{"id":"https://openalex.org/W2024947882","doi":"https://doi.org/10.1116/1.579490","title":"Evaluation of the background signal for mass spectrometry under high ambient hydrogen pressures in plasma discharges","display_name":"Evaluation of the background signal for mass spectrometry under high ambient hydrogen pressures in plasma discharges","publication_year":1995,"publication_date":"1995-09-01","ids":{"openalex":"https://openalex.org/W2024947882","doi":"https://doi.org/10.1116/1.579490","mag":"2024947882"},"language":"en","primary_location":{"id":"doi:10.1116/1.579490","doi":"https://doi.org/10.1116/1.579490","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.579490","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5021053943","display_name":"Yuki Nakashima","orcid":"https://orcid.org/0000-0001-5835-2496","observed_orcids":["https://orcid.org/0000-0001-5835-2496"]},"institutions":[{"id":"https://openalex.org/I146399215","display_name":"University of Tsukuba","ror":"https://ror.org/02956yf07","country_code":"JP","type":"education","lineage":["https://openalex.org/I146399215"]},{"id":"https://openalex.org/I4405287255","display_name":"Plasma Research Center, University of Tsukuba","ror":"https://ror.org/04kcdt676","country_code":"JP","type":"facility","lineage":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Nakashima","raw_affiliation_strings":["Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan","institution_ids":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047012722","display_name":"Kazuyoshi Tsuchiya","orcid":"https://orcid.org/0000-0002-7098-4477","observed_orcids":["https://orcid.org/0000-0002-7098-4477"]},"institutions":[{"id":"https://openalex.org/I146399215","display_name":"University of Tsukuba","ror":"https://ror.org/02956yf07","country_code":"JP","type":"education","lineage":["https://openalex.org/I146399215"]},{"id":"https://openalex.org/I4405287255","display_name":"Plasma Research Center, University of Tsukuba","ror":"https://ror.org/04kcdt676","country_code":"JP","type":"facility","lineage":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Tsuchiya","raw_affiliation_strings":["Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan","institution_ids":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044032788","display_name":"Kenji Ohtoshi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I146399215","display_name":"University of Tsukuba","ror":"https://ror.org/02956yf07","country_code":"JP","type":"education","lineage":["https://openalex.org/I146399215"]},{"id":"https://openalex.org/I4405287255","display_name":"Plasma Research Center, University of Tsukuba","ror":"https://ror.org/04kcdt676","country_code":"JP","type":"facility","lineage":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Ohtoshi","raw_affiliation_strings":["Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan","institution_ids":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084893891","display_name":"Makoto Shoji","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I146399215","display_name":"University of Tsukuba","ror":"https://ror.org/02956yf07","country_code":"JP","type":"education","lineage":["https://openalex.org/I146399215"]},{"id":"https://openalex.org/I4405287255","display_name":"Plasma Research Center, University of Tsukuba","ror":"https://ror.org/04kcdt676","country_code":"JP","type":"facility","lineage":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"M. Shoji","raw_affiliation_strings":["Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan","institution_ids":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071410585","display_name":"Kiyoshi YATSU","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I146399215","display_name":"University of Tsukuba","ror":"https://ror.org/02956yf07","country_code":"JP","type":"education","lineage":["https://openalex.org/I146399215"]},{"id":"https://openalex.org/I4405287255","display_name":"Plasma Research Center, University of Tsukuba","ror":"https://ror.org/04kcdt676","country_code":"JP","type":"facility","lineage":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Yatsu","raw_affiliation_strings":["Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan","institution_ids":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109961799","display_name":"T. Tamano","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I146399215","display_name":"University of Tsukuba","ror":"https://ror.org/02956yf07","country_code":"JP","type":"education","lineage":["https://openalex.org/I146399215"]},{"id":"https://openalex.org/I4405287255","display_name":"Plasma Research Center, University of Tsukuba","ror":"https://ror.org/04kcdt676","country_code":"JP","type":"facility","lineage":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Tamano","raw_affiliation_strings":["Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305, Japan","institution_ids":["https://openalex.org/I146399215","https://openalex.org/I4405287255"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.19074899,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"13","issue":"5","first_page":"2470","last_page":"2475"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.7515000104904175,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.7515000104904175,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10683","display_name":"Mass Spectrometry Techniques and Applications","score":0.1670999974012375,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10346","display_name":"Magnetic confinement fusion research","score":0.022299999371170998,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/background-suppression","display_name":"background suppression","score":0.7820000052452087},{"id":"https://openalex.org/keywords/quadrupole-mass-spectrometer","display_name":"quadrupole mass spectrometer","score":0.9700000286102295},{"id":"https://openalex.org/keywords/hydrogen-partial-pressure","display_name":"hydrogen partial pressure","score":0.6430000066757202},{"id":"https://openalex.org/keywords/residual-gas-analysis","display_name":"residual gas analysis","score":0.824999988079071},{"id":"https://openalex.org/keywords/gas-puffing","display_name":"gas puff fueling","score":0.7929999828338623},{"id":"https://openalex.org/keywords/fusion-plasma","display_name":"fusion plasma","score":0.8399999737739563}],"concepts":[{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.7777788639068604},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.6894562840461731},{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.6770195960998535},{"id":"https://openalex.org/C162356407","wikidata":"https://www.wikidata.org/wiki/Q180809","display_name":"Mass spectrometry","level":2,"score":0.6593824625015259},{"id":"https://openalex.org/C71987851","wikidata":"https://www.wikidata.org/wiki/Q7216430","display_name":"Impurity","level":2,"score":0.6366853713989258},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.6327093243598938},{"id":"https://openalex.org/C103232671","wikidata":"https://www.wikidata.org/wiki/Q874519","display_name":"Quadrupole mass analyzer","level":3,"score":0.6254792213439941},{"id":"https://openalex.org/C68463220","wikidata":"https://www.wikidata.org/wiki/Q27165","display_name":"Partial pressure","level":3,"score":0.614529550075531},{"id":"https://openalex.org/C57540601","wikidata":"https://www.wikidata.org/wiki/Q7315510","display_name":"Residual gas analyzer","level":3,"score":0.6144222021102905},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.5948013663291931},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4884116053581238},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.4163036644458771},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.35806190967559814},{"id":"https://openalex.org/C540031477","wikidata":"https://www.wikidata.org/wiki/Q629","display_name":"Oxygen","level":2,"score":0.2880241274833679},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.07722806930541992},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0720510184764862},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.06762796640396118},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06620463728904724},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.579490","doi":"https://doi.org/10.1116/1.579490","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.579490","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2334619121"],"abstract_inverted_index":{"The":[0,46,117],"background":[1,95],"signal":[2,32,96],"of":[3,29,49,62,73,102,111,147,153,171],"a":[4,22],"quadrupole":[5],"mass":[6,40,109],"spectrometer":[7],"(QMS)":[8],"has":[9],"been":[10],"evaluated":[11],"under":[12],"high":[13],"ambient":[14],"hydrogen":[15,64,81,172],"pressures.":[16],"Hydrogen":[17],"gas":[18,65,176],"is":[19,33,68,76,97,106,128,160,163],"injected":[20],"into":[21],"vacuum":[23],"chamber":[24],"and":[25,105,136,162],"the":[26,30,60,63,80,84,94,100,121,145,148,154,158,168],"resultant":[27],"change":[28],"QMS":[31,159],"investigated":[34],"for":[35,92,130],"dominant":[36],"gaseous":[37],"impurities":[38],"with":[39,59,165],"numbers":[41],"from":[42],"M=1":[43],"to":[44,57,79,90,108,167,175],"M=50.":[45],"partial":[47,74],"pressures":[48],"impurity":[50,155],"gases":[51,113,156],"(H2O,":[52],"CO,":[53],"CH4)":[54],"are":[55],"observed":[56],"increase":[58,72],"quantity":[61],"injected.":[66],"It":[67],"found":[69],"that":[70,140],"each":[71],"pressure":[75,82,173],"in":[77,83,114,120],"proportion":[78],"range":[85],"4\u00d710\u22126\u20134\u00d710\u22125":[86],"Torr.":[87],"A":[88,150],"method":[89,142],"compensate":[91],"suppressing":[93],"considered":[98],"on":[99],"basis":[101],"experimental":[103],"results":[104],"applied":[107],"spectrometry":[110],"residual":[112],"plasma":[115,132],"discharges.":[116],"partial-pressure":[118],"measurements":[119],"GAMMA":[122],"10":[123],"tandem":[124],"mirror":[125],"device,":[126],"which":[127],"used":[129],"fusion":[131],"studies,":[133],"were":[134],"performed":[135],"it":[137],"was":[138],"confirmed":[139],"this":[141],"substantially":[143],"improves":[144],"accuracy":[146],"measurement.":[149],"production":[151],"mechanism":[152],"inside":[157],"modeled":[161],"discussed":[164],"respect":[166],"transient":[169],"state":[170],"due":[174],"puffing.":[177]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-24T09:50:30.924529","created_date":"2016-06-24T00:00:00"}