{"id":"https://openalex.org/W2024915403","doi":"https://doi.org/10.1063/1.1558951","title":"Crystallographic characterization of epitaxial Pb(Zr,Ti)O3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering","display_name":"Crystallographic characterization of epitaxial Pb(Zr,Ti)O3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering","publication_year":2003,"publication_date":"2003-03-27","ids":{"openalex":"https://openalex.org/W2024915403","doi":"https://doi.org/10.1063/1.1558951","mag":"2024915403"},"language":"en","primary_location":{"id":"doi:10.1063/1.1558951","doi":"https://doi.org/10.1063/1.1558951","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.1558951","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://repository.kulib.kyoto-u.ac.jp/bitstreams/2508894e-c9fa-42a0-9fd5-ea71238cf8a4/download","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5061918635","display_name":"Isaku Kanno","orcid":"https://orcid.org/0000-0003-3285-0918","observed_orcids":["https://orcid.org/0000-0003-3285-0918"]},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Isaku Kanno","raw_affiliation_strings":["Department of Mechanical Engineering, Kyoto University, Kyoto 606-8501, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Kyoto University, Kyoto 606-8501, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065666549","display_name":"Hidetoshi Kotera","orcid":"https://orcid.org/0000-0003-3672-0950","observed_orcids":["https://orcid.org/0000-0003-3672-0950"]},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hidetoshi Kotera","raw_affiliation_strings":["Department of Mechanical Engineering, Kyoto University, Kyoto 606-8501, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Kyoto University, Kyoto 606-8501, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111715543","display_name":"Kiyotaka Wasa","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I89630735","display_name":"Yokohama City University","ror":"https://ror.org/0135d1r83","country_code":"JP","type":"education","lineage":["https://openalex.org/I89630735"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kiyotaka Wasa","raw_affiliation_strings":["Faculty of Science, Yokohama City University, Yokohama 236-0027, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Science, Yokohama City University, Yokohama 236-0027, Japan","institution_ids":["https://openalex.org/I89630735"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049966177","display_name":"Toshiyuki Matsunaga","orcid":"https://orcid.org/0000-0002-4094-5514","observed_orcids":["https://orcid.org/0000-0002-4094-5514"]},"institutions":[{"id":"https://openalex.org/I1283155146","display_name":"Panasonic (Japan)","ror":"https://ror.org/011tm7n37","country_code":"JP","type":"company","lineage":["https://openalex.org/I1283155146"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshiyuki Matsunaga","raw_affiliation_strings":["Matsushita Electric Industry, Osaka 570-8501, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Matsushita Electric Industry, Osaka 570-8501, Japan","institution_ids":["https://openalex.org/I1283155146"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032113989","display_name":"Takeshi Kamada","orcid":"https://orcid.org/0000-0001-7017-0548","observed_orcids":["https://orcid.org/0000-0001-7017-0548"]},"institutions":[{"id":"https://openalex.org/I1283155146","display_name":"Panasonic (Japan)","ror":"https://ror.org/011tm7n37","country_code":"JP","type":"company","lineage":["https://openalex.org/I1283155146"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takeshi Kamada","raw_affiliation_strings":["Matsushita Electric Industry, Osaka 570-8501, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Matsushita Electric Industry, Osaka 570-8501, Japan","institution_ids":["https://openalex.org/I1283155146"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5030440014","display_name":"Ryouichi Takayama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1283155146","display_name":"Panasonic (Japan)","ror":"https://ror.org/011tm7n37","country_code":"JP","type":"company","lineage":["https://openalex.org/I1283155146"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ryouichi Takayama","raw_affiliation_strings":["Matsushita Electric Industry, Osaka 570-8501, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Matsushita Electric Industry, Osaka 570-8501, Japan","institution_ids":["https://openalex.org/I1283155146"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3500,"currency":"USD","value_usd":3500},"apc_paid":null,"fwci":6.5697,"has_fulltext":false,"cited_by_count":98,"citation_normalized_percentile":{"value":0.97396728,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":93,"max":98},"biblio":{"volume":"93","issue":"7","first_page":"4091","last_page":"4096"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators","score":0.001500000013038516,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10886","display_name":"Multiferroics and related materials","score":0.0010000000474974513,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pb-zr-ti-o3-thin-films","display_name":"Pb(Zr,Ti)O3 thin films","score":0.9290000200271606},{"id":"https://openalex.org/keywords/epitaxial-films","display_name":"epitaxial thin films","score":0.8989999890327454},{"id":"https://openalex.org/keywords/zr-ti-ratio","display_name":"Zr/Ti ratio","score":0.9760000109672546},{"id":"https://openalex.org/keywords/crystal-orientation","display_name":"crystal orientation","score":0.8450000286102295},{"id":"https://openalex.org/keywords/tetragonal-phase","display_name":"tetragonal phase","score":0.828000009059906},{"id":"https://openalex.org/keywords/rhombohedral-phase","display_name":"rhombohedral phase","score":0.9950000047683716},{"id":"https://openalex.org/keywords/srtio3-substrate","display_name":"SrTiO3 substrate","score":0.8999999761581421},{"id":"https://openalex.org/keywords/dielectric-constant","display_name":"dielectric constant","score":0.6439999938011169},{"id":"https://openalex.org/keywords/x-ray-diffraction","display_name":"X-ray diffraction","score":0.5350000262260437},{"id":"https://openalex.org/keywords/dielectric-properties","display_name":"dielectric properties","score":0.6579999923706055}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.890121579170227},{"id":"https://openalex.org/C170751736","wikidata":"https://www.wikidata.org/wiki/Q503601","display_name":"Tetragonal crystal system","level":3,"score":0.8343191146850586},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.6047787070274353},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.6014751195907593},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5685173273086548},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.5634610056877136},{"id":"https://openalex.org/C115624301","wikidata":"https://www.wikidata.org/wiki/Q895901","display_name":"Crystal structure","level":2,"score":0.5352727770805359},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5057969093322754},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.45933616161346436},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3937128186225891},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2767770290374756},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.13181492686271667},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.11552625894546509},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.04992780089378357},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.1063/1.1558951","doi":"https://doi.org/10.1063/1.1558951","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.1558951","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"},{"id":"pmh:oai:irdb.nii.ac.jp:01221:0000019721","doi":null,"is_oa":true,"landing_page_url":"https://repository.kulib.kyoto-u.ac.jp/bitstreams/2508894e-c9fa-42a0-9fd5-ea71238cf8a4/download","pdf_url":"https://repository.kulib.kyoto-u.ac.jp/bitstreams/2508894e-c9fa-42a0-9fd5-ea71238cf8a4/download","source":{"id":"https://openalex.org/S7407056385","display_name":"Institutional Repositories DataBase (IRDB)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I184597095","host_organization_name":"National Institute of Informatics","host_organization_lineage":["https://openalex.org/I184597095"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"JOURNAL OF APPLIED PHYSICS","raw_type":"journal article"},{"id":"pmh:oai:irdb.nii.ac.jp:01221:0000001718","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/2433/4618","pdf_url":null,"source":{"id":"https://openalex.org/S7407056385","display_name":"Institutional Repositories DataBase (IRDB)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I184597095","host_organization_name":"National Institute of Informatics","host_organization_lineage":["https://openalex.org/I184597095"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"JOURNAL OF APPLIED PHYSICS","raw_type":"journal article"},{"id":"pmh:oai:repository.kulib.kyoto-u.ac.jp:2433/4618","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/2433/4618","pdf_url":null,"source":{"id":"https://openalex.org/S4306401454","display_name":"Kyoto University Research Information Repository (Kyoto University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I22299242","host_organization_name":"Kyoto University","host_organization_lineage":["https://openalex.org/I22299242"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Journal Article"},{"id":"pmh:oai:repository.kulib.kyoto-u.ac.jp:2433/50135","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/2433/50135","pdf_url":null,"source":{"id":"https://openalex.org/S4306401454","display_name":"Kyoto University Research Information Repository (Kyoto University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I22299242","host_organization_name":"Kyoto University","host_organization_lineage":["https://openalex.org/I22299242"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Journal Article"}],"best_oa_location":{"id":"pmh:oai:irdb.nii.ac.jp:01221:0000019721","doi":null,"is_oa":true,"landing_page_url":"https://repository.kulib.kyoto-u.ac.jp/bitstreams/2508894e-c9fa-42a0-9fd5-ea71238cf8a4/download","pdf_url":"https://repository.kulib.kyoto-u.ac.jp/bitstreams/2508894e-c9fa-42a0-9fd5-ea71238cf8a4/download","source":{"id":"https://openalex.org/S7407056385","display_name":"Institutional Repositories DataBase (IRDB)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I184597095","host_organization_name":"National Institute of Informatics","host_organization_lineage":["https://openalex.org/I184597095"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"JOURNAL OF APPLIED PHYSICS","raw_type":"journal article"},"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W208017642","https://openalex.org/W1611123911","https://openalex.org/W1982096792","https://openalex.org/W1990544299","https://openalex.org/W1994777382","https://openalex.org/W2007852417","https://openalex.org/W2017580493","https://openalex.org/W2026873298","https://openalex.org/W2029880676","https://openalex.org/W2033942496","https://openalex.org/W2037670506","https://openalex.org/W2038348605","https://openalex.org/W2045511932","https://openalex.org/W2049733352","https://openalex.org/W2052927613","https://openalex.org/W2060451979","https://openalex.org/W2063827365","https://openalex.org/W2064173267","https://openalex.org/W2090221188","https://openalex.org/W2092154763","https://openalex.org/W2120828770","https://openalex.org/W4246749317"],"related_works":["https://openalex.org/W2108157117","https://openalex.org/W2031633929","https://openalex.org/W2035249489","https://openalex.org/W1967383351","https://openalex.org/W850150341","https://openalex.org/W2295922851","https://openalex.org/W142388841","https://openalex.org/W2066362799","https://openalex.org/W1969082957","https://openalex.org/W1992258975"],"abstract_inverted_index":{"Crystallographic":[0],"structure":[1,68,144],"of":[2,74,93,117,145,151,159,165,194,199],"as-grown":[3],"epitaxial":[4,201],"Pb(Zr,Ti)O3":[5],"(PZT)":[6],"films":[7,20,54,65,89,102,120,132,154],"was":[8,55],"investigated":[9],"with":[10,21,90,103,121],"regard":[11],"to":[12,134,182],"the":[13,46,71,77,104,111,118,126,131,135,141,146,152,178,183,191,200],"Zr/Ti":[14,50,72,91,106,160],"ratio":[15,92,107,161],"and":[16,23,31,95,162,196],"crystalline":[17,143],"orientation.":[18],"PZT":[19,53,64,79,88,101,119,147,153,202],"(001)":[22],"(111)":[24],"orientation":[25],"were":[26,108],"epitaxially":[27],"grown":[28],"on":[29,49],"(100)":[30],"(111)SrTiO3":[32],"substrates":[33],"respectively":[34],"using":[35],"radio-frequency":[36],"(rf)":[37],"sputtering.":[38],"Four":[39],"circle":[40],"x-ray":[41],"diffraction":[42],"measurements":[43],"revealed":[44],"that":[45,177],"crystallographic":[47,195],"dependence":[48],"composition":[51,73],"in":[52,70,130,190],"much":[56],"different":[57],"from":[58],"bulk":[59,78],"PZT.":[60],"In":[61,84],"particular,":[62],"(001)-oriented":[63,87],"showed":[66,97],"tetragonal":[67,98],"even":[69],"70/30":[75,96],"where":[76],"ceramics":[80],"are":[81],"rhombohedral":[82,112],"phase.":[83],"addition,":[85],"although":[86],"53/47":[94],"structure,":[99],"(111)-oriented":[100],"same":[105],"identified":[109],"as":[110],"structure.":[113],"The":[114],"cell":[115],"volume":[116],"both":[122],"orientations":[123],"increased,":[124],"suggesting":[125],"excess":[127],"Pb":[128],"atoms":[129],"due":[133,181],"impinging":[136],"energetic":[137],"sputtered":[138],"particles":[139],"induces":[140],"anomalous":[142],"films.":[148,203],"Dielectric":[149],"properties":[150,198],"exhibited":[155],"stable":[156],"value":[157],"independent":[158],"characteristic":[163],"increase":[164],"dielectric":[166],"constant":[167],"near":[168],"Zr/Ti=53/47":[169],"could":[170],"not":[171],"be":[172],"observed.":[173],"These":[174],"results":[175],"suggest":[176],"internal":[179],"stress":[180],"sputter":[184],"deposition":[185],"plays":[186],"an":[187],"important":[188],"roll":[189],"unique":[192],"characteristics":[193],"electrical":[197]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":5},{"year":2012,"cited_by_count":5}],"updated_date":"2026-10-12T09:40:04.860316","created_date":"2025-10-10T00:00:00"}