{"id":"https://openalex.org/W2021313775","doi":"https://doi.org/10.1539/joh.40.270","title":"Toxicity of Silicon Compounds in Semiconductor Industries","display_name":"Toxicity of Silicon Compounds in Semiconductor Industries","publication_year":1998,"publication_date":"1998-10-01","ids":{"openalex":"https://openalex.org/W2021313775","doi":"https://doi.org/10.1539/joh.40.270","mag":"2021313775"},"language":"en","primary_location":{"id":"doi:10.1539/joh.40.270","doi":"https://doi.org/10.1539/joh.40.270","is_oa":true,"landing_page_url":"https://doi.org/10.1539/joh.40.270","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1539/joh.40.270","source":{"id":"https://openalex.org/S27728379","display_name":"Journal of Occupational Health","issn_l":"1341-9145","issn":["1341-9145","1348-9585"],"is_oa":false,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-scientific","cwts-core","doaj","dongbi-c","doyens","jufo-1","ki-jl-1","medline","norway-1","oarl","poland-40","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Occupational Health","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1539/joh.40.270","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054093764","display_name":"Hiroshi Nakashima","orcid":"https://orcid.org/0000-0001-9678-9234","observed_orcids":["https://orcid.org/0000-0001-9678-9234"]},"institutions":[{"id":"https://openalex.org/I203951103","display_name":"Keio University","ror":"https://ror.org/02kn6nx58","country_code":"JP","type":"education","lineage":["https://openalex.org/I203951103"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Hiroshi Nakashima","raw_affiliation_strings":["Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan","institution_ids":["https://openalex.org/I203951103"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103955499","display_name":"Kazuyuki Omae","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I203951103","display_name":"Keio University","ror":"https://ror.org/02kn6nx58","country_code":"JP","type":"education","lineage":["https://openalex.org/I203951103"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuyuki Omae","raw_affiliation_strings":["Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan","institution_ids":["https://openalex.org/I203951103"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110120187","display_name":"Torn Takebayashi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I203951103","display_name":"Keio University","ror":"https://ror.org/02kn6nx58","country_code":"JP","type":"education","lineage":["https://openalex.org/I203951103"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Torn Takebayashi","raw_affiliation_strings":["Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan","institution_ids":["https://openalex.org/I203951103"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065931601","display_name":"Chizuru Ishizuka","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I203951103","display_name":"Keio University","ror":"https://ror.org/02kn6nx58","country_code":"JP","type":"education","lineage":["https://openalex.org/I203951103"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Chizuru Ishizuka","raw_affiliation_strings":["Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan","institution_ids":["https://openalex.org/I203951103"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110454774","display_name":"Takamoto Uemura","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I203951103","display_name":"Keio University","ror":"https://ror.org/02kn6nx58","country_code":"JP","type":"education","lineage":["https://openalex.org/I203951103"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takamoto Uemura","raw_affiliation_strings":["Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Preventive Medicine and Public Health, School of Medicine, Keio University, 35 Shinanomachi, Shinjuku-ku, Tokyo, 160-8582 Japan","institution_ids":["https://openalex.org/I203951103"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5054093764"],"corresponding_institution_ids":["https://openalex.org/I203951103"],"apc_list":{"value":1250,"currency":"USD","value_usd":1250},"apc_paid":null,"fwci":0.663,"has_fulltext":true,"cited_by_count":48,"citation_normalized_percentile":{"value":0.6608666,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"40","issue":"4","first_page":"270","last_page":"275"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10790","display_name":"Heavy Metal Exposure and Toxicity","score":0.2667999863624573,"subfield":{"id":"https://openalex.org/subfields/2307","display_name":"Health, Toxicology and Mutagenesis"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10790","display_name":"Heavy Metal Exposure and Toxicity","score":0.2667999863624573,"subfield":{"id":"https://openalex.org/subfields/2307","display_name":"Health, Toxicology and Mutagenesis"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13315","display_name":"Occupational Health and Safety in Workplaces","score":0.17090000212192535,"subfield":{"id":"https://openalex.org/subfields/3609","display_name":"Occupational Therapy"},"field":{"id":"https://openalex.org/fields/36","display_name":"Health Professions"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T13840","display_name":"Chemical Safety and Risk Management","score":0.15809999406337738,"subfield":{"id":"https://openalex.org/subfields/1504","display_name":"Chemical Health and Safety"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silane","display_name":"silane","score":0.7950000166893005},{"id":"https://openalex.org/keywords/tetraethyl-orthosilicate","display_name":"tetraethoxysilane","score":0.9940000176429749},{"id":"https://openalex.org/keywords/dichlorosilane","display_name":"dichlorosilane","score":0.9739999771118164},{"id":"https://openalex.org/keywords/silicon-compounds","display_name":"silicon compounds","score":0.8709999918937683},{"id":"https://openalex.org/keywords/semiconductor-industry","display_name":"semiconductor industry","score":0.7440000176429749},{"id":"https://openalex.org/keywords/occupational-exposure","display_name":"occupational exposure","score":0.7149999737739563},{"id":"https://openalex.org/keywords/nephrotoxicity","display_name":"nephrotoxicity","score":0.996999979019165},{"id":"https://openalex.org/keywords/acute-tubular-necrosis","display_name":"acute tubular necrosis","score":0.9470000267028809},{"id":"https://openalex.org/keywords/tubulointerstitial-nephritis","display_name":"interstitial nephritis","score":0.9300000071525574},{"id":"https://openalex.org/keywords/respiratory-irritation","display_name":"respiratory irritation","score":0.7960000038146973},{"id":"https://openalex.org/keywords/particulate-matter","display_name":"particulate matter","score":0.4099999964237213},{"id":"https://openalex.org/keywords/inhalation-toxicity","display_name":"inhalation toxicity","score":0.8510000109672546}],"concepts":[{"id":"https://openalex.org/C2776954882","wikidata":"https://www.wikidata.org/wiki/Q840343","display_name":"Inhalation","level":2,"score":0.7692986726760864},{"id":"https://openalex.org/C2778024649","wikidata":"https://www.wikidata.org/wiki/Q410572","display_name":"Silane","level":2,"score":0.7474852800369263},{"id":"https://openalex.org/C126189478","wikidata":"https://www.wikidata.org/wiki/Q1468324","display_name":"Nephrotoxicity","level":3,"score":0.7261300086975098},{"id":"https://openalex.org/C29730261","wikidata":"https://www.wikidata.org/wiki/Q274160","display_name":"Toxicity","level":2,"score":0.6636152863502502},{"id":"https://openalex.org/C116263406","wikidata":"https://www.wikidata.org/wiki/Q3299024","display_name":"Acute toxicity","level":3,"score":0.5983420014381409},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.4626176655292511},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.405565083026886},{"id":"https://openalex.org/C98274493","wikidata":"https://www.wikidata.org/wiki/Q128406","display_name":"Pharmacology","level":1,"score":0.3473779857158661},{"id":"https://openalex.org/C13965031","wikidata":"https://www.wikidata.org/wiki/Q243545","display_name":"Nuclear chemistry","level":1,"score":0.3411860466003418},{"id":"https://openalex.org/C42219234","wikidata":"https://www.wikidata.org/wiki/Q131130","display_name":"Anesthesia","level":1,"score":0.21377718448638916},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.18758875131607056}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1539/joh.40.270","doi":"https://doi.org/10.1539/joh.40.270","is_oa":true,"landing_page_url":"https://doi.org/10.1539/joh.40.270","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1539/joh.40.270","source":{"id":"https://openalex.org/S27728379","display_name":"Journal of Occupational Health","issn_l":"1341-9145","issn":["1341-9145","1348-9585"],"is_oa":false,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-scientific","cwts-core","doaj","dongbi-c","doyens","jufo-1","ki-jl-1","medline","norway-1","oarl","poland-40","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Occupational Health","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1539/joh.40.270","doi":"https://doi.org/10.1539/joh.40.270","is_oa":true,"landing_page_url":"https://doi.org/10.1539/joh.40.270","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1539/joh.40.270","source":{"id":"https://openalex.org/S27728379","display_name":"Journal of Occupational Health","issn_l":"1341-9145","issn":["1341-9145","1348-9585"],"is_oa":false,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-scientific","cwts-core","doaj","dongbi-c","doyens","jufo-1","ki-jl-1","medline","norway-1","oarl","poland-40","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Occupational Health","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Good health and well-being","score":0.6240000128746033,"id":"https://metadata.un.org/sdg/3"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2021313775.pdf","grobid_xml":"https://content.openalex.org/works/W2021313775.grobid-xml"},"referenced_works_count":11,"referenced_works":["https://openalex.org/W1965848693","https://openalex.org/W1971040981","https://openalex.org/W2011426865","https://openalex.org/W2027055388","https://openalex.org/W2041641526","https://openalex.org/W2065978932","https://openalex.org/W2074577514","https://openalex.org/W2207001427","https://openalex.org/W2318176488","https://openalex.org/W2412420881","https://openalex.org/W2414726096"],"related_works":["https://openalex.org/W1965848693","https://openalex.org/W2041641526","https://openalex.org/W2068904790","https://openalex.org/W2074577514","https://openalex.org/W1971040981","https://openalex.org/W2027055388","https://openalex.org/W7096389767","https://openalex.org/W2011426865","https://openalex.org/W4308834333","https://openalex.org/W2511509968"],"abstract_inverted_index":{"Toxicity":[0],"of":[1,12,19,24,43,97,108,132,216,232,272,303],"Silicon":[2],"Compounds":[3],"in":[4,36,47,83,124,141,187,247,274,300],"Semiconductor":[5],"Industries:":[6],"Hiroshi":[7],"Nakashima,":[8],"et":[9],"al.":[10],"Department":[11],"Preventive":[13],"Medicine":[14],"and":[15,30,52,66,93,111,120,143,167,170,190,214,259,279,289],"Public":[16],"Health,":[17],"School":[18],"Medicine,":[20],"Keio":[21],"University\u2014The":[22],"toxicities":[23],"silane":[25,63,200],"(SiH4),":[26],"tetraethoxysilane":[27],"(Si(OC2H5)4,":[28],"TEOS)":[29],"dichlorosilane":[31],"(SiH2CI2,":[32],"DCS)":[33],"were":[34,86,219],"reviewed":[35],"order":[37],"to":[38,62,88,104,138,243,283,295],"compare":[39],"the":[40,48,98,125,188,197,244,248,301],"toxicological":[41],"properties":[42],"silicon":[44,288],"compounds":[45],"used":[46],"semi\u2010conductor":[49],"industry.":[50],"Silane":[51,119],"TEOS":[53,70,109,156],"showed":[54,130,229],"similar":[55],"toxicities,":[56],"characterized":[57],"by":[58],"nephrotoxicity.":[59],"Mice":[60],"subjected":[61,87,103],"(2500,":[64],"5000":[65,207],"10000":[67,209],"ppm)":[68,72],"or":[69,101,116,165,175,208,225,256,265],"(1000":[71,160,221],"acute":[73,76,90,212,249],"exposure":[74],"developed":[75],"tubular":[77],"necrosis.":[78],"Tubulo\u2010interstitial":[79],"nephritis":[80],"was":[81,179,236,276,281],"seen":[82],"mice":[84],"which":[85,128],"an":[89,237,297],"inhalation":[91,106,194,218,268],"study":[92],"survived":[94],"2":[95,115,163,174,224,264],"wk":[96],"observation":[99],"period":[100],"those":[102,215],"subacute":[105,193,217,260],"studies":[107],"(100":[110],"200":[112,171],"ppm":[113,161,172,192,210,222,251,262],"for":[114,162,173,211,223,252,263],"4":[117,176,226,255,266],"wk).":[118,177,227],"TEOS,":[121],"however,":[122],"differed":[123],"concentration":[126,184],"at":[127,181,206],"they":[129],"signs":[131],"toxicity.":[133],"This":[134],"may":[135],"be":[136],"due":[137],"their":[139,148],"solubility":[140],"water":[142],"other":[144,198],"metabolic":[145,149],"factors,":[146],"but":[147],"pathways":[150],"have":[151],"not":[152],"yet":[153],"been":[154],"elucidated.":[155],"injured":[157],"nasal":[158,202],"mucosa":[159],"h":[164],"more":[166],"50,":[168],"100":[169,191],"It":[178,235],"observed":[180],"a":[182,240],"lower":[183],"than":[185],"nephrotoxicity":[186],"50":[189],"study.":[195,269],"On":[196],"hand,":[199],"caused":[201],"mucosal":[203],"lesions":[204],"only":[205],"inhalation,":[213],"mild":[220],"DCS":[228,273],"another":[230],"type":[231],"adverse":[233],"effect.":[234],"irritant":[238],"and/or":[239],"corrosive":[241],"agent":[242],"respiratory":[245],"tract":[246],"(64":[250],"1,":[253],"2,":[254],"8":[257],"h)":[258],"(32":[261],"wk)":[267],"The":[270],"fate":[271],"air":[275],"also":[277],"studied":[278],"it":[280],"shown":[282],"form":[284],"small":[285],"particles":[286],"including":[287],"chlorine":[290],"(Cl)":[291],"atoms.":[292],"Cl":[293],"seems":[294],"play":[296],"important":[298],"role":[299],"toxicity":[302],"DCS.":[304]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":10},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":4},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":2}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}