{"id":"https://openalex.org/W2020984192","doi":"https://doi.org/10.1016/s0924-4247(97)01627-0","title":"Realization and performance of thin SiO2/SiNx membrane for microheater applications","display_name":"Realization and performance of thin SiO2/SiNx membrane for microheater applications","publication_year":1998,"publication_date":"1998-01-01","ids":{"openalex":"https://openalex.org/W2020984192","doi":"https://doi.org/10.1016/s0924-4247(97)01627-0","mag":"2020984192"},"language":"en","primary_location":{"id":"doi:10.1016/s0924-4247(97)01627-0","doi":"https://doi.org/10.1016/s0924-4247(97)01627-0","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0924-4247(97)01627-0","pdf_url":null,"source":{"id":"https://openalex.org/S16945967","display_name":"Sensors and Actuators A Physical","issn_l":"0924-4247","issn":["0924-4247","1873-3069"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors and Actuators A: Physical","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5028020968","display_name":"Carole Rossi","orcid":"https://orcid.org/0000-0003-3864-7574","observed_orcids":["https://orcid.org/0000-0003-3864-7574"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Carole Rossi","raw_affiliation_strings":["LAAS-CNRS, 7 ave. colonel Roche, F-31077 Toulouse Cedex 4, France","Laboratoire Fournier, 42 rue de Longvic, F-21302 Chen\u00f4ve Cedex, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, 7 ave. colonel Roche, F-31077 Toulouse Cedex 4, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"Laboratoire Fournier, 42 rue de Longvic, F-21302 Chen\u00f4ve Cedex, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108275541","display_name":"Pierre Temple\u2010Boyer","orcid":"https://orcid.org/0000-0003-0875-6956","observed_orcids":["https://orcid.org/0000-0003-0875-6956"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Pierre Temple-Boyer","raw_affiliation_strings":["LAAS-CNRS, 7 ave. colonel Roche, F-31077 Toulouse Cedex 4, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, 7 ave. colonel Roche, F-31077 Toulouse Cedex 4, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I190497903"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5021396335","display_name":"Daniel Esteve","orcid":"https://orcid.org/0000-0003-4089-4582","observed_orcids":["https://orcid.org/0000-0003-4089-4582"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Daniel Est\u00e8ve","raw_affiliation_strings":["LAAS-CNRS, 7 ave. colonel Roche, F-31077 Toulouse Cedex 4, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, 7 ave. colonel Roche, F-31077 Toulouse Cedex 4, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I190497903"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5028020968"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I190497903"],"apc_list":{"value":3750,"currency":"USD","value_usd":3750},"apc_paid":null,"fwci":6.1487,"has_fulltext":false,"cited_by_count":123,"citation_normalized_percentile":{"value":0.96449484,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":91,"max":99},"biblio":{"volume":"64","issue":"3","first_page":"241","last_page":"245"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10998","display_name":"Heat Transfer and Optimization","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"silicon nitride","score":0.6240000128746033},{"id":"https://openalex.org/keywords/polysilicon-resistors","display_name":"polysilicon resistors","score":0.8029999732971191},{"id":"https://openalex.org/keywords/low-power-consumption","display_name":"low power consumption","score":0.6570000052452087},{"id":"https://openalex.org/keywords/thermal-actuation","display_name":"thermal actuation","score":0.5210000276565552},{"id":"https://openalex.org/keywords/fabrication-yield","display_name":"fabrication yield","score":0.6480000019073486},{"id":"https://openalex.org/keywords/mems","display_name":"MEMS","score":0.45399999618530273}],"concepts":[{"id":"https://openalex.org/C2779426163","wikidata":"https://www.wikidata.org/wiki/Q17123760","display_name":"Microheater","level":4,"score":0.983137845993042},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.6650960445404053},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6637513041496277},{"id":"https://openalex.org/C151662897","wikidata":"https://www.wikidata.org/wiki/Q610112","display_name":"Heating element","level":2,"score":0.6006807088851929},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5734565854072571},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5580903887748718},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5558677911758423},{"id":"https://openalex.org/C2984118289","wikidata":"https://www.wikidata.org/wiki/Q29954","display_name":"Power consumption","level":3,"score":0.550101637840271},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.520991861820221},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4965589642524719},{"id":"https://openalex.org/C2781089630","wikidata":"https://www.wikidata.org/wiki/Q21856745","display_name":"Realization (probability)","level":2,"score":0.47436603903770447},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4389963448047638},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.35673636198043823},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.34562385082244873},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.29483240842819214},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19289886951446533},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1487991213798523},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.09312379360198975},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/s0924-4247(97)01627-0","doi":"https://doi.org/10.1016/s0924-4247(97)01627-0","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0924-4247(97)01627-0","pdf_url":null,"source":{"id":"https://openalex.org/S16945967","display_name":"Sensors and Actuators A Physical","issn_l":"0924-4247","issn":["0924-4247","1873-3069"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors and Actuators A: Physical","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1965377417","https://openalex.org/W1987820481","https://openalex.org/W2006539978","https://openalex.org/W2006978784","https://openalex.org/W2012745216","https://openalex.org/W2025980613","https://openalex.org/W2028802010","https://openalex.org/W2029701699","https://openalex.org/W2086415505","https://openalex.org/W2102367155","https://openalex.org/W2128283957","https://openalex.org/W2156606395","https://openalex.org/W2179402527","https://openalex.org/W3006791383","https://openalex.org/W3133668973"],"related_works":["https://openalex.org/W2090418883","https://openalex.org/W2068120949","https://openalex.org/W2002915684","https://openalex.org/W1987187567","https://openalex.org/W2725735902","https://openalex.org/W3006791383","https://openalex.org/W3118874101","https://openalex.org/W1974423034","https://openalex.org/W2075288603","https://openalex.org/W339051856"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":9},{"year":2017,"cited_by_count":7},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":6},{"year":2014,"cited_by_count":5},{"year":2013,"cited_by_count":6},{"year":2012,"cited_by_count":3}],"updated_date":"2026-11-11T12:16:26.678958","created_date":"2016-06-24T00:00:00"}