940094},{"id":"https://openalex.org/keywords/ga2o3","display_name":"gallium oxide","score":0.7480000257492065},{"id":"https://openalex.org/keywords/bulk-acoustic-wave-resonators","display_name":"bulk acoustic wave resonators","score":0.9750000238418579},{"id":"https://openalex.org/keywords/electron-beam-co-evaporation","display_name":"electron beam co-evaporation","score":0.925000011920929},{"id":"https://openalex.org/keywords/amorphous-films","display_name":"amorphous films","score":0.7799999713897705},{"id":"https://openalex.org/keywords/tensile-stress","display_name":"tensile stress","score":0.4189999997615814},{"id":"https://openalex.org/keywords/piezoelectric-activity","display_name":"piezoelectric activity","score":0.8479999899864197},{"id":"https://openalex.org/keywords/rf-magnetron-sputtering","display_name":"RF magnetron sputtering","score":0.8270000219345093}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8068658113479614},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.7676215171813965},{"id":"https://openalex.org/C2781089630","wikidata":"https://www.wikidata.org/wiki/Q21856745","display_name":"Realization (probability)","level":2,"score":0.7532951235771179},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6638157963752747},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5903897285461426},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.45571115612983704},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.45426103472709656},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.39824143052101135},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3224639296531677},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15208116173744202},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0933171808719635},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1016/j.mejo.2007.03.010","doi":"https://doi.org/10.1016/j.mejo.2007.03.010","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.mejo.2007.03.010","pdf_url":null,"source":{"id":"https://openalex.org/S98831239","display_name":"Microelectronics Journal","issn_l":"1879-2391","issn":["1879-2391"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Journal","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-00324298v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-00324298","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Microelectronics Journal, 2007, 38 (4-5), pp.538-546. ⟨10.1016/j.mejo.2007.03.010⟩","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1975545976","https://openalex.org/W2002821904","https://openalex.org/W2009706736","https://openalex.org/W2021298701","https://openalex.org/W2029197995","https://openalex.org/W2034756371","https://openalex.org/W2035194820","https://openalex.org/W2045269207","https://openalex.org/W2047068753","https://openalex.org/W2047337934","https://openalex.org/W2058234472","https://openalex.org/W2059526322","https://openalex.org/W2069314540","https://openalex.org/W2079942899","https://openalex.org/W2079960585","https://openalex.org/W2081745042","https://openalex.org/W2087304213","https://openalex.org/W2089649623","https://openalex.org/W2101736856"],"related_works":["https://openalex.org/W2047337934","https://openalex.org/W1996415974","https://openalex.org/W2334607933","https://openalex.org/W2770484745","https://openalex.org/W2359553330","https://openalex.org/W3029813978","https://openalex.org/W1523558574","https://openalex.org/W2053031737","https://openalex.org/W2053726051","https://openalex.org/W2390202145"],"abstract_inverted_index":null,"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-11-08T12:12:28.789561","created_date":"2016-06-24T00:00:00"}