{"id":"https://openalex.org/W2019867189","doi":"https://doi.org/10.1134/1.1507278","title":"Variations in the properties of an implantation-synthesized SixNy-Si heterosystem as a result of thermal and ion-beam treatments","display_name":"Variations in the properties of an implantation-synthesized SixNy-Si heterosystem as a result of thermal and ion-beam treatments","publication_year":2002,"publication_date":"2002-09-01","ids":{"openalex":"https://openalex.org/W2019867189","doi":"https://doi.org/10.1134/1.1507278","mag":"2019867189"},"language":"en","primary_location":{"id":"doi:10.1134/1.1507278","doi":"https://doi.org/10.1134/1.1507278","is_oa":false,"landing_page_url":"https://doi.org/10.1134/1.1507278","pdf_url":null,"source":{"id":"https://openalex.org/S66392791","display_name":"Semiconductors","issn_l":"1063-7826","issn":["1063-7826","1090-6479"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["dongbi-d","jufo-1","norway-1","poland-70"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Semiconductors","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5030156387","display_name":"\u0412. \u0412. \u041a\u0430\u0440\u0437\u0430\u043d\u043e\u0432","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I79563041","display_name":"N. I. Lobachevsky State University of Nizhny Novgorod","ror":"https://ror.org/01bb1zm18","country_code":"RU","type":"education","lineage":["https://openalex.org/I79563041"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"V. V. Karzanov","raw_affiliation_strings":["Nizhni Novgorod State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia","Nizhni Novgorod State University, Nizhni Novgorod, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nizhni Novgorod State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia","institution_ids":[]},{"raw_affiliation_string":"Nizhni Novgorod State University, Nizhni Novgorod, Russia","institution_ids":["https://openalex.org/I79563041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036656401","display_name":"K. A. Markov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I79563041","display_name":"N. I. Lobachevsky State University of Nizhny Novgorod","ror":"https://ror.org/01bb1zm18","country_code":"RU","type":"education","lineage":["https://openalex.org/I79563041"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"K. A. Markov","raw_affiliation_strings":["Nizhni Novgorod State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia","Nizhni Novgorod State University, Nizhni Novgorod, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nizhni Novgorod State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia","institution_ids":[]},{"raw_affiliation_string":"Nizhni Novgorod State University, Nizhni Novgorod, Russia","institution_ids":["https://openalex.org/I79563041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074484666","display_name":"V. V. Sdobnyakov","orcid":"https://orcid.org/0000-0001-5906-4138","observed_orcids":["https://orcid.org/0000-0001-5906-4138"]},"institutions":[{"id":"https://openalex.org/I79563041","display_name":"N. I. Lobachevsky State University of Nizhny Novgorod","ror":"https://ror.org/01bb1zm18","country_code":"RU","type":"education","lineage":["https://openalex.org/I79563041"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"V. V. Sdobnyakov","raw_affiliation_strings":["Nizhni Novgorod State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia","Nizhni Novgorod State University, Nizhni Novgorod, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nizhni Novgorod State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia","institution_ids":[]},{"raw_affiliation_string":"Nizhni Novgorod State University, Nizhni Novgorod, Russia","institution_ids":["https://openalex.org/I79563041"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029109308","display_name":"Evgeny S. Demidov","orcid":"https://orcid.org/0000-0002-0705-9924","observed_orcids":["https://orcid.org/0000-0002-0705-9924"]},"institutions":[{"id":"https://openalex.org/I79563041","display_name":"N. I. Lobachevsky State University of Nizhny Novgorod","ror":"https://ror.org/01bb1zm18","country_code":"RU","type":"education","lineage":["https://openalex.org/I79563041"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"E. S. Demidov","raw_affiliation_strings":["Nizhni Novgorod State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia","Nizhni Novgorod State University, Nizhni Novgorod, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nizhni Novgorod State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia","institution_ids":[]},{"raw_affiliation_string":"Nizhni Novgorod State University, Nizhni Novgorod, Russia","institution_ids":["https://openalex.org/I79563041"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5030156387"],"corresponding_institution_ids":["https://openalex.org/I79563041"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"36","issue":"9","first_page":"985","last_page":"989"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.41769999265670776,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.41769999265670776,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.41190001368522644,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.09749999642372131,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-nitride-layer","display_name":"silicon nitride layer","score":0.6850000023841858},{"id":"https://openalex.org/keywords/ion-implantation","display_name":"ion implantation","score":0.7279999852180481},{"id":"https://openalex.org/keywords/argon-ion-bombardment","display_name":"argon ion bombardment","score":0.7519999742507935},{"id":"https://openalex.org/keywords/heat-treatment","display_name":"heat treatment","score":0.5609999895095825},{"id":"https://openalex.org/keywords/neon-ion-irradiation","display_name":"neon ion irradiation","score":0.7860000133514404},{"id":"https://openalex.org/keywords/silicon-ion-irradiation","display_name":"silicon ion irradiation","score":0.9879999756813049},{"id":"https://openalex.org/keywords/insulating-layer","display_name":"insulating layer","score":0.5989999771118164},{"id":"https://openalex.org/keywords/capacitance","display_name":"capacitance","score":0.6359999775886536},{"id":"https://openalex.org/keywords/current-voltage-characteristics","display_name":"current-voltage characteristics","score":0.9750000238418579}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7925333976745605},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7319872379302979},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.673687219619751},{"id":"https://openalex.org/C547737533","wikidata":"https://www.wikidata.org/wiki/Q696","display_name":"Argon","level":2,"score":0.6632471084594727},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6413414478302002},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.582835853099823},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.5456106066703796},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.5017614364624023},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.4828072786331177},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.45132461190223694},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3859063386917114},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.21314099431037903},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18186095356941223},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1134/1.1507278","doi":"https://doi.org/10.1134/1.1507278","is_oa":false,"landing_page_url":"https://doi.org/10.1134/1.1507278","pdf_url":null,"source":{"id":"https://openalex.org/S66392791","display_name":"Semiconductors","issn_l":"1063-7826","issn":["1063-7826","1090-6479"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["dongbi-d","jufo-1","norway-1","poland-70"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Semiconductors","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2160028505","https://openalex.org/W4206123979"],"related_works":["https://openalex.org/W2051977301","https://openalex.org/W2049741746","https://openalex.org/W2090289304","https://openalex.org/W2009529057","https://openalex.org/W2802657064","https://openalex.org/W2018554299","https://openalex.org/W2015937380","https://openalex.org/W2046798069","https://openalex.org/W2789808081","https://openalex.org/W1988637837"],"abstract_inverted_index":{"Transmission":[0],"electron":[1],"microscopy,":[2],"infrared":[3],"spectroscopy,":[4],"and":[5,11,22,39,103],"the":[6,17,23,29,43,54,64,68,74,79,88,109,118],"measurements":[7],"of":[8,19,26,28,32,45,57,67,81,90,113,117,124],"current-voltage":[9],"characteristics":[10],"capacitance":[12],"were":[13],"used":[14],"to":[15,71],"study":[16],"influence":[18],"heat":[20],"treatment":[21],"long-range":[24,119],"effect":[25,120],"irradiation":[27,100,123],"rear":[30],"side":[31,56],"an":[33,46],"Si":[34,40,47,91],"wafer":[35,69],"with":[36,101,108,126],"Ar,":[37],"Ne,":[38],"ions":[41,105],"on":[42],"state":[44],"x":[48,92],"N":[49,93],"y":[50,94],"layer":[51],"synthesized":[52],"at":[53],"front":[55],"this":[58],"wafer.":[59],"It":[60],"is":[61,73,106],"ascertained":[62],"that":[63,87],"argon-ion":[65],"bombardment":[66],"heated":[70],"500\u00b0C":[72],"most":[75],"effective":[76],"method":[77],"for":[78],"formation":[80],"insulating":[82],"silicon-nitride":[83],"layers.":[84],"The":[85],"fact":[86],"properties":[89],"layers":[95],"are":[96],"scarcely":[97],"affected":[98],"by":[99,122],"neon":[102],"silicon":[104,125],"consistent":[107],"previously":[110],"suggested":[111],"model":[112],"a":[114],"spontaneous-acoustic":[115],"mechanism":[116],"produced":[121],"argon":[127],"ions.":[128]},"counts_by_year":[],"updated_date":"2026-10-01T08:54:57.152042","created_date":"2016-06-24T00:00:00"}