{"id":"https://openalex.org/W2018138605","doi":"https://doi.org/10.1117/12.639904","title":"Design and modeling of a high accuracy three degrees of freedom MEMS manipulator","display_name":"Design and modeling of a high accuracy three degrees of freedom MEMS manipulator","publication_year":2005,"publication_date":"2005-12-28","ids":{"openalex":"https://openalex.org/W2018138605","doi":"https://doi.org/10.1117/12.639904","mag":"2018138605"},"language":"en","primary_location":{"id":"doi:10.1117/12.639904","doi":"https://doi.org/10.1117/12.639904","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.639904","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://hdl.handle.net/2429/38902","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Shyam Venugopal","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Shyam Venugopal","raw_affiliation_strings":["Univ. of Texas at Arlington (United States)","University of Texas at Arlington"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Texas at Arlington (United States)","institution_ids":["https://openalex.org/I189196454"]},{"raw_affiliation_string":"University of Texas at Arlington","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109190842","display_name":"Lun-Chen Hsu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Lun-Chen Hsu","raw_affiliation_strings":["Univ. of Texas at Arlington (United States)","University of Texas at Arlington"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Texas at Arlington (United States)","institution_ids":["https://openalex.org/I189196454"]},{"raw_affiliation_string":"University of Texas at Arlington","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091728723","display_name":"Smitha Malalur-Nagaraja-Rao","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Smitha Malalur-Nagaraja-Rao","raw_affiliation_strings":["Univ. of Texas at Arlington (United States)","University of Texas at Arlington"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Texas at Arlington (United States)","institution_ids":["https://openalex.org/I189196454"]},{"raw_affiliation_string":"University of Texas at Arlington","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111036463","display_name":"B. P. Wang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. P. Wang","raw_affiliation_strings":["Univ. of Texas at Arlington (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Texas at Arlington (United States)","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044050496","display_name":"Mu Chiao","orcid":"https://orcid.org/0000-0002-9128-3290","observed_orcids":["https://orcid.org/0000-0002-9128-3290"]},"institutions":[{"id":"https://openalex.org/I141945490","display_name":"University of British Columbia","ror":"https://ror.org/03rmrcq20","country_code":"CA","type":"education","lineage":["https://openalex.org/I141945490"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Mu Chiao","raw_affiliation_strings":["Univ. of British Columbia (Canada)","University of British Columbia, Canada ,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of British Columbia (Canada)","institution_ids":["https://openalex.org/I141945490"]},{"raw_affiliation_string":"University of British Columbia, Canada ,","institution_ids":["https://openalex.org/I141945490"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5033472595","display_name":"J.\u2010C. Chiao","orcid":"https://orcid.org/0000-0001-9670-0340","observed_orcids":["https://orcid.org/0000-0001-9670-0340"]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.-C. Chiao","raw_affiliation_strings":["Univ. of Texas at Arlington (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Texas at Arlington (United States)","institution_ids":["https://openalex.org/I189196454"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.5643,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.57213767,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"6037","issue":null,"first_page":"60371Y","last_page":"60371Y"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.003000000026077032,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10571","display_name":"Robotic Mechanisms and Dynamics","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/three-degrees-of-freedom","display_name":"three degrees of freedom","score":0.7609999775886536},{"id":"https://openalex.org/keywords/thermal-actuators","display_name":"thermal actuators","score":0.8080000281333923},{"id":"https://openalex.org/keywords/positioning-accuracy","display_name":"positioning accuracy","score":0.5199999809265137},{"id":"https://openalex.org/keywords/calibration-algorithm","display_name":"calibration algorithm","score":0.7599999904632568},{"id":"https://openalex.org/keywords/motion-error-compensation","display_name":"motion error compensation","score":0.7760000228881836},{"id":"https://openalex.org/keywords/in-plane-actuation","display_name":"in-plane actuation","score":0.5329999923706055},{"id":"https://openalex.org/keywords/manipulator-modeling","display_name":"manipulator modeling","score":0.5979999899864197}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.8036339282989502},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.7925520539283752},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.6840587854385376},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6423518657684326},{"id":"https://openalex.org/C2780365114","wikidata":"https://www.wikidata.org/wiki/Q169478","display_name":"MATLAB","level":2,"score":0.5728480815887451},{"id":"https://openalex.org/C138094506","wikidata":"https://www.wikidata.org/wiki/Q12065277","display_name":"Parallel manipulator","level":3,"score":0.5432994365692139},{"id":"https://openalex.org/C208081375","wikidata":"https://www.wikidata.org/wiki/Q274502","display_name":"Degrees of freedom (physics and chemistry)","level":2,"score":0.42442411184310913},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4121883809566498},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.38370174169540405},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.35731828212738037},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.32527458667755127},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.24525904655456543},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1117/12.639904","doi":"https://doi.org/10.1117/12.639904","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.639904","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},{"id":"pmh:oai:circle.library.ubc.ca:2429/38902","doi":null,"is_oa":true,"landing_page_url":"http://hdl.handle.net/2429/38902","pdf_url":null,"source":{"id":"https://openalex.org/S4377196297","display_name":"cIRcle (University of British Columbia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I141945490","host_organization_name":"University of British Columbia","host_organization_lineage":["https://openalex.org/I141945490"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference Paper"}],"best_oa_location":{"id":"pmh:oai:circle.library.ubc.ca:2429/38902","doi":null,"is_oa":true,"landing_page_url":"http://hdl.handle.net/2429/38902","pdf_url":null,"source":{"id":"https://openalex.org/S4377196297","display_name":"cIRcle (University of British Columbia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I141945490","host_organization_name":"University of British Columbia","host_organization_lineage":["https://openalex.org/I141945490"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference Paper"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1910927111","https://openalex.org/W1979412207","https://openalex.org/W1983671569","https://openalex.org/W1986598556","https://openalex.org/W1986756113","https://openalex.org/W1992081424","https://openalex.org/W2018854595","https://openalex.org/W2041026247","https://openalex.org/W2053168075","https://openalex.org/W2118930676","https://openalex.org/W2143703270","https://openalex.org/W2150393993","https://openalex.org/W2163392003","https://openalex.org/W2246023205"],"related_works":["https://openalex.org/W2232456168","https://openalex.org/W2097473651","https://openalex.org/W2110918717","https://openalex.org/W1561568208","https://openalex.org/W2141292323","https://openalex.org/W2048811232","https://openalex.org/W2044261854","https://openalex.org/W117837942","https://openalex.org/W172255258","https://openalex.org/W2016143461"],"abstract_inverted_index":{"A":[0,106,131],"new":[1],"design":[2,145],"for":[3,23,65],"a":[4,69],"high":[5,40],"accuracy,":[6],"3-degree":[7],"of":[8,44,92,115],"freedom":[9],"(DOF)":[10],"MEMS":[11,80],"manipulator":[12,18,61,126],"is":[13,19,46,109],"proposed.":[14],"The":[15,90,119],"3-DOF":[16],"robotic":[17],"to":[20,62,72,85,111,124,136],"be":[21,150],"used":[22],"biomedical":[24],"applications":[25],"such":[26],"as":[27],"cell":[28],"probing,":[29],"tissue":[30],"sampling,":[31],"neuron":[32],"signal":[33],"reading":[34],"and":[35,42,78,99,127,146],"drug":[36],"delivery,":[37],"in":[38,56,143],"which":[39],"accuracy":[41],"repeatability":[43],"positioning":[45,75],"required.":[47],"While":[48],"sensing":[49],"or":[50],"imaging":[51],"elements":[52],"are":[53,83],"not":[54],"available":[55],"the":[57,60,74,87,93,100,113,125,138,144],"integration":[58],"with":[59,103],"provide":[63],"feedback":[64],"positioning,":[66],"we":[67],"investigated":[68],"calibration":[70,107,139],"approach":[71],"minimize":[73],"errors.":[76,118],"In-plane":[77],"vertical":[79],"thermal":[81,94],"actuators":[82,95],"chosen":[84],"perform":[86],"required":[88],"tasks.":[89],"modeling":[91],"was":[96,121,134],"first":[97],"studied":[98],"results":[101,128],"match":[102],"experimental":[104],"results.":[105],"algorithm":[108,120],"implemented":[110],"allow":[112],"minimization":[114],"accumulated":[116],"motion":[117],"successfully":[122],"applied":[123],"were":[129],"obtained.":[130],"MATLAB":[132],"script":[133],"written":[135],"simplify":[137],"procedure.":[140],"Problems":[141],"faced":[142],"potential":[147],"solutions":[148],"will":[149],"also":[151],"discussed.":[152]},"counts_by_year":[{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}