{"id":"https://openalex.org/W2018984077","doi":"https://doi.org/10.1109/ultsym.2011.0436","title":"Micromachining techniques in developing high frequency piezoelectric composite ultrasound array transducers","display_name":"Micromachining techniques in developing high frequency piezoelectric composite ultrasound array transducers","publication_year":2011,"publication_date":"2011-10-01","ids":{"openalex":"https://openalex.org/W2018984077","doi":"https://doi.org/10.1109/ultsym.2011.0436","mag":"2018984077"},"language":"en","primary_location":{"id":"doi:10.1109/ultsym.2011.0436","doi":"https://doi.org/10.1109/ultsym.2011.0436","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ultsym.2011.0436","pdf_url":null,"source":{"id":"https://openalex.org/S4393917990","display_name":"IEEE International Ultrasonics Symposium","issn_l":"1948-5719","issn":["1948-5719"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International Ultrasonics Symposium","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015972750","display_name":"C. G. Liu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210097931","display_name":"Geospace Research (United States)","ror":"https://ror.org/011vw2696","country_code":"US","type":"company","lineage":["https://openalex.org/I4210097931"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. G. Liu","raw_affiliation_strings":["Geospace Research, Inc., El Segundo, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Geospace Research, Inc., El Segundo, CA, USA","institution_ids":["https://openalex.org/I4210097931"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081904325","display_name":"Frank T. Djuth","orcid":"https://orcid.org/0000-0001-6529-0713","observed_orcids":["https://orcid.org/0000-0001-6529-0713"]},"institutions":[{"id":"https://openalex.org/I4210097931","display_name":"Geospace Research (United States)","ror":"https://ror.org/011vw2696","country_code":"US","type":"company","lineage":["https://openalex.org/I4210097931"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"F. T. Djuth","raw_affiliation_strings":["Geospace Research, Inc., El Segundo, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Geospace Research, Inc., El Segundo, CA, USA","institution_ids":["https://openalex.org/I4210097931"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081250646","display_name":"Qifa Zhou","orcid":"https://orcid.org/0000-0003-1527-3020","observed_orcids":["https://orcid.org/0000-0003-1527-3020"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Q. F. Zhou","raw_affiliation_strings":["Biomedical Engineering, USC, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Biomedical Engineering, USC, CA, USA","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110272846","display_name":"K. K. Shung","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. K. Shung","raw_affiliation_strings":["Biomedical Engineering, USC, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Biomedical Engineering, USC, CA, USA","institution_ids":["https://openalex.org/I1174212"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.14007942,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1747","last_page":"1750"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.8949999809265137,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.8949999809265137,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.03869999945163727,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.035599999129772186,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/micromachining","display_name":"micromachining","score":0.949999988079071},{"id":"https://openalex.org/keywords/high-frequency-ultrasound","display_name":"high-frequency ultrasound","score":0.7580000162124634},{"id":"https://openalex.org/keywords/transducer-fabrication","display_name":"transducer fabrication","score":0.6389999985694885}],"concepts":[{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.8576515913009644},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.731775164604187},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.7206300497055054},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7017126679420471},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.6491747498512268},{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.6408852338790894},{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.6194561719894409},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5635656118392944},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.556675910949707},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3397887051105499},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3335641026496887},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19983556866645813},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.08061566948890686},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ultsym.2011.0436","doi":"https://doi.org/10.1109/ultsym.2011.0436","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ultsym.2011.0436","pdf_url":null,"source":{"id":"https://openalex.org/S4393917990","display_name":"IEEE International Ultrasonics Symposium","issn_l":"1948-5719","issn":["1948-5719"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International Ultrasonics Symposium","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"display_name":"Affordable and clean energy","score":0.46000000834465027,"id":"https://metadata.un.org/sdg/7"}],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320332161","display_name":"National Institutes of Health","ror":"https://ror.org/01cwqze88"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2101668378","https://openalex.org/W2122016971","https://openalex.org/W2125399104","https://openalex.org/W2141402885","https://openalex.org/W2159822586","https://openalex.org/W2171281935"],"related_works":["https://openalex.org/W2071456588","https://openalex.org/W2017264519","https://openalex.org/W2011416513","https://openalex.org/W2533856288","https://openalex.org/W2161706258","https://openalex.org/W2765807590","https://openalex.org/W7099681520","https://openalex.org/W2074667011","https://openalex.org/W2128672365","https://openalex.org/W2168111368"],"abstract_inverted_index":{"The":[0,100],"Series":[1],"of":[2,14,30,32,97,103],"micromachining":[3,36],"techniques":[4,37],"have":[5],"systematically":[6],"been":[7],"developed":[8,110],"in":[9,27,40,116],"this":[10],"paper":[11],"for":[12,57],"fabrication":[13],"high":[15,118],"frequency":[16,96,119],"piezoelectric":[17,42],"composite":[18,69],"ultrasonic":[19],"array":[20,33,58,70,75,79,121],"transducers.":[21,122],"According":[22],"to":[23,48],"the":[24,49,64,95,109],"specific":[25],"requirements":[26],"different":[28,35],"stages":[29],"production":[31],"transducers,":[34],"are":[38],"employed":[39],"fabricating":[41],"active":[43],"material,":[44],"attaching":[45],"backing":[46],"material":[47],"transducer,":[50,71],"and":[51,77,83,90],"making":[52],"an":[53],"electric":[54,60],"interconnection":[55],"board":[56],"elements":[59,76,89,93],"connection.":[61],"To":[62],"prove":[63],"feasibility,":[65],"a":[66],"PMN-PT/epoxy":[67],"1-3":[68],"which":[72,85],"includes":[73],"2-dimensional":[74],"annular":[78],"elements,":[80],"was":[81],"designed":[82],"produced,":[84],"has":[86],"64":[87],"2-D":[88],"5":[91],"ring":[92],"with":[94],"60":[98],"MHz.":[99],"experimental":[101],"results":[102],"some":[104],"key":[105],"parameters":[106],"proved":[107],"that":[108],"processing":[111],"methods":[112],"can":[113],"be":[114],"applied":[115],"producing":[117],"ultrasound":[120]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}