{"id":"https://openalex.org/W2018803891","doi":"https://doi.org/10.1116/1.573965","title":"Effect of measuring conditions on the accuracy of a spinning rotor gauge","display_name":"Effect of measuring conditions on the accuracy of a spinning rotor gauge","publication_year":1986,"publication_date":"1986-05-01","ids":{"openalex":"https://openalex.org/W2018803891","doi":"https://doi.org/10.1116/1.573965","mag":"2018803891"},"language":"en","primary_location":{"id":"doi:10.1116/1.573965","doi":"https://doi.org/10.1116/1.573965","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.573965","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5062729944","display_name":"Masahiro Hirata","orcid":"https://orcid.org/0000-0001-9211-0511","observed_orcids":["https://orcid.org/0000-0001-9211-0511"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Hirata","raw_affiliation_strings":["Electrotechnical Laboratory, 1-1-4 Umezono, Sakura-mura, Niihari-gun, Ibaraki, 305 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrotechnical Laboratory, 1-1-4 Umezono, Sakura-mura, Niihari-gun, Ibaraki, 305 Japan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080452450","display_name":"Hideaki Isogai","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Isogai","raw_affiliation_strings":["Electrotechnical Laboratory, 1-1-4 Umezono, Sakura-mura, Niihari-gun, Ibaraki, 305 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrotechnical Laboratory, 1-1-4 Umezono, Sakura-mura, Niihari-gun, Ibaraki, 305 Japan","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5007971940","display_name":"Masashi ONO","orcid":"https://orcid.org/0000-0003-0568-7297","observed_orcids":["https://orcid.org/0000-0003-0568-7297"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Ono","raw_affiliation_strings":["Electrotechnical Laboratory, 1-1-4 Umezono, Sakura-mura, Niihari-gun, Ibaraki, 305 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrotechnical Laboratory, 1-1-4 Umezono, Sakura-mura, Niihari-gun, Ibaraki, 305 Japan","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.2098,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.91837782,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":null,"biblio":{"volume":"4","issue":"3","first_page":"1724","last_page":"1727"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.8428000211715698,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.8428000211715698,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.04639999940991402,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.027799999341368675,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/spinning-rotor-gauge","display_name":"spinning rotor gauge","score":0.9929999709129333},{"id":"https://openalex.org/keywords/low-pressure-gauges","display_name":"low-pressure gauges","score":0.5009999871253967},{"id":"https://openalex.org/keywords/gauge-accuracy","display_name":"gauge accuracy","score":0.5400000214576721},{"id":"https://openalex.org/keywords/nitrogen","display_name":"nitrogen","score":0.5830000042915344},{"id":"https://openalex.org/keywords/angular-deviation","display_name":"angular deviation","score":0.4480000138282776},{"id":"https://openalex.org/keywords/vibration-amplitude","display_name":"vibration amplitude","score":0.6449999809265137},{"id":"https://openalex.org/keywords/vibration-frequency","display_name":"vibration frequency","score":0.871999979019165}],"concepts":[{"id":"https://openalex.org/C154815118","wikidata":"https://www.wikidata.org/wiki/Q453762","display_name":"Spinning","level":2,"score":0.6216229796409607},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.6173583269119263},{"id":"https://openalex.org/C40976572","wikidata":"https://www.wikidata.org/wiki/Q2330873","display_name":"Gauge (firearms)","level":2,"score":0.6087955236434937},{"id":"https://openalex.org/C22679943","wikidata":"https://www.wikidata.org/wiki/Q159375","display_name":"Standard deviation","level":2,"score":0.5179359316825867},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.48769697546958923},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4438546597957611},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.35930687189102173},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.35675913095474243},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.33544737100601196},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2835920751094818},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2794169783592224},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1946551501750946},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.16393211483955383},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.10026443004608154},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.06479427218437195},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.573965","doi":"https://doi.org/10.1116/1.573965","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.573965","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2317051922","https://openalex.org/W1964530436","https://openalex.org/W2320394169","https://openalex.org/W2335457889","https://openalex.org/W2034064815","https://openalex.org/W2069541077","https://openalex.org/W1991416517","https://openalex.org/W2024852783","https://openalex.org/W2077831245","https://openalex.org/W3119253494"],"abstract_inverted_index":{"The":[0,14,30,55,69,86],"performance":[1],"of":[2,32,35,40,57,72,76,83,89,106,135,147],"a":[3,41,45,132],"spinning":[4],"rotor":[5],"gauge":[6,37,43,78,90,108],"was":[7,18,63,79,126],"measured":[8],"for":[9,66],"nitrogen":[10],"under":[11],"various":[12],"conditions.":[13],"effective":[15],"accommodation":[16],"coefficient":[17],"determined":[19],"to":[20,38,52,96,128,131],"be":[21,129],"1.05":[22],"by":[23,81,118],"comparison":[24],"with":[25],"the":[26,33,36,58,73,77,93,104,107,115,136,139,145],"standard":[27],"McLeod":[28],"gauge.":[29],"ratio":[31,59],"reading":[34],"that":[39],"diaphragm":[42],"showed":[44],"variation":[46,134],"\u00b11%":[47,65],"at":[48,60,109],"pressures":[49,110],"from":[50,121],"0.1":[51],"10":[53],"Pa.":[54],"deviation":[56,88],"0.3":[61],"Pa":[62,98,120],"within":[64],"7":[67],"months.":[68],"lower":[70],"limit":[71],"measuring":[74],"pressure":[75],"affected":[80],"fluctuations":[82],"its":[84,122,152],"offset.":[85],"angular":[87],"positioning":[91],"changed":[92,117],"offset":[94,116,140],"up":[95],"10\u22123":[97],"(nitrogen":[99],"equivalent).":[100],"Just":[101],"after":[102],"starting":[103],"operation":[105],"less":[111],"than":[112],"10\u22125":[113],"Pa,":[114],"\u00b13\u00d710\u22125":[119],"final":[123],"value.":[124],"This":[125],"revealed":[127],"due":[130],"temperature":[133],"rotor.":[137],"And":[138],"depended":[141],"not":[142],"only":[143],"on":[144,151],"amplitude":[146],"vibration":[148],"but":[149],"also":[150],"frequency.":[153]},"counts_by_year":[],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}