{"id":"https://openalex.org/W2018658196","doi":"https://doi.org/10.1143/jjap.34.6907","title":"Emission Characteristics of Ion-Implanted Silicon Emitter Tips","display_name":"Emission Characteristics of Ion-Implanted Silicon Emitter Tips","publication_year":1995,"publication_date":"1995-12-01","ids":{"openalex":"https://openalex.org/W2018658196","doi":"https://doi.org/10.1143/jjap.34.6907","mag":"2018658196"},"language":"en","primary_location":{"id":"doi:10.1143/jjap.34.6907","doi":"https://doi.org/10.1143/jjap.34.6907","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.34.6907","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.34.6907/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1143/JJAP.34.6907/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103758363","display_name":"Takayuki Hirano","orcid":"https://orcid.org/0009-0007-7629-1886","observed_orcids":["https://orcid.org/0009-0007-7629-1886","https://orcid.org/0009-0009-3412-1883"]},"institutions":[{"id":"https://openalex.org/I95946053","display_name":"Kobe Steel (Japan)","ror":"https://ror.org/01d36yb27","country_code":"JP","type":"company","lineage":["https://openalex.org/I95946053"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takayuki Hirano","raw_affiliation_strings":["Kobe Steel, Ltd., 1-5-5 Takatsukadai, Nishi-ku, Kobe, Hyogo 651-22, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kobe Steel, Ltd., 1-5-5 Takatsukadai, Nishi-ku, Kobe, Hyogo 651-22, Japan","institution_ids":["https://openalex.org/I95946053"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057105848","display_name":"S. Kanemaru","orcid":"https://orcid.org/0000-0002-0570-589X","observed_orcids":["https://orcid.org/0000-0002-0570-589X"]},"institutions":[{"id":"https://openalex.org/I95946053","display_name":"Kobe Steel (Japan)","ror":"https://ror.org/01d36yb27","country_code":"JP","type":"company","lineage":["https://openalex.org/I95946053"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Seigo Kanemaru","raw_affiliation_strings":["Kobe Steel, Ltd., 1-5-5 Takatsukadai, Nishi-ku, Kobe, Hyogo 651-22, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kobe Steel, Ltd., 1-5-5 Takatsukadai, Nishi-ku, Kobe, Hyogo 651-22, Japan","institution_ids":["https://openalex.org/I95946053"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111598182","display_name":"H. Tanoue","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hisao Tanoue","raw_affiliation_strings":["Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305, Japan","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109091516","display_name":"Junji Itoh Junji Itoh","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Junji Itoh Junji Itoh","raw_affiliation_strings":["Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305, Japan","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2210,"currency":"USD","value_usd":2210},"apc_paid":null,"fwci":2.6978,"has_fulltext":false,"cited_by_count":25,"citation_normalized_percentile":{"value":0.8839122,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"34","issue":"12S","first_page":"6907","last_page":"6907"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13418","display_name":"Photocathodes and Microchannel Plates","score":0.5565999746322632,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13418","display_name":"Photocathodes and Microchannel Plates","score":0.5565999746322632,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11175","display_name":"Gyrotron and Vacuum Electronics Research","score":0.21799999475479126,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.014499999582767487,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/field-emission","display_name":"field emission","score":0.6420000195503235},{"id":"https://openalex.org/keywords/ion-implantation","display_name":"ion implantation","score":0.9909999966621399},{"id":"https://openalex.org/keywords/boron-implantation","display_name":"boron implantation","score":0.8769999742507935},{"id":"https://openalex.org/keywords/phosphorus-ion-implantation","display_name":"phosphorus implantation","score":0.9909999966621399},{"id":"https://openalex.org/keywords/band-structure","display_name":"electronic band structure","score":0.7269999980926514},{"id":"https://openalex.org/keywords/current-voltage-characteristics","display_name":"current-voltage characteristics","score":0.8730000257492065},{"id":"https://openalex.org/keywords/fowler-nordheim-theory","display_name":"Fowler-Nordheim theory","score":0.9779999852180481},{"id":"https://openalex.org/keywords/current-saturation","display_name":"current saturation","score":0.9509999752044678},{"id":"https://openalex.org/keywords/high-electric-field","display_name":"high electric field","score":0.6859999895095825},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.4779999852180481}],"concepts":[{"id":"https://openalex.org/C46918542","wikidata":"https://www.wikidata.org/wiki/Q1648344","display_name":"Common emitter","level":2,"score":0.902298092842102},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.712064266204834},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.6870149374008179},{"id":"https://openalex.org/C121029787","wikidata":"https://www.wikidata.org/wiki/Q902877","display_name":"Field electron emission","level":3,"score":0.6639500856399536},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.631971001625061},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.5901163816452026},{"id":"https://openalex.org/C155891486","wikidata":"https://www.wikidata.org/wiki/Q3694418","display_name":"Saturation current","level":3,"score":0.562671959400177},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5455292463302612},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.48753687739372253},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.4680015444755554},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4505598247051239},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42228686809539795},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.3785414397716522},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.3498018980026245},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2715451717376709},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.13362473249435425},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1174299418926239},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0705256462097168},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0660519003868103},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1143/jjap.34.6907","doi":"https://doi.org/10.1143/jjap.34.6907","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.34.6907","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.34.6907/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1143/jjap.34.6907","doi":"https://doi.org/10.1143/jjap.34.6907","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.34.6907","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.34.6907/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2018658196.pdf"},"referenced_works_count":6,"referenced_works":["https://openalex.org/W2045294354","https://openalex.org/W2066411212","https://openalex.org/W2117631851","https://openalex.org/W2120673581","https://openalex.org/W2146427497","https://openalex.org/W2161851798"],"related_works":["https://openalex.org/W2120173061","https://openalex.org/W2153766923","https://openalex.org/W2037892517","https://openalex.org/W1989814828","https://openalex.org/W2041772727","https://openalex.org/W2327628940","https://openalex.org/W1996202583","https://openalex.org/W2083054794","https://openalex.org/W2065507486","https://openalex.org/W6945253012"],"abstract_inverted_index":{"An":[0],"ion":[1,37],"implantation":[2,38],"technique":[3],"has":[4],"been":[5],"applied":[6],"to":[7],"control":[8],"the":[9,67,74,86,95,115,120],"energy":[10,116],"band":[11,117],"structure":[12,33,118],"of":[13,24,48,119],"Si":[14],"field-emitter":[15],"tip":[16,62,68,121],"surface.":[17,69,122],"B+or":[18],"P+ions":[19],"were":[20,34,56],"implanted":[21,65],"after":[22,36],"fabrication":[23],"a":[25,99],"gated":[26],"emitter":[27,32,54],"structure.":[28],"No":[29],"changes":[30],"in":[31,83,103],"observed":[35],"and":[39,52,79,91],"successive":[40],"annealing":[41],"at":[42],"800\u00b0":[43],"C.":[44],"Current-voltage":[45],"(I-V)":[46],"characteristics":[47],"n,":[49],"p,":[50],"p/n":[51,58,80],"n/p":[53,92],"tips":[55,81],"measured:":[57],"indicates":[59],"an":[60],"n-type":[61],"with":[63,85],"B+ions":[64],"into":[66],"It":[70],"was":[71],"found":[72],"from":[73],"experimental":[75],"results":[76],"that":[77],"n":[78],"hadI-Vcharacteristics":[82],"agreement":[84],"Fowler-Nordheim":[87],"theory.":[88],"The":[89,107],"p":[90],"tips,":[93],"on":[94],"other":[96],"hand,":[97],"exhibited":[98],"current":[100],"saturation":[101,109],"property":[102],"high":[104],"electric":[105],"field.":[106],"present":[108],"mechanism":[110],"is":[111],"explained":[112],"by":[113],"considering":[114]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-10-17T09:40:24.721904","created_date":"2016-06-24T00:00:00"}