{"id":"https://openalex.org/W2018725438","doi":"https://doi.org/10.1117/12.524917","title":"Low-power MOEMS components for active optical systems","display_name":"Low-power MOEMS components for active optical systems","publication_year":2004,"publication_date":"2004-01-24","ids":{"openalex":"https://openalex.org/W2018725438","doi":"https://doi.org/10.1117/12.524917","mag":"2018725438"},"language":"en","primary_location":{"id":"doi:10.1117/12.524917","doi":"https://doi.org/10.1117/12.524917","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.524917","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5055059104","display_name":"James Castracane","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I392282","display_name":"University at Albany, State University of New York","ror":"https://ror.org/012zs8222","country_code":"US","type":"education","lineage":["https://openalex.org/I392282"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"James Castracane","raw_affiliation_strings":["Univ. at Albany (United States)","University at Albany, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. at Albany (United States)","institution_ids":["https://openalex.org/I392282"]},{"raw_affiliation_string":"University at Albany, United States","institution_ids":["https://openalex.org/I392282"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103024738","display_name":"Dong Yan","orcid":"https://orcid.org/0000-0001-7973-256X","observed_orcids":["https://orcid.org/0000-0001-7973-256X"]},"institutions":[{"id":"https://openalex.org/I392282","display_name":"University at Albany, State University of New York","ror":"https://ror.org/012zs8222","country_code":"US","type":"education","lineage":["https://openalex.org/I392282"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dong Yan","raw_affiliation_strings":["Univ. at Albany (United States)","University at Albany, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. at Albany (United States)","institution_ids":["https://openalex.org/I392282"]},{"raw_affiliation_string":"University at Albany, United States","institution_ids":["https://openalex.org/I392282"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016362584","display_name":"Seth Madison","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I392282","display_name":"University at Albany, State University of New York","ror":"https://ror.org/012zs8222","country_code":"US","type":"education","lineage":["https://openalex.org/I392282"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Seth Madison","raw_affiliation_strings":["Univ. at Albany (United States)","University at Albany, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. at Albany (United States)","institution_ids":["https://openalex.org/I392282"]},{"raw_affiliation_string":"University at Albany, United States","institution_ids":["https://openalex.org/I392282"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102207280","display_name":"Bai Xu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I392282","display_name":"University at Albany, State University of New York","ror":"https://ror.org/012zs8222","country_code":"US","type":"education","lineage":["https://openalex.org/I392282"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Bai Xu","raw_affiliation_strings":["Univ. at Albany (United States)","University at Albany, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. at Albany (United States)","institution_ids":["https://openalex.org/I392282"]},{"raw_affiliation_string":"University at Albany, United States","institution_ids":["https://openalex.org/I392282"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I392282"],"apc_list":null,"apc_paid":null,"fwci":0.4135,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.57134474,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"5346","issue":null,"first_page":"73","last_page":"73"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/moems","display_name":"MOEMS","score":0.9860000014305115},{"id":"https://openalex.org/keywords/active-optics","display_name":"active optics","score":0.8539999723434448},{"id":"https://openalex.org/keywords/soi-process","display_name":"SOI process","score":0.8450000286102295},{"id":"https://openalex.org/keywords/reflection-control","display_name":"reflection control","score":0.5709999799728394},{"id":"https://openalex.org/keywords/electromechanical-characterization","display_name":"electromechanical characterization","score":0.7900000214576721},{"id":"https://openalex.org/keywords/wafer-level-integration","display_name":"wafer-level integration","score":0.8370000123977661}],"concepts":[{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.4760061204433441},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.43768149614334106},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.34644412994384766},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3194565773010254},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18967276811599731},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.524917","doi":"https://doi.org/10.1117/12.524917","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.524917","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"score":0.5199999809265137,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320332911","display_name":"University at Albany","ror":"https://ror.org/012zs8222"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1970837889","https://openalex.org/W2090634658","https://openalex.org/W2015725765","https://openalex.org/W1990604620","https://openalex.org/W2338819349","https://openalex.org/W118167712","https://openalex.org/W1997528662","https://openalex.org/W2170594186","https://openalex.org/W1992881859","https://openalex.org/W2118751963"],"abstract_inverted_index":{"The":[0,175],"eventual,":[1],"widespread":[2],"insertion":[3],"of":[4,34,45,54,78,115,126,136,158,178,185,195,202,217,234,250,272,286,295,298],"Micro-Opto-Electro-Mechanical":[5],"Systems":[6],"(MOEMS)":[7],"into":[8,37],"the":[9,14,32,75,79,84,107,113,131,134,140,145,156,159,183,196,218,224,245,265,287,296,307],"marketplace":[10],"rests":[11],"fundamentally":[12],"on":[13,74,144,155,182,264],"ability":[15],"to":[16,61,98,161,168,222,291],"produce":[17],"viable":[18],"components":[19],"that":[20],"maximize":[21],"optical":[22,35,235],"performance":[23,173],"while":[24],"minimizing":[25],"power":[26],"consumption":[27],"and":[28,68,101,128,165,204,231,247,268,300],"size.":[29],"In":[30,104],"addition,":[31],"incorporation":[33],"reconfigurability":[36],"custom":[38],"MOEMS":[39,80,108,299],"devices":[40],"offers":[41],"an":[42,270,293],"extra":[43],"degree":[44],"freedom":[46],"not":[47],"possible":[48],"with":[49,94,303],"conventional":[50],"components.":[51],"Active":[52],"control":[53,125],"surface":[55],"topology":[56],"allows":[57,199],"for":[58,89,133,200],"one":[59],"component":[60,100,219,262],"perform":[62],"multiple":[63],"functions":[64],"thus":[65],"reducing":[66],"cost":[67],"complexity.":[69],"This":[70,123,259],"paper":[71,180],"will":[72,120,152,237,280],"focus":[73,177],"current":[76],"status":[77],"research":[81,109,142],"program":[82,290],"at":[83,86,111,306],"University":[85],"Albany":[87],"Institute":[88],"Materials\u2019":[90],"(UAIM)":[91],"NanoFab":[92],"200":[93],"several":[95,215],"examples":[96,279],"described":[97],"illustrate":[99],"system":[102,212],"development.":[103],"particular,":[105],"among":[106],"portfolio":[110],"UAIM,":[112],"development":[114,184],"selected":[116],"MOEMS-based,":[117],"active":[118,124],"optics":[119],"be":[121,153,238,281],"discussed.":[122],"diffraction":[127],"reflection":[129],"forms":[130],"basis":[132],"utility":[135],"such":[137],"devices.":[138],"Leveraging":[139],"extensive":[141],"expertise":[143],"patented":[146],"MEMS":[147],"Compound":[148],"Grating":[149],"(MCG),":[150],"emphasis":[151],"placed":[154],"extension":[157],"approach":[160],"novel":[162],"designs,":[163],"materials":[164],"fabrication":[166,203,249],"methods":[167],"yield":[169],"low":[170],"power,":[171],"high":[172],"prototypes.":[174],"main":[176],"this":[179],"is":[181,244],"a":[186,205,211,251,255,284],"polymer":[187],"version":[188],"(including":[189],"sacrificial":[190],"layer,":[191],"in":[192,275],"some":[193],"designs)":[194],"MCG":[197,266],"which":[198],"ease":[201],"reduced":[206],"electrostatic":[207],"actuation":[208,276],"voltage.":[209,277],"Following":[210],"design":[213,246],"effort,":[214],"generations":[216],"were":[220],"fabricated":[221],"optimize":[223],"process":[225],"flow.":[226],"Component":[227],"metrology,":[228],"electromechanical":[229],"characterization":[230],"initial":[232],"results":[233],"tests":[236],"reported.":[239],"A":[240],"second":[241],"example":[242],"presented":[243,282],"prototype":[248],"spring":[252],"micrograting":[253],"using":[254],"customized":[256],"SOI":[257],"process.":[258],"highly":[260],"flexible":[261],"builds":[263],"concept":[267],"yields":[269],"order":[271],"magnitude":[273],"reduction":[274],"These":[278],"against":[283],"backdrop":[285],"broad":[288],"UAIM":[289],"provide":[292],"overview":[294],"applications":[297],"their":[301],"integration":[302],"complementary":[304],"technologies":[305],"wafer":[308],"level.":[309]},"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-06-24T00:00:00"}