{"id":"https://openalex.org/W2019166133","doi":"https://doi.org/10.1143/jjap.32.2601","title":"Hydrogen Passivation of Polysilicon Thin-Film Transistors by Electron Cyclotron Resonance Plasma","display_name":"Hydrogen Passivation of Polysilicon Thin-Film Transistors by Electron Cyclotron Resonance Plasma","publication_year":1993,"publication_date":"1993-06-01","ids":{"openalex":"https://openalex.org/W2019166133","doi":"https://doi.org/10.1143/jjap.32.2601","mag":"2019166133"},"language":"en","primary_location":{"id":"doi:10.1143/jjap.32.2601","doi":"https://doi.org/10.1143/jjap.32.2601","is_oa":false,"landing_page_url":"https://doi.org/10.1143/jjap.32.2601","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5076175106","display_name":"Kris Baert","orcid":"https://orcid.org/0000-0001-8700-0879","observed_orcids":["https://orcid.org/0000-0001-8700-0879"]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kris Baert","raw_affiliation_strings":["Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661","institution_ids":["https://openalex.org/I4210133125"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048405445","display_name":"H. Murai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroyuki Murai","raw_affiliation_strings":["Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661","institution_ids":["https://openalex.org/I4210133125"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037417355","display_name":"Kazuhiro Kobayashi","orcid":"https://orcid.org/0000-0001-7801-147X","observed_orcids":["https://orcid.org/0000-0001-7801-147X"]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuhiro Kobayashi","raw_affiliation_strings":["Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661","institution_ids":["https://openalex.org/I4210133125"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087996994","display_name":"H. Namizaki","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hirofumi Namizaki Hirofumi Namizaki","raw_affiliation_strings":["Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661","institution_ids":["https://openalex.org/I4210133125"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113606581","display_name":"Masahiro Nunoshita Masahiro Nunoshita","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133125","display_name":"Mitsubishi Electric (Japan)","ror":"https://ror.org/033y26782","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210133125"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahiro Nunoshita Masahiro Nunoshita","raw_affiliation_strings":["Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Display and Electronic Devices Department, Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8-chome, Amagasaki, Hyogo 661","institution_ids":["https://openalex.org/I4210133125"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210133125"],"apc_list":{"value":2210,"currency":"USD","value_usd":2210},"apc_paid":null,"fwci":4.4497,"has_fulltext":false,"cited_by_count":31,"citation_normalized_percentile":{"value":0.9392715,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"32","issue":"6R","first_page":"2601","last_page":"2601"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9843999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9843999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.00430000014603138,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.0019000000320374966,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polycrystalline-silicon-thin-film-transistors","display_name":"polycrystalline silicon thin-film transistors","score":0.9610000252723694},{"id":"https://openalex.org/keywords/hydrogen-passivation","display_name":"hydrogen passivation","score":0.9269999861717224},{"id":"https://openalex.org/keywords/electron-cyclotron-resonance-plasma","display_name":"electron cyclotron resonance plasma","score":0.9330000281333923},{"id":"https://openalex.org/keywords/hydrogen-plasma","display_name":"hydrogen plasma","score":0.7070000171661377},{"id":"https://openalex.org/keywords/hydrogenation","display_name":"hydrogenation","score":0.6660000085830688},{"id":"https://openalex.org/keywords/on-off-ratio","display_name":"on/off current ratio","score":0.7559999823570251},{"id":"https://openalex.org/keywords/substrate-temperature","display_name":"substrate temperature","score":0.7509999871253967},{"id":"https://openalex.org/keywords/hydrogen-ion-bombardment","display_name":"hydrogen ion bombardment","score":0.7839999794960022},{"id":"https://openalex.org/keywords/low-pressure-plasma","display_name":"low-pressure plasma","score":0.531000018119812}],"concepts":[{"id":"https://openalex.org/C175361016","wikidata":"https://www.wikidata.org/wiki/Q245591","display_name":"Electron cyclotron resonance","level":3,"score":0.7947428226470947},{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.7731212377548218},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.7426780462265015},{"id":"https://openalex.org/C87359718","wikidata":"https://www.wikidata.org/wiki/Q1271916","display_name":"Thin-film transistor","level":3,"score":0.6838441491127014},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6324459910392761},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6155146956443787},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4143190383911133},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4096683859825134},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.363894522190094},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.24691176414489746},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.12456116080284119},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.11912071704864502},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1143/jjap.32.2601","doi":"https://doi.org/10.1143/jjap.32.2601","is_oa":false,"landing_page_url":"https://doi.org/10.1143/jjap.32.2601","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1653013406","https://openalex.org/W1974851488","https://openalex.org/W1979961659","https://openalex.org/W1981541018","https://openalex.org/W2022051799","https://openalex.org/W2024245044","https://openalex.org/W2039074026","https://openalex.org/W2051218054","https://openalex.org/W2064323891","https://openalex.org/W2065660075","https://openalex.org/W2079986754","https://openalex.org/W2126862575","https://openalex.org/W2168186706","https://openalex.org/W4301243221"],"related_works":["https://openalex.org/W142733497","https://openalex.org/W2955980237","https://openalex.org/W2142107764","https://openalex.org/W2031914163","https://openalex.org/W2090348128","https://openalex.org/W2024245044","https://openalex.org/W2019617286","https://openalex.org/W2023145751","https://openalex.org/W2128030128","https://openalex.org/W2046022273"],"abstract_inverted_index":{"We":[0],"have":[1],"investigated":[2],"the":[3,30,33,44,47,53,62,103,107,112],"method":[4],"of":[5,7,29,40,49,72,111,131],"hydrogenation":[6,108],"polysilicon":[8,98],"thin-film":[9],"transistors":[10],"(TFT)":[11],"by":[12,52,75,86],"electron":[13],"cyclotron":[14],"resonance":[15],"(ECR)":[16],"plasma.":[17,96],"It":[18],"is":[19,81],"found":[20],"that":[21,84],"with":[22,122],"decreasing":[23],"pressure":[24],"(1.5":[25],"to":[26,38,58,102],"0.35":[27],"mTorr)":[28],"hydrogen":[31,41,50,73,79,95,105,137],"plasma,":[32,106],"substrate":[34],"temperature":[35],"rises":[36],"due":[37],"bombardment":[39],"ions.":[42],"At":[43],"same":[45],"time,":[46],"amount":[48,71],"supplied":[51,74,85],"ECR":[54,78,104,136],"plasma":[55,80],"increases.":[56],"Due":[57],"these":[59],"two":[60],"effects,":[61],"passivation":[63],"proceeds":[64],"more":[65],"quickly":[66],"under":[67],"low":[68],"pressure.":[69],"The":[70],"a":[76],"low-pressure":[77],"higher":[82],"than":[83],"other":[87],"means":[88],"such":[89,135],"as":[90],"Al":[91],"sintering":[92],"or":[93],"rf":[94],"When":[97],"TFTs":[99,121],"are":[100],"exposed":[101],"reduces":[109],"75%":[110],"electrically":[113],"active":[114],"defect":[115],"states":[116],"in":[117],"15":[118],"min.":[119],"Polysilicon":[120],"an":[123,127],"offset-drain":[124],"structure":[125],"reached":[126],"on/off":[128],"current":[129],"ratio":[130],"8":[132],"decades":[133],"after":[134],"passivation.":[138]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-08-21T09:56:20.448147","created_date":"2016-06-24T00:00:00"}