{"id":"https://openalex.org/W2022014031","doi":"https://doi.org/10.4028/www.scientific.net/kem.443.693","title":"A Comparison of Dry and Underwater Laser Micromachining of Silicon Substrates","display_name":"A Comparison of Dry and Underwater Laser Micromachining of Silicon Substrates","publication_year":2010,"publication_date":"2010-06-02","ids":{"openalex":"https://openalex.org/W2022014031","doi":"https://doi.org/10.4028/www.scientific.net/kem.443.693","mag":"2022014031"},"language":"en","primary_location":{"id":"doi:10.4028/www.scientific.net/kem.443.693","doi":"https://doi.org/10.4028/www.scientific.net/kem.443.693","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.443.693","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W2022014031"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.4028/www.scientific.net/kem.443.693","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010102820","display_name":"Viboon Saetang","orcid":"https://orcid.org/0000-0002-5922-8873","observed_orcids":["https://orcid.org/0000-0002-5922-8873"]},"institutions":[{"id":"https://openalex.org/I60837268","display_name":"King Mongkut's University of Technology Thonburi","ror":"https://ror.org/0057ax056","country_code":"TH","type":"education","lineage":["https://openalex.org/I60837268"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Viboon Saetang","raw_affiliation_strings":["King Mongkut\u2019s University of Technology Thonburi"],"raw_orcid":"https://orcid.org/0000-0002-5922-8873","affiliations":[{"raw_affiliation_string":"King Mongkut\u2019s University of Technology Thonburi","institution_ids":["https://openalex.org/I60837268"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100681938","display_name":"Jun Wang","orcid":"https://orcid.org/0000-0003-1699-3687","observed_orcids":["https://orcid.org/0000-0003-1699-3687"]},"institutions":[{"id":"https://openalex.org/I31746571","display_name":"UNSW Sydney","ror":"https://ror.org/03r8z3t63","country_code":"AU","type":"education","lineage":["https://openalex.org/I31746571"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Jun Wang","raw_affiliation_strings":["University of New South Wales"],"raw_orcid":"https://orcid.org/0000-0003-1699-3687","affiliations":[{"raw_affiliation_string":"University of New South Wales","institution_ids":["https://openalex.org/I31746571"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5000880653","display_name":"Philip Mathew","orcid":"https://orcid.org/0000-0003-3132-6962","observed_orcids":["https://orcid.org/0000-0003-3132-6962"]},"institutions":[{"id":"https://openalex.org/I31746571","display_name":"UNSW Sydney","ror":"https://ror.org/03r8z3t63","country_code":"AU","type":"education","lineage":["https://openalex.org/I31746571"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Philip Mathew","raw_affiliation_strings":["University of New South Wales"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of New South Wales","institution_ids":["https://openalex.org/I31746571"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5083,"has_fulltext":false,"cited_by_count":50,"citation_normalized_percentile":{"value":0.84073596,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":99},"biblio":{"volume":"443","issue":null,"first_page":"693","last_page":"698"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11451","display_name":"Advanced Machining and Optimization Techniques","score":0.00139999995008111,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12092","display_name":"Erosion and Abrasive Machining","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/laser-micromachining","display_name":"laser micromachining","score":0.9049999713897705},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.9509999752044678},{"id":"https://openalex.org/keywords/heat-affected-zone","display_name":"heat-affected zone","score":0.9359999895095825},{"id":"https://openalex.org/keywords/material-removal-rate","display_name":"material removal rate","score":0.906000018119812},{"id":"https://openalex.org/keywords/kerf-width","display_name":"kerf width","score":0.9129999876022339},{"id":"https://openalex.org/keywords/cut-surface-quality","display_name":"cut surface quality","score":0.8029999732971191},{"id":"https://openalex.org/keywords/pulse-frequency","display_name":"pulse frequency","score":0.9419999718666077},{"id":"https://openalex.org/keywords/traverse-speed","display_name":"traverse speed","score":0.9980000257492065},{"id":"https://openalex.org/keywords/laser-energy","display_name":"laser energy","score":0.9129999876022339},{"id":"https://openalex.org/keywords/thermal-damage-reduction","display_name":"thermal damage reduction","score":0.546999990940094}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8161987066268921},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.8079531192779541},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.7202743291854858},{"id":"https://openalex.org/C98083399","wikidata":"https://www.wikidata.org/wiki/Q3246517","display_name":"Underwater","level":2,"score":0.6854368448257446},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.5738714933395386},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5731654167175293},{"id":"https://openalex.org/C2778902805","wikidata":"https://www.wikidata.org/wiki/Q322177","display_name":"Ablation","level":2,"score":0.546999990940094},{"id":"https://openalex.org/C176809094","wikidata":"https://www.wikidata.org/wiki/Q15401496","display_name":"Traverse","level":2,"score":0.5142483115196228},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4530196189880371},{"id":"https://openalex.org/C2778386843","wikidata":"https://www.wikidata.org/wiki/Q6493035","display_name":"Laser beam machining","level":4,"score":0.44714364409446716},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.36065834760665894},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.23719388246536255},{"id":"https://openalex.org/C2984025587","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser beams","level":3,"score":0.18862447142601013},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08962497115135193},{"id":"https://openalex.org/C205649164","wikidata":"https://www.wikidata.org/wiki/Q1071","display_name":"Geography","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C13280743","wikidata":"https://www.wikidata.org/wiki/Q131089","display_name":"Geodesy","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.4028/www.scientific.net/kem.443.693","doi":"https://doi.org/10.4028/www.scientific.net/kem.443.693","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.443.693","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.4028/www.scientific.net/kem.443.693","doi":"https://doi.org/10.4028/www.scientific.net/kem.443.693","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.443.693","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1964217440","https://openalex.org/W1982067206","https://openalex.org/W1986462883","https://openalex.org/W2002002551","https://openalex.org/W2009567139","https://openalex.org/W2066480717","https://openalex.org/W2081941672","https://openalex.org/W2088136150","https://openalex.org/W2143886163","https://openalex.org/W6606439037"],"related_works":["https://openalex.org/W2222198375","https://openalex.org/W1973456039","https://openalex.org/W4295249672","https://openalex.org/W2072942599","https://openalex.org/W2467878013","https://openalex.org/W2357532748","https://openalex.org/W3012159460","https://openalex.org/W2361911888","https://openalex.org/W4409046494","https://openalex.org/W2028372613"],"abstract_inverted_index":{"Laser":[0],"micromachining":[1,50],"has":[2,30],"been":[3,31],"widely":[4],"used":[5],"for":[6],"decades":[7],"to":[8,80],"fabricate":[9],"the":[10,25,44,58,68,73,81,85,99],"micro-":[11],"and":[12,17,47,95,104,111],"submicro-component":[13],"structures.":[14],"However,":[15],"thermal":[16],"physical":[18],"damages":[19],"are":[20,108],"crucial":[21],"issues":[22],"associated":[23],"with":[24],"process.":[26],"Underwater":[27],"laser":[28,49,70,96],"ablation":[29],"developed":[32],"as":[33],"a":[34,41],"damage-free":[35],"micro-ablation":[36],"technique.":[37],"In":[38],"this":[39],"paper,":[40],"comparison":[42],"of":[43,51,90],"conventional":[45],"dry":[46],"underwater":[48,69],"silicon":[52],"is":[53,77],"presented.":[54],"It":[55],"shows":[56],"that":[57],"heat":[59],"affected":[60],"zone":[61],"(HAZ)":[62],"can":[63],"be":[64],"reduced":[65,78],"significantly":[66],"in":[67],"process,":[71],"though":[72],"material":[74],"removal":[75],"rate":[76],"due":[79],"energy":[82,97],"loss":[83],"by":[84],"water":[86],"layer.":[87],"The":[88],"effects":[89],"pulse":[91],"frequency,":[92],"traverse":[93],"speed":[94],"on":[98],"obtained":[100],"kerf":[101],"width,":[102],"HAZ":[103],"cut":[105],"surface":[106],"quality":[107],"also":[109],"analyzed":[110],"discussed.":[112]},"counts_by_year":[{"year":2026,"cited_by_count":9},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":2},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":4},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-14T11:04:58.165337","created_date":"2016-06-24T00:00:00"}